Bending of driven table, lag between real and commanded position

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G05B2219/49189

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/49189Bending of driven table, lag between real and commanded position

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Patents Grantslast 30 patents

Information Patent Grant
Translation/rotation error compensation amount creating device
- Patent number 9,448,551
- Issue date Sep 20, 2016
- FANUC CORPORATION
- Toshiaki Otsuki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cutting plotter
- Patent number 8,757,941
- Issue date Jun 24, 2014
- Mimaki Engineering Co., Ltd.
- Masafumi Okabe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,710,540
- Issue date May 4, 2010
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of correcting positional displacement of machining point
- Patent number 5,892,680
- Issue date Apr 6, 1999
- Fanuc, Ltd.
- Yuki Kita
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
TRANSLATION/ROTATION ERROR COMPENSATION AMOUNT CREATING DEVICE
- Publication number 20140094970
- Publication date Apr 3, 2014
- FANUC CORPORATION
- Toshiaki OTSUKI
- G05 - CONTROLLING REGULATING
Information Patent Application
CUTTING PLOTTER
- Publication number 20120103154
- Publication date May 3, 2012
- Mimaki Engineering Co., Ltd.
- Masafumi OKABE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080246936
- Publication date Oct 9, 2008
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G05 - CONTROLLING REGULATING