Automatic registration or positioning of originals with respect to each other or the photosensitive layer

Industry

CPC
G03B27/53

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Parent Industries

GPHYSICS G03Photography G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES ACCESSORIES THEREFOR G03B27/00Photographic printing apparatus

Current Industry

G03B27/53Automatic registration or positioning of originals with respect to each other or the photosensitive layer

Industries

Patents Grantslast 30 patents

Information Patent Grant
Automatic microform carrier systems and methods
- Patent number 11,150,544
- Issue date Oct 19, 2021
- e-ImageData Corp.
- Todd Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Exposure method
- Patent number 10,281,828
- Issue date May 7, 2019
- Kabushiki Kaisha Tokai Rika Denki Seisakusho
- Kento Arimatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system, a lithographic apparatus and a method for posit...
- Patent number 9,671,702
- Issue date Jun 6, 2017
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system, a lithographic apparatus and a method for posit...
- Patent number 9,229,339
- Issue date Jan 5, 2016
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Digital microform imaging apparatus
- Patent number 9,197,766
- Issue date Nov 24, 2015
- e-ImageData Corp.
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Digital microform imaging apparatus
- Patent number 9,179,019
- Issue date Nov 3, 2015
- e-ImageData Corp.
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,152,059
- Issue date Oct 6, 2015
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration of lithographic apparatus by exposing patterns on subst...
- Patent number 9,069,240
- Issue date Jun 30, 2015
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support structure, lithographic apparatus and method
- Patent number 9,052,612
- Issue date Jun 9, 2015
- ASML Netherlands B.V.
- Marcus Martinus Petrus Adrianus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning a wafer stage and apparatus for performing the same
- Patent number 9,007,567
- Issue date Apr 14, 2015
- Samsung Electronics Co., Ltd.
- Tae-Jin Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 9,001,306
- Issue date Apr 7, 2015
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring mark position and measuring apparatus
- Patent number 8,976,337
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining an overlay error
- Patent number 8,908,147
- Issue date Dec 9, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,810,774
- Issue date Aug 19, 2014
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,675,175
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 8,625,072
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Digital microform imaging apparatus
- Patent number 8,537,279
- Issue date Sep 17, 2013
- e-ImageData Corp.
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,395,755
- Issue date Mar 12, 2013
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Digital microform imaging apparatus
- Patent number 8,269,890
- Issue date Sep 18, 2012
- E-IMAGE Data Corporation
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and system for exposing a photoresist in a magnetic device
- Patent number 8,169,473
- Issue date May 1, 2012
- Western Digital (Fremont), LLC
- Winnie Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for performing a focus test and a device manufacturing method
- Patent number 7,619,717
- Issue date Nov 17, 2009
- ASML Netherlands B.V.
- Krister Magnusson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of reducing a wave front aberration, and computer program pr...
- Patent number 7,580,113
- Issue date Aug 25, 2009
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,576,834
- Issue date Aug 18, 2009
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging apparatus with media supply system employing vibration for...
- Patent number 7,562,868
- Issue date Jul 21, 2009
- Carestream Health, Inc.
- Troy A. Giese
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and apparatus for automatic film recognition
- Patent number 7,486,422
- Issue date Feb 3, 2009
- Qisda Corporation
- Xian-Qiang Guo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Displacement measurement system, lithographic apparatus, displaceme...
- Patent number 7,483,120
- Issue date Jan 27, 2009
- ASML Netherlands B.V.
- Bernardus Antonius Johannes Luttikhuis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,385,675
- Issue date Jun 10, 2008
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automatic trimming/printing apparatus
- Patent number 6,104,469
- Issue date Aug 15, 2000
- Noritsu Koki Co., Ltd.
- Kazuyoshi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plate exposing apparatus and method
- Patent number 5,892,574
- Issue date Apr 6, 1999
- Western Litho Plate & Supply Co.
- John W. Powers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photographic processor
- Patent number 5,861,943
- Issue date Jan 19, 1999
- Noritsu Koki Co., Ltd.
- Koji Seki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATIC MICROFORM CARRIER SYSTEMS AND METHODS
- Publication number 20190324354
- Publication date Oct 24, 2019
- e-lmageData Corp.
- Todd Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
EXPOSURE METHOD
- Publication number 20180335688
- Publication date Nov 22, 2018
- KABUSHIKI KAISHA TOKAI RIKA DENKI SEISAKUSHO
- Kento ARIMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20140218712
- Publication date Aug 7, 2014
- Canon Kabushiki Kaisha
- Toshiki IWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20140092374
- Publication date Apr 3, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL MICROFORM IMAGING APPARATUS
- Publication number 20140015958
- Publication date Jan 16, 2014
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20130201466
- Publication date Aug 8, 2013
- ASML NETHERLANDS B.V.
- Richard Alexander GEORGE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CORN WITH INCREASED YIELD AND NITROGEN UTILIZATION EFFICIENCY
- Publication number 20130125257
- Publication date May 16, 2013
- Dow AgroSciences LLC
- Jeffrey Church
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
DIGITAL MICROFORM IMAGING APPARATUS
- Publication number 20120293845
- Publication date Nov 22, 2012
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR POSIT...
- Publication number 20120127451
- Publication date May 24, 2012
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method Of Aligning A Wafer Stage And Apparatus For Performing The Same
- Publication number 20120092638
- Publication date Apr 19, 2012
- Samsung Electronics Co., Ltd.
- Tae-Jin Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASKLESS EXPOSURE APPARATUS AND METHOD TO DETERMINE EXPOSURE START...
- Publication number 20120081682
- Publication date Apr 5, 2012
- Samsung Electronics Co., Ltd.
- Sung Min Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MEASURING MARK POSITION AND MEASURING APPARATUS
- Publication number 20120050710
- Publication date Mar 1, 2012
- Canon Kabushiki Kaisha
- Satoru OISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Determining an Overlay Error
- Publication number 20120013881
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20120008122
- Publication date Jan 12, 2012
- Canon Kabushiki Kaisha
- Toshiki IWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANAGING EUV EXPOSURE MASK AND EXPOSURE METHOD
- Publication number 20110285975
- Publication date Nov 24, 2011
- Kazuo TAWARAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20110273686
- Publication date Nov 10, 2011
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration of Lithographic Apparatus
- Publication number 20110205515
- Publication date Aug 25, 2011
- ASML NETHERLANDS B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100134775
- Publication date Jun 3, 2010
- Canon Kabushiki Kaisha
- Hajime Takeuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT STRUCTURE, LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20090290137
- Publication date Nov 26, 2009
- ASML NETHERLANDS B.V.
- Marcus Martinus Petrus Adrianus VERMEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20090284720
- Publication date Nov 19, 2009
- ASML NETHERLANDS B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Digital Microform Imaging Apparatus
- Publication number 20080284847
- Publication date Nov 20, 2008
- E-IMAGE Data Corporation
- Todd A. Kahle
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080218718
- Publication date Sep 11, 2008
- ASML NETHERLANDS B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for performing a focus test and a device manufacturing method
- Publication number 20080088812
- Publication date Apr 17, 2008
- ASML NETHERLANDS B.V.
- Krister Magnusson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20080068603
- Publication date Mar 20, 2008
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of reducing a wave front aberration, and computer program pr...
- Publication number 20070296938
- Publication date Dec 27, 2007
- ASML NETHERLANDS B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Displacement measurement system, lithographic apparatus, displaceme...
- Publication number 20070263197
- Publication date Nov 15, 2007
- ASML Nethlerlands B.V.
- Bernardus Antonius Johannes Luttikhuis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multi-function image device
- Publication number 20070077059
- Publication date Apr 5, 2007
- Fuji Xerox co., LTD.
- Laurent Denoue
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Imaging apparatus with media supply system employing vibration for...
- Publication number 20070029718
- Publication date Feb 8, 2007
- Eastman Kodak Company
- Troy A. Giese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for automatic film recognition
- Publication number 20050063584
- Publication date Mar 24, 2005
- Xian-Qiang Guo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050007572
- Publication date Jan 13, 2005
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Automatic registration or positioning of originals with respect to each other or the photosensitive layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automatic microform carrier systems and methods

Exposure method

Positioning system, a lithographic apparatus and a method for posit...

Positioning system, a lithographic apparatus and a method for posit...

Digital microform imaging apparatus

Digital microform imaging apparatus

Exposure apparatus and device fabrication method

Calibration of lithographic apparatus by exposing patterns on subst...

Support structure, lithographic apparatus and method

Method of aligning a wafer stage and apparatus for performing the same

Exposure apparatus, exposure method, and method of manufacturing de...

Method of measuring mark position and measuring apparatus

Method and apparatus for determining an overlay error

Exposure apparatus and device fabrication method

Lithographic apparatus and device manufacturing method

Exposure apparatus, exposure method, and method of manufacturing de...

Digital microform imaging apparatus

Lithographic apparatus and device manufacturing method

Digital microform imaging apparatus

Method and system for exposing a photoresist in a magnetic device

Method for performing a focus test and a device manufacturing method

Method of reducing a wave front aberration, and computer program pr...

Lithographic apparatus and device manufacturing method

Imaging apparatus with media supply system employing vibration for...

Method and apparatus for automatic film recognition

Displacement measurement system, lithographic apparatus, displaceme...

Lithographic apparatus and device manufacturing method

Automatic trimming/printing apparatus

Plate exposing apparatus and method

Photographic processor

Patents Applicationslast 30 patents

AUTOMATIC MICROFORM CARRIER SYSTEMS AND METHODS

EXPOSURE METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

DIGITAL MICROFORM IMAGING APPARATUS

Lithographic Apparatus and Device Manufacturing Method

CORN WITH INCREASED YIELD AND NITROGEN UTILIZATION EFFICIENCY

DIGITAL MICROFORM IMAGING APPARATUS

POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR POSIT...

Method Of Aligning A Wafer Stage And Apparatus For Performing The Same

MASKLESS EXPOSURE APPARATUS AND METHOD TO DETERMINE EXPOSURE START...

METHOD OF MEASURING MARK POSITION AND MEASURING APPARATUS

Method and Apparatus for Determining an Overlay Error

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

METHOD OF MANAGING EUV EXPOSURE MASK AND EXPOSURE METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

Calibration of Lithographic Apparatus

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT STRUCTURE, LITHOGRAPHIC APPARATUS AND METHOD

Lithographic Apparatus and Device Manufacturing Method

Digital Microform Imaging Apparatus

Lithographic apparatus and device manufacturing method

Method for performing a focus test and a device manufacturing method

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

Method of reducing a wave front aberration, and computer program pr...

Displacement measurement system, lithographic apparatus, displaceme...

Multi-function image device

Imaging apparatus with media supply system employing vibration for...

Method and apparatus for automatic film recognition

Lithographic apparatus and device manufacturing method