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Arrangements for controlling cross-section of ray or beam Arrangements for correcting aberration of beam
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CPC
H01J3/12
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J3/00
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
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H01J3/12
Arrangements for controlling cross-section of ray or beam Arrangements for correcting aberration of beam
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