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Yoshiaki Takizawa
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged-particle beam lithographic system
Patent number
9,362,085
Issue date
Jun 7, 2016
Jeol Ltd.
Noriyuki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Charged-Particle Beam Lithographic System
Publication number
20150303027
Publication date
Oct 22, 2015
JEOL Ltd.
Noriyuki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS