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6-Dof combined magnetic fluidic floating motion stage 100-micrometer cube range
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CPC
G05B2219/41349
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/41349
6-Dof combined magnetic fluidic floating motion stage 100-micrometer cube range
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CPC
G05B2219/41349
