-
Lithographic apparatus
-
Patent number 10,268,128
-
Issue date Apr 23, 2019
-
ASML Netherlands B.V.
-
Franciscus Johannes Joseph Janssen
-
F28 - HEAT EXCHANGE IN GENERAL
-
-
System for reclaiming process water
-
Patent number 6,394,174
-
Issue date May 28, 2002
-
Taiwan Semiconductor Manufacturing Company, Ltd
-
Yi-Jang Hsieh
-
F28 - HEAT EXCHANGE IN GENERAL
-
3022985
-
Patent number 3,022,985
-
Issue date Feb 27, 1962
-
F28 - HEAT EXCHANGE IN GENERAL