Arrangements for controlling convergence of a plurality of beams

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps

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H01J3/07Arrangements for controlling convergence of a plurality of beams

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for generating a plurality of beamlets
- Patent number 7,569,833
- Issue date Aug 4, 2009
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating a plurality of beamlets
- Patent number 7,391,037
- Issue date Jun 24, 2008
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating a plurality of beamlets
- Patent number 7,365,338
- Issue date Apr 29, 2008
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating a plurality of beamlets
- Patent number 7,348,567
- Issue date Mar 25, 2008
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating a plurality of beamlets
- Patent number 7,129,502
- Issue date Oct 31, 2006
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM APPARATUS, AND X-RAY GENERATION APPARATUS AND SCANNIN...
- Publication number 20180366294
- Publication date Dec 20, 2018
- Shimadzu Corporation
- Akihiro MIYAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
- Publication number 20080073547
- Publication date Mar 27, 2008
- Pieter Kruit
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for generating a plurality of beamlets
- Publication number 20070029499
- Publication date Feb 8, 2007
- Pieter Kruit
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for generating a plurality of beamlets
- Publication number 20070029509
- Publication date Feb 8, 2007
- Pieter Kruit
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for generating a plurality of beamlets
- Publication number 20070018112
- Publication date Jan 25, 2007
- Pieter Kruit
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for generating a plurality of beamlets
- Publication number 20040232349
- Publication date Nov 25, 2004
- Pieter Kruit
- B82 - NANO-TECHNOLOGY