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Ying-Chih Liu
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Ping Tung Hsien, TW
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last 30 patents
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Patent Grant
Installation for improving chemical-mechanical polishing operation
Patent number
6,116,991
Issue date
Sep 12, 2000
Worldwide Semiconductor Manufacturing Corp.
Ying-Chih Liu
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer cleaning device
Patent number
6,101,656
Issue date
Aug 15, 2000
Worldwide Semiconductor Manufacturing Corp.
Sen-Nan Lee
B08 - CLEANING
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Patent Grant
Installation for improving chemical-mechanical polishing operation
Patent number
6,062,955
Issue date
May 16, 2000
Worldwide Semiconductor Manufacturing Corp.
Ying-Chih Liu
B24 - GRINDING POLISHING