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H03H2009/02385
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H03H2009/02385
Anchors for square resonators
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Patents Grants
last 30 patents
Information
Patent Grant
Micromechanical resonator
Patent number
10,931,255
Issue date
Feb 23, 2021
Teknologian tutkimuskeskus VTT Oy
Antti Jaakkola
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Microelectromechanical system resonator devices and oscillator cont...
Patent number
10,879,869
Issue date
Dec 29, 2020
Socovar, Société En Commandite
Mohannad Elsayad
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thermal-piezoresistive oscillator-based aerosol sensor and aerosol...
Patent number
10,705,053
Issue date
Jul 7, 2020
National Tsing Hua University
Sheng-Shian Li
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Vibration device
Patent number
10,276,775
Issue date
Apr 30, 2019
MURATA MANUFACTURING CO., LTD.
Takashi Hase
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Temperature compensation for MEMS devices
Patent number
9,602,026
Issue date
Mar 21, 2017
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic body MEMS devices
Patent number
9,300,227
Issue date
Mar 29, 2016
Silicon Laboratories Inc.
Emmanuel P. Quevy
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Suspended passive element for MEMS devices
Patent number
9,246,412
Issue date
Jan 26, 2016
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electromechanical resonator with resonant anchor
Patent number
8,947,176
Issue date
Feb 3, 2015
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Sebastien Hentz
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Micromechanical resonator array and method for manufacturing thereof
Patent number
8,786,166
Issue date
Jul 22, 2014
Teknologian Tutkimuskeskus VTT
Antti Jaakkola
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
MEMS resonator array structure and method of operating and using same
Patent number
8,324,986
Issue date
Dec 4, 2012
Robert Bosch GmbH
Markus Lutz
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
MEMS resonator array structure and method of operating and using same
Patent number
7,907,035
Issue date
Mar 15, 2011
Robert Bosch GmbH
Markus Lutz
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
Information
Patent Application
MICROMECHANICAL RESONATOR
Publication number
20190173450
Publication date
Jun 6, 2019
Teknologian Tutkimuskeskus VTT Oy
Antti JAAKKOLA
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM RESONATOR DEVICES AND OSCILLATOR CONT...
Publication number
20190140612
Publication date
May 9, 2019
MOHANNAD ELSAYAD
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MONOLITHIC BODY MEMS DEVICES
Publication number
20140361843
Publication date
Dec 11, 2014
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUSPENDED PASSIVE ELEMENT FOR MEMS DEVICES
Publication number
20140361844
Publication date
Dec 11, 2014
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TEMPERATURE COMPENSATION FOR MEMS DEVICES
Publication number
20140361661
Publication date
Dec 11, 2014
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIBRATION ELEMENT AND ELECTRONIC DEVICE
Publication number
20140145552
Publication date
May 29, 2014
SEIKO EPSON CORPORATION
Ryuji Kihara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL RESONATOR WITH RESONANT ANCHOR
Publication number
20120092082
Publication date
Apr 19, 2012
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
Sebastien Hentz
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF
Publication number
20120038431
Publication date
Feb 16, 2012
TEKNOLOGIAN TUTKIMUSKESKUS VTT
Antti JAAKKOLA
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME
Publication number
20110199167
Publication date
Aug 18, 2011
Markus Lutz
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MEMS resonator array structure and method of operating and using same
Publication number
20090153258
Publication date
Jun 18, 2009
Markus Lutz
H03 - BASIC ELECTRONIC CIRCUITRY