Yuuki YAMAMOTO

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming boron-based film, formation apparatus
- Patent number 11,615,957
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming boron-based film, and film forming apparatus
- Patent number 11,145,522
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Yoshimasa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS
- Publication number 20210090888
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON-BASED FILM FORMING METHOD AND APPARATUS
- Publication number 20190301019
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Yoshimasa WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Boron-Based Film, and Film Forming Apparatus
- Publication number 20190244838
- Publication date Aug 8, 2019
- TOKYO ELECTRON LIMITED
- Yoshimasa WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...