being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

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G01P2015/0862

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0862being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

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Patents Grantslast 30 patents

Information Patent Grant
MEMS inclinometer having a reduced vibration rectification error
- Patent number 11,993,509
- Issue date May 28, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for temperature compensation of a microelectromechanical sen...
- Patent number 11,874,291
- Issue date Jan 16, 2024
- Robert Bosch GmbH
- Amin Jemili
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical structure and micromechanical sensor
- Patent number 11,858,805
- Issue date Jan 2, 2024
- Robert Bosch GmbH
- Stefan Kiesel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and micromechanical sensor
- Patent number 11,860,184
- Issue date Jan 2, 2024
- Robert Bosch GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS design with shear force rejection for reduced offset
- Patent number 11,761,977
- Issue date Sep 19, 2023
- Invensense, Inc.
- Varun Subramaniam Kumar
- G01 - MEASURING TESTING
Information Patent Grant
3-axis accelerometer
- Patent number 11,733,263
- Issue date Aug 22, 2023
- Analog Devices, Inc.
- Jianglong Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Resonant accelerometer
- Patent number 11,579,166
- Issue date Feb 14, 2023
- Meta Platforms Technologies, LLC
- Doruk Senkal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple anchor high frequency accelerometer
- Patent number 11,415,595
- Issue date Aug 16, 2022
- Analog Devices, Inc.
- Gaurav Vohra
- G01 - MEASURING TESTING
Information Patent Grant
Low-noise multi axis MEMS accelerometer
- Patent number 11,377,346
- Issue date Jul 5, 2022
- Murata Manufacturing Co., Ltd.
- Hannu Vesterinen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically softened accelerometer spring
- Patent number 11,333,679
- Issue date May 17, 2022
- Facebook Technologies, LLC
- Doruk Senkal
- G01 - MEASURING TESTING
Information Patent Grant
Resonant accelerometer
- Patent number 11,307,217
- Issue date Apr 19, 2022
- Facebook Technologies, LLC
- Doruk Senkal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor
- Patent number 10,989,731
- Issue date Apr 27, 2021
- HITACHI AUTOMOTIVE SYSTEMS, LTD.
- Masatoshi Kanamaru
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor, geophone, and seismic prospecting system
- Patent number 10,989,733
- Issue date Apr 27, 2021
- Hitachi, Ltd.
- Yuudai Kamada
- G01 - MEASURING TESTING
Information Patent Grant
Excitation circuit, system including excitation circuit and capacit...
- Patent number 10,983,141
- Issue date Apr 20, 2021
- NXP USA, INC.
- Thierry Dominique Yves Cassagnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical z-inertial sensor
- Patent number 10,913,652
- Issue date Feb 9, 2021
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric rotational MEMS resonator
- Patent number 10,910,549
- Issue date Feb 2, 2021
- Murata Manufacturing Co., Ltd.
- Heikki Kuisma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectromechanical component
- Patent number 10,794,928
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration event detection and differential sensory devices and m...
- Patent number 10,775,403
- Issue date Sep 15, 2020
- Omnitek Partners LLC
- Jahangir S Rastegar
- F42 - AMMUNITION BLASTING
Information Patent Grant
Microelectromechanical systems (MEMS) inertial sensors with energy...
- Patent number 10,761,108
- Issue date Sep 1, 2020
- Analog Devices, Inc.
- Xin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Asymmetric out-of-plane accelerometer
- Patent number 10,732,196
- Issue date Aug 4, 2020
- Invensense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-stage MEMS accelerometer for mixed g-level operation
- Patent number 10,732,199
- Issue date Aug 4, 2020
- Apple Inc.
- Christopher C. Painter
- G01 - MEASURING TESTING
Information Patent Grant
Flexure with enhanced torsional stiffness and MEMS device incorpora...
- Patent number 10,712,359
- Issue date Jul 14, 2020
- NXP USA, INC.
- Andrew C. McNeil
- G01 - MEASURING TESTING
Information Patent Grant
Connection assembly
- Patent number 10,649,000
- Issue date May 12, 2020
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Takahiro Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inertia sensor and method of manufacturing the same
- Patent number 10,502,758
- Issue date Dec 10, 2019
- Hitachi, Ltd.
- Takashi Shiota
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-frequency excitation
- Patent number 10,358,341
- Issue date Jul 23, 2019
- King Abdullah University of Science and Technology
- Mohammad Younis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor having spring force compensation
- Patent number 10,168,351
- Issue date Jan 1, 2019
- Northrop Grumman Litef GmbH
- Stefan Koenig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force feedback electrodes in MEMS accelerometer
- Patent number 9,945,968
- Issue date Apr 17, 2018
- PGS Geophysical AS
- Ilker Ender Ocak
- G01 - MEASURING TESTING
Information Patent Grant
Wafer level micro-electro-mechanical systems package with accelerom...
- Patent number 9,726,689
- Issue date Aug 8, 2017
- Hanking Electronics Ltd.
- Hemant Desai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS force sensors fabricated using paper substrates
- Patent number 9,682,856
- Issue date Jun 20, 2017
- President and Fellows of Harvard College
- George Whitesides
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method including an intertial mass element
- Patent number 9,679,857
- Issue date Jun 13, 2017
- NXP B.V.
- Matthias Merz
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Compliant Stops for MEMS Inertial Device Drive PLL Stability
- Publication number 20250020464
- Publication date Jan 16, 2025
- NXP USA, Inc.
- Mostafa Soliman
- G01 - MEASURING TESTING
Information Patent Application
MICROELECTROMECHANICAL SENSOR ASSEMBLY AND PROCESS FOR MANUFACTURIN...
- Publication number 20240426652
- Publication date Dec 26, 2024
- STMicroelectronics International N.V.
- Gianluca LONGONI
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
CAPACITIVE MEMS DEVICE
- Publication number 20240295582
- Publication date Sep 5, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS
- Publication number 20230305036
- Publication date Sep 28, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G01 - MEASURING TESTING
Information Patent Application
Ultra-Low Power Readout Circuit With High-Voltage Bias Generation F...
- Publication number 20230146711
- Publication date May 11, 2023
- The Regents of the University of Michigan
- Yimai PENG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SENSOR APPARATUS
- Publication number 20230048524
- Publication date Feb 16, 2023
- SONY GROUP CORPORATION
- TORU AMANO
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR TEMPERATURE COMPENSATION OF A MICROELECTROMECHANICAL SEN...
- Publication number 20220357356
- Publication date Nov 10, 2022
- Robert Bosch GmgH
- Amin Jemili
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL STRUCTURE AND MICROMECHANICAL SENSOR
- Publication number 20220073341
- Publication date Mar 10, 2022
- ROBERT BOSCH GmbH
- Stefan Kiesel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS INCLINOMETER HAVING A REDUCED VIBRATION RECTIFICATION ERROR
- Publication number 20210261403
- Publication date Aug 26, 2021
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-NOISE MULTI AXIS MEMS ACCELEROMETER
- Publication number 20210070609
- Publication date Mar 11, 2021
- Murata Manufacturing Co., Ltd.
- Hannu VESTERINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELEROMETER
- Publication number 20200158751
- Publication date May 21, 2020
- Atlantic Inertial Systems Limited
- Alan Malvern
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3-AXIS ACCELEROMETER
- Publication number 20200096538
- Publication date Mar 26, 2020
- Analog Devices, Inc.
- Jianglong Zhang
- G01 - MEASURING TESTING
Information Patent Application
FLEXURE WITH ENHANCED TORSIONAL STIFFNESS AND MEMS DEVICE INCORPORA...
- Publication number 20190339301
- Publication date Nov 7, 2019
- NXP USA, Inc.
- Andrew C. McNeil
- G01 - MEASURING TESTING
Information Patent Application
Multi-Stage MEMS Accelerometer for Mixed G-Level Operation
- Publication number 20190187170
- Publication date Jun 20, 2019
- Apple Inc.
- Christopher C. Painter
- G01 - MEASURING TESTING
Information Patent Application
ASYMMETRIC OUT-OF-PLANE ACCELEROMETER
- Publication number 20190162747
- Publication date May 30, 2019
- InvenSense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) INERTIAL SENSORS WITH ENERGY...
- Publication number 20190154725
- Publication date May 23, 2019
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL Z-INERTIAL SENSOR
- Publication number 20190135613
- Publication date May 9, 2019
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EXCITATION CIRCUIT, SYSTEM INCLUDING EXCITATION CIRCUIT AND CAPACIT...
- Publication number 20180335444
- Publication date Nov 22, 2018
- NXP USA, Inc.
- Thierry Dominique Yves Cassagnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT
- Publication number 20180334381
- Publication date Nov 22, 2018
- ROBERT BOSCH GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR, GEOPHONE, AND SEISMIC PROSPECTING SYSTEM
- Publication number 20180321274
- Publication date Nov 8, 2018
- Hitachi, Ltd
- Yuudai KAMADA
- G01 - MEASURING TESTING
Information Patent Application
MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE
- Publication number 20180299269
- Publication date Oct 18, 2018
- Lumedyne Technologies Incorporated
- Ozan Anac
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL QUANTITY SENSOR
- Publication number 20180275159
- Publication date Sep 27, 2018
- Hitachi Automotive Systems, Ltd.
- Masatoshi KANAMARU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONNECTION ASSEMBLY
- Publication number 20180267079
- Publication date Sep 20, 2018
- Panasonic Intellectual Property Management Co., Ltd.
- TAKAHIRO SHINOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Acceleration Event Detection and Differential Sensory Devices and M...
- Publication number 20180252743
- Publication date Sep 6, 2018
- OMNITEK PARTNERS LLC
- Jahangir S Rastegar
- G01 - MEASURING TESTING
Information Patent Application
INERTIA SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180238926
- Publication date Aug 23, 2018
- Hitachi, Ltd
- Takashi SHIOTA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-FREQUENCY EXCITATION
- Publication number 20170291811
- Publication date Oct 12, 2017
- King Abdullah University of Science and Technology
- Mohammad YOUNIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORCE FEEDBACK ELECTRODES IN MEMS ACCELEROMETER
- Publication number 20160202366
- Publication date Jul 14, 2016
- PGS GEOPHYSICAL AS
- Ilker Ender Ocak
- G01 - MEASURING TESTING
Information Patent Application
MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE
- Publication number 20160131679
- Publication date May 12, 2016
- RICHTEK TECHNOLOGY CORPORATION
- Yu-Wen Hsu
- G01 - MEASURING TESTING
Information Patent Application
MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE
- Publication number 20150293141
- Publication date Oct 15, 2015
- RICHTEK TECHNOLOGY CORPORATION
- Chia-Yu Wu
- G01 - MEASURING TESTING
Information Patent Application
MEMS ACCELEROMETER WITH PROOF MASSES MOVING IN AN ANTI-PHASE DIRECTION
- Publication number 20150192603
- Publication date Jul 9, 2015
- InvenSense, Inc.
- Leonardo BALDASARRE
- G01 - MEASURING TESTING

being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS inclinometer having a reduced vibration rectification error

Method for temperature compensation of a microelectromechanical sen...

Micromechanical structure and micromechanical sensor

Micromechanical structure and micromechanical sensor

MEMS design with shear force rejection for reduced offset

3-axis accelerometer

Resonant accelerometer

Multiple anchor high frequency accelerometer

Low-noise multi axis MEMS accelerometer

Electrostatically softened accelerometer spring

Resonant accelerometer

Physical quantity sensor

Acceleration sensor, geophone, and seismic prospecting system

Excitation circuit, system including excitation circuit and capacit...

Micromechanical z-inertial sensor

Piezoelectric rotational MEMS resonator

Microelectromechanical component

Acceleration event detection and differential sensory devices and m...

Microelectromechanical systems (MEMS) inertial sensors with energy...

Asymmetric out-of-plane accelerometer

Multi-stage MEMS accelerometer for mixed g-level operation

Flexure with enhanced torsional stiffness and MEMS device incorpora...

Connection assembly

Inertia sensor and method of manufacturing the same

Multi-frequency excitation

Acceleration sensor having spring force compensation

Force feedback electrodes in MEMS accelerometer

Wafer level micro-electro-mechanical systems package with accelerom...

MEMS force sensors fabricated using paper substrates

Semiconductor device and method including an intertial mass element

Patents Applicationslast 30 patents

Compliant Stops for MEMS Inertial Device Drive PLL Stability

MICROELECTROMECHANICAL SENSOR ASSEMBLY AND PROCESS FOR MANUFACTURIN...

CAPACITIVE MEMS DEVICE

ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

Ultra-Low Power Readout Circuit With High-Voltage Bias Generation F...

SENSOR APPARATUS

METHOD FOR TEMPERATURE COMPENSATION OF A MICROELECTROMECHANICAL SEN...

MICROMECHANICAL STRUCTURE AND MICROMECHANICAL SENSOR

MEMS INCLINOMETER HAVING A REDUCED VIBRATION RECTIFICATION ERROR

LOW-NOISE MULTI AXIS MEMS ACCELEROMETER

ACCELEROMETER

3-AXIS ACCELEROMETER

FLEXURE WITH ENHANCED TORSIONAL STIFFNESS AND MEMS DEVICE INCORPORA...

Multi-Stage MEMS Accelerometer for Mixed G-Level Operation

ASYMMETRIC OUT-OF-PLANE ACCELEROMETER

MICROELECTROMECHANICAL SYSTEMS (MEMS) INERTIAL SENSORS WITH ENERGY...

MICROMECHANICAL Z-INERTIAL SENSOR

EXCITATION CIRCUIT, SYSTEM INCLUDING EXCITATION CIRCUIT AND CAPACIT...

MICROELECTROMECHANICAL COMPONENT

ACCELERATION SENSOR, GEOPHONE, AND SEISMIC PROSPECTING SYSTEM

MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE

PHYSICAL QUANTITY SENSOR

CONNECTION ASSEMBLY

Acceleration Event Detection and Differential Sensory Devices and M...

INERTIA SENSOR AND METHOD OF MANUFACTURING THE SAME

MULTI-FREQUENCY EXCITATION

FORCE FEEDBACK ELECTRODES IN MEMS ACCELEROMETER

MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE

MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE

MEMS ACCELEROMETER WITH PROOF MASSES MOVING IN AN ANTI-PHASE DIRECTION