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CERAMIC HEATER
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Publication number 20230284341
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Publication date Sep 7, 2023
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NGK Insulators, Ltd.
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Masaki ISHIKAWA
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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CERAMIC HEATER
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Publication number 20230247727
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Publication date Aug 3, 2023
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MICO CERAMICS LTD.
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Jung Chul JIN
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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WAFER PLACEMENT TABLE
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Publication number 20230187261
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Publication date Jun 15, 2023
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NGK Insulators, Ltd.
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Hiroya SUGIMOTO
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H01 - BASIC ELECTRIC ELEMENTS
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CERAMIC STRUCTURE AND WAFER SYSTEM
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Publication number 20220394822
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Publication date Dec 8, 2022
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KYOCERA CORPORATION
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Yasunori KAWANABE
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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HEATED SUBSTRATE SUPPORT
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Publication number 20220279626
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Publication date Sep 1, 2022
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Applied Materials, Inc.
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GOVINDA RAJ
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER PLACEMENT TABLE
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Publication number 20220124874
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Publication date Apr 21, 2022
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NGK Insulators, Ltd.
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Seiya INOUE
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H01 - BASIC ELECTRIC ELEMENTS
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CERAMIC HEATER
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Publication number 20220110190
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Publication date Apr 7, 2022
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NGK Insulators, Ltd.
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Hiroshi TAKEBAYASHI
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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CERAMIC HEATER WITH SHAFT
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Publication number 20220030668
-
Publication date Jan 27, 2022
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NGK Insulators, Ltd.
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Tatsuya KUNO
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H01 - BASIC ELECTRIC ELEMENTS
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CERAMIC HEATER WITH SHAFT
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Publication number 20220030669
-
Publication date Jan 27, 2022
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NGK Insulators, Ltd.
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Kenichiro AIKAWA
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H01 - BASIC ELECTRIC ELEMENTS
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CERAMIC HEATER AND THERMOCOUPLE GUIDE
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Publication number 20210243847
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Publication date Aug 5, 2021
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NGK Insulators, Ltd.
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Daisuke TSUNEKAWA
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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CERAMIC HEATER
-
Publication number 20210243846
-
Publication date Aug 5, 2021
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Noboru KAJIHARA
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
-
CERAMIC HEATER
-
Publication number 20210243848
-
Publication date Aug 5, 2021
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NGK Insulators, Ltd.
-
Tomohiro TAKAHASHI
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
-
-
CERAMIC HEATER
-
Publication number 20210212172
-
Publication date Jul 8, 2021
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NGK Insulators, Ltd.
-
Tomohiro TAKAHASHI
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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PBN Heaters For ALD Temperature Uniformity
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Publication number 20210092800
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Publication date Mar 25, 2021
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Applied Materials, Inc.
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Kenneth Brian Doering
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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WAFER SUPPORT TABLE
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Publication number 20200135526
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Publication date Apr 30, 2020
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NGK Insulators, Ltd.
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Tomohiro TAKAHASHI
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR