applied to semi conductors

Industry

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  • H05B3/143
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Tantalum Nitride Resistive Heater for Thermally-Tunable Photonics D...

    • Publication number 20240126107
    • Publication date Apr 18, 2024
    • Newport Fab, LLC dba Tower Semiconductor Newport Newport Beach
    • Zhirong Tang
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER

    • Publication number 20230284341
    • Publication date Sep 7, 2023
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER

    • Publication number 20230247727
    • Publication date Aug 3, 2023
    • MICO CERAMICS LTD.
    • Jung Chul JIN
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    METROLOGY DEVICE, SYSTEM AND METHOD

    • Publication number 20230209661
    • Publication date Jun 29, 2023
    • Matthias Imboden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE

    • Publication number 20230187261
    • Publication date Jun 15, 2023
    • NGK Insulators, Ltd.
    • Hiroya SUGIMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE HOLDER AND METHOD OF PRODUCING SUBSTRATE HOLDER

    • Publication number 20230187263
    • Publication date Jun 15, 2023
    • NGK SPARK PLUG CO., LTD.
    • Kazuya TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUSCEPTOR FOR HIGH-TEMPERATURE USE HAVING SHAFT WITH LOW THERMAL CO...

    • Publication number 20230088822
    • Publication date Mar 23, 2023
    • MICO CERAMICS LTD.
    • Jung Chul JIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC STRUCTURE AND WAFER SYSTEM

    • Publication number 20220394822
    • Publication date Dec 8, 2022
    • KYOCERA CORPORATION
    • Yasunori KAWANABE
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER

    • Publication number 20220377850
    • Publication date Nov 24, 2022
    • NGK Insulators, Ltd.
    • Takayoshi AKAO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER AND MANUFACTURING METHOD THEREOF

    • Publication number 20220377848
    • Publication date Nov 24, 2022
    • MICO CERAMICS LTD.
    • Je Ho CHAE
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER AND MANUFACTURING METHOD THEREFOR

    • Publication number 20220369428
    • Publication date Nov 17, 2022
    • MICO CERAMICS LTD.
    • Je Ho CHAE
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTRODE-EMBEDDED MEMBER, SUBSTRATE HOLDING MEMBER, CERAMIC HEATER...

    • Publication number 20220319897
    • Publication date Oct 6, 2022
    • NGK SPARK PLUG CO., LTD.
    • Makoto HINO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATED SUBSTRATE SUPPORT

    • Publication number 20220279626
    • Publication date Sep 1, 2022
    • Applied Materials, Inc.
    • GOVINDA RAJ
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR-MANUFACTURING APPARATUS MEMBER AND METHOD OF MANUFACT...

    • Publication number 20220189812
    • Publication date Jun 16, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE

    • Publication number 20220124874
    • Publication date Apr 21, 2022
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER

    • Publication number 20220110190
    • Publication date Apr 7, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT

    • Publication number 20220030668
    • Publication date Jan 27, 2022
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT

    • Publication number 20220030669
    • Publication date Jan 27, 2022
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMOCOUPLE GUIDE AND CERAMIC HEATER

    • Publication number 20210391193
    • Publication date Dec 16, 2021
    • NGK Insulators, Ltd.
    • Ryohei MATSUSHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMOCOUPLE GUIDE AND CERAMIC HEATER

    • Publication number 20210391194
    • Publication date Dec 16, 2021
    • NGK Insulators, Ltd.
    • Ryohei MATSUSHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER AND METHOD OF PRODUCING THE SAME

    • Publication number 20210329743
    • Publication date Oct 21, 2021
    • NGK Insulators, Ltd.
    • Ryohei MATSUSHITA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUPPORT UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

    • Publication number 20210280398
    • Publication date Sep 9, 2021
    • SEMES CO., LTD.
    • Seungjun Oh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER AND THERMOCOUPLE GUIDE

    • Publication number 20210243847
    • Publication date Aug 5, 2021
    • NGK Insulators, Ltd.
    • Daisuke TSUNEKAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER

    • Publication number 20210243846
    • Publication date Aug 5, 2021
    • Noboru KAJIHARA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER

    • Publication number 20210243848
    • Publication date Aug 5, 2021
    • NGK Insulators, Ltd.
    • Tomohiro TAKAHASHI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME

    • Publication number 20210227639
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER

    • Publication number 20210212172
    • Publication date Jul 8, 2021
    • NGK Insulators, Ltd.
    • Tomohiro TAKAHASHI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PBN Heaters For ALD Temperature Uniformity

    • Publication number 20210092800
    • Publication date Mar 25, 2021
    • Applied Materials, Inc.
    • Kenneth Brian Doering
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR MANUFACTURING AN ELECTRICALLY OPERABLE HEATING BODY FOR...

    • Publication number 20200397052
    • Publication date Dec 24, 2020
    • HAUNI MASCHINENBAU GMBH
    • UWE PELZ
    • A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
  • Information Patent Application

    WAFER SUPPORT TABLE

    • Publication number 20200135526
    • Publication date Apr 30, 2020
    • NGK Insulators, Ltd.
    • Tomohiro TAKAHASHI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR