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Applied Materials, Inc.
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Mats Larsson
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Adjustable confinement ring assembly
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Issue date Jul 23, 2013
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Lam Research Corporation
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Peter Cirigliano
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Issue date Jul 23, 2013
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Hitachi High-Technologies Corporation
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Hiroyuki Kobayashi
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Lam Research Corporation
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Peter Cirigliano
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