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Beam detects x, y deviation on surface, compensates beam of position scanner
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CPC
G05B2219/50028
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G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/50028
Beam detects x, y deviation on surface, compensates beam of position scanner
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