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Yasumitsu Kawabata
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Tokyo, JP
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last 30 patents
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Patent Grant
Polishing method
Patent number
9,573,245
Issue date
Feb 21, 2017
Ebara Corporation
Taro Takahashi
B24 - GRINDING POLISHING
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Patent Grant
Substrate polishing apparatus
Patent number
8,388,409
Issue date
Mar 5, 2013
Ebara Corporation
Hidetaka Nakao
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
POLISHING METHOD
Publication number
20150099424
Publication date
Apr 9, 2015
EBARA CORPORATION
Taro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE POLISHING APPARATUS
Publication number
20100151770
Publication date
Jun 17, 2010
Hidetaka Nakao
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20050142991
Publication date
Jun 30, 2005
Hidetaka Nakao
B24 - GRINDING POLISHING