Arrangements or methods specially adapted for testing micro-elecro-mechanical resonators or networks

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HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators

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H03H3/0075Arrangements or methods specially adapted for testing micro-elecro-mechanical resonators or networks

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Patents Grantslast 30 patents

Information Patent Grant
Bulk mode microelectromechanical resonator devices and methods
- Patent number 10,742,191
- Issue date Aug 11, 2020
- MEMS-Vision International Inc.
- Mohannad Elsayed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drive mode and sense mode resonance frequency matching
- Patent number 10,538,427
- Issue date Jan 21, 2020
- Invensense, Inc.
- Alireza Shirvani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trimming method for microresonators and microresonators made thereby
- Patent number 10,148,244
- Issue date Dec 4, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- Michael David Henry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of testing packaged thin-film piezoelectric-on-semiconducto...
- Patent number 8,638,178
- Issue date Jan 28, 2014
- Integrated Device Technology Inc.
- Ye Wang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
High frequency device, power supply device and communication apparatus
- Patent number 7,893,796
- Issue date Feb 22, 2011
- Sony Corporation
- Masahiro Tanaka
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Frequency sensitivity analysis and optimum design for MEMS resonator
- Patent number 6,744,174
- Issue date Jun 1, 2004
- The Regents of the University of California
- Brad Paden
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DRIVE MODE AND SENSE MODE RESONANCE FREQUENCY MATCHING
- Publication number 20190055116
- Publication date Feb 21, 2019
- InvenSense, Inc.
- Alireza SHIRVANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
High Frequency Device, Power Supply Device and Communication Apparatus
- Publication number 20080272749
- Publication date Nov 6, 2008
- Masahiro Tanaka
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Frequency sensitivity analysis and optimum design for MEMS resonator
- Publication number 20020190607
- Publication date Dec 19, 2002
- The Regents of the University of California.
- Brad Paden
- B81 - MICRO-STRUCTURAL TECHNOLOGY