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Yosuke Kimura
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Leuven, BE
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last 30 patents
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Patent Grant
Method for repairing damage of dielectric film by cyclic processes
Patent number
8,785,215
Issue date
Jul 22, 2014
ASM IP Holding B.V.
Akiko Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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METHOD FOR REPAIRING DAMAGE OF DIELECTRIC FILM BY CYCLIC PROCESSES
Publication number
20130337583
Publication date
Dec 19, 2013
ASM IP HOLDING B.V.
Akiko Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...