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Zia Karim
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San Jose, CA, US
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last 30 patents
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Patent Grant
Radio frequency supply circuit for in situ cleaning of plasma-enhan...
Patent number
6,199,506
Issue date
Mar 13, 2001
Novellus Systems, Inc.
Stephen Hilliker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...