Yasumitsu Kawabata

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Polishing method

    • Patent number 9,573,245
    • Issue date Feb 21, 2017
    • Ebara Corporation
    • Taro Takahashi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate polishing apparatus

    • Patent number 8,388,409
    • Issue date Mar 5, 2013
    • Ebara Corporation
    • Hidetaka Nakao
    • B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

  • Information Patent Application

    POLISHING METHOD

    • Publication number 20150099424
    • Publication date Apr 9, 2015
    • EBARA CORPORATION
    • Taro TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE POLISHING APPARATUS

    • Publication number 20100151770
    • Publication date Jun 17, 2010
    • Hidetaka Nakao
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate polishing apparatus

    • Publication number 20050142991
    • Publication date Jun 30, 2005
    • Hidetaka Nakao
    • B24 - GRINDING POLISHING