by diffraction gratings

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CPC
G01D5/38

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GPHYSICS G01Measuring instruments G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS TARIFF METERING APPARATUS MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR G01D5/00Mechanical means for transferring the output of a sensing member Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting Transducers not specially adapted for a specific variable

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G01D5/38by diffraction gratings

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Patents Grantslast 30 patents

Information Patent Grant
Displacement measuring apparatus, displacement measuring method and...
- Patent number 12,163,814
- Issue date Dec 10, 2024
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ping Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement device and measurement method, exposure apparatus and e...
- Patent number 12,164,236
- Issue date Dec 10, 2024
- Nikon Corporation
- Akihiro Ueda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical encoder and control apparatus for receiving light that form...
- Patent number 12,163,813
- Issue date Dec 10, 2024
- Canon Kabushiki Kaisha
- Takanori Uemura
- G01 - MEASURING TESTING
Information Patent Grant
Scale and method of manufacturing the same
- Patent number 12,044,558
- Issue date Jul 23, 2024
- Mitutoyo Corporation
- Toshihiko Aoki
- G02 - OPTICS
Information Patent Grant
Self-correcting assemblable optical fiber sensing system for displa...
- Patent number 12,038,311
- Issue date Jul 16, 2024
- Shandong University
- Zhengfang Wang
- G01 - MEASURING TESTING
Information Patent Grant
Position encoder
- Patent number 11,982,549
- Issue date May 14, 2024
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Eric Grenet
- G01 - MEASURING TESTING
Information Patent Grant
Smooth surface diffraction grating lens and method for manufacturin...
- Patent number 11,953,707
- Issue date Apr 9, 2024
- Purdue Research Foundation
- Laura Daniela Vallejo-Melgarejo
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Optical position measuring device
- Patent number 11,644,348
- Issue date May 9, 2023
- DR. JOHANNES HEIDENHAIN GMBH
- Thomas Kaelberer
- G01 - MEASURING TESTING
Information Patent Grant
Displacement detection device
- Patent number 11,512,942
- Issue date Nov 29, 2022
- DMG MORI CO., LTD.
- Akinori Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical displacement sensing system
- Patent number 11,480,426
- Issue date Oct 25, 2022
- National Chiao Tung University
- Cheng-Sheng Huang
- G01 - MEASURING TESTING
Information Patent Grant
Two-dimensional position encoder
- Patent number 11,467,506
- Issue date Oct 11, 2022
- NIKON CORPORATION
- Zhiqiang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Optical rotary encoder
- Patent number 11,448,529
- Issue date Sep 20, 2022
- National Chung-Hsing University
- Hsi-Fu Shih
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus, flat panel display manufacturing method, and de...
- Patent number 11,392,048
- Issue date Jul 19, 2022
- Nikon Corporation
- Akinori Shirato
- G01 - MEASURING TESTING
Information Patent Grant
Optical position-measurement device with varying focal length along...
- Patent number 11,353,583
- Issue date Jun 7, 2022
- Dr. Johannes Heidenhain GmbH
- Karsten Sändig
- G01 - MEASURING TESTING
Information Patent Grant
Optical position-measuring device
- Patent number 11,313,672
- Issue date Apr 26, 2022
- Dr. Johannes Heidenhain GmbH
- Thomas Kaelberer
- G02 - OPTICS
Information Patent Grant
Scale and manufacturing method of the same
- Patent number 11,307,058
- Issue date Apr 19, 2022
- Mitutoyo Corporation
- Toshihiko Aoki
- G02 - OPTICS
Information Patent Grant
Optical encoder system and method
- Patent number 11,156,481
- Issue date Oct 26, 2021
- Michael Naor
- G01 - MEASURING TESTING
Information Patent Grant
Cantilever linear motion reference device employing two-layer air s...
- Patent number 11,143,529
- Issue date Oct 12, 2021
- Harbin Institute of Technology
- JianWei Wu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Detection device
- Patent number 11,079,215
- Issue date Aug 3, 2021
- DMG MORI CO., LTD.
- Masayuki Niiya
- G01 - MEASURING TESTING
Information Patent Grant
Optical displacement sensing system
- Patent number 11,015,918
- Issue date May 25, 2021
- National Chiao Tung University
- Cheng-Sheng Huang
- G01 - MEASURING TESTING
Information Patent Grant
Two-dimensional position encoder
- Patent number 10,921,718
- Issue date Feb 16, 2021
- NIKON CORPORATION
- Zhiqiang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system and grating pattern array
- Patent number 10,921,721
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Jinxin Fu
- G01 - MEASURING TESTING
Information Patent Grant
Indexed optical encoder
- Patent number 10,914,612
- Issue date Feb 9, 2021
- Faro Technologies, Inc.
- William E. Schoenfeldt
- G01 - MEASURING TESTING
Information Patent Grant
Scanning reticle including a grating formed in a substrate for an o...
- Patent number 10,914,615
- Issue date Feb 9, 2021
- Dr. Johannes Heidenhain GmbH
- Stefan Funk
- G01 - MEASURING TESTING
Information Patent Grant
Optical angle sensor
- Patent number 10,859,374
- Issue date Dec 8, 2020
- Mitutoyo Corporation
- Akihide Kimura
- G01 - MEASURING TESTING
Information Patent Grant
Optical encoder
- Patent number 10,831,035
- Issue date Nov 10, 2020
- Mitutoyo Corporation
- Akihide Kimura
- G01 - MEASURING TESTING
Information Patent Grant
Measurement encoder
- Patent number 10,823,587
- Issue date Nov 3, 2020
- Renishaw plc
- Simon Eliot McAdam
- G01 - MEASURING TESTING
Information Patent Grant
Optical element
- Patent number 10,768,026
- Issue date Sep 8, 2020
- Renishaw plc
- Jason Kempton Slack
- G01 - MEASURING TESTING
Information Patent Grant
Optical encoder system and method
- Patent number 10,768,022
- Issue date Sep 8, 2020
- Michael Naor
- G11 - INFORMATION STORAGE
Information Patent Grant
Encoder, position measurement system and lithographic apparatus inv...
- Patent number 10,768,025
- Issue date Sep 8, 2020
- ASML Netherlands B.V.
- Wouter Onno Pril
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SELF-CORRECTING ASSEMBLABLE OPTICAL FIBER SENSING SYSTEM FOR DISPLA...
- Publication number 20240240974
- Publication date Jul 18, 2024
- SHANDONG UNIVERSITY
- Zhengfang WANG
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ENCODER
- Publication number 20240175729
- Publication date May 30, 2024
- Mitutoyo Corporation
- Akihide Kimura
- G01 - MEASURING TESTING
Information Patent Application
Performance Monitoring System For Disc Cutter Of Tunnel Boring Machine
- Publication number 20240159147
- Publication date May 16, 2024
- NK Photonics Ltd.
- Nan-Kuang CHEN
- E21 - EARTH DRILLING MINING
Information Patent Application
MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND E...
- Publication number 20220317581
- Publication date Oct 6, 2022
- Nikon Corporation
- Akihiro UEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DISPLACEMENT MEASURING APPARATUS, DISPLACEMENT MEASURING METHOD AND...
- Publication number 20220214193
- Publication date Jul 7, 2022
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ping WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCALE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210381859
- Publication date Dec 9, 2021
- Mitutoyo Corporation
- Toshihiko AOKI
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL POSITION MEASURING DEVICE
- Publication number 20210255008
- Publication date Aug 19, 2021
- Dr. Johannes Heidenhain Gmbh
- Thomas Kaelberer
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL DISPLACEMENT SENSING SYSTEM
- Publication number 20210247177
- Publication date Aug 12, 2021
- NATIONAL CHIAO-TUNG UNIVERSITY
- Cheng-Sheng HUANG
- G01 - MEASURING TESTING
Information Patent Application
Cantilever Linear Motion Reference Device Employing Two-Layer Air S...
- Publication number 20210247216
- Publication date Aug 12, 2021
- HARBIN INSTITUTE OF TECHNOLOGY
- JianWei WU
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SMOOTH SURFACE DIFFRACTION GRATING LENS AND METHOD FOR MANUFACTURIN...
- Publication number 20210215861
- Publication date Jul 15, 2021
- Purdue Research Foundation
- Laura Daniela Vallejo-Melgarejo
- G01 - MEASURING TESTING
Information Patent Application
TWO-DIMENSIONAL POSITION ENCODER
- Publication number 20210181643
- Publication date Jun 17, 2021
- Nikon Corporation
- Zhiqiang Liu
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ROTARY ENCODER
- Publication number 20210172766
- Publication date Jun 10, 2021
- National Chung Hsing University
- Hsi-Fu SHIH
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL POSITION-MEASUREMENT DEVICE
- Publication number 20210173080
- Publication date Jun 10, 2021
- Dr. Johannes Heidenhain Gmbh
- Karsten SÄNDIG
- G01 - MEASURING TESTING
Information Patent Application
POSITION ENCODER
- Publication number 20210148733
- Publication date May 20, 2021
- CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA RECHERCHE ET DEVELO...
- Eric Grenet
- G01 - MEASURING TESTING
Information Patent Application
OBJECT DETECTION DEVICE AND PHOTODETECTOR
- Publication number 20210048566
- Publication date Feb 18, 2021
- Panasonic Intellectual Property Management Co., Ltd.
- Yasuyuki Kano
- G01 - MEASURING TESTING
Information Patent Application
GRATING DISC AND FEEDBACK SYSTEM
- Publication number 20200378804
- Publication date Dec 3, 2020
- HAN'S LASER TECHNOLOGY INDUSTRY GROUP CO., LTD.
- BING DING
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ENCODER SYSTEM AND METHOD
- Publication number 20200363240
- Publication date Nov 19, 2020
- Michael NAOR
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND E...
- Publication number 20200225592
- Publication date Jul 16, 2020
- Nikon Corporation
- Akihiro UEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, FLAT PANEL DISPLAY MANUFACTURING METHOD, AND DE...
- Publication number 20200192232
- Publication date Jun 18, 2020
- Nikon Corporation
- Akinori SHIRATO
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus For Configurable Photodetector Array Patternin...
- Publication number 20200173816
- Publication date Jun 4, 2020
- TT Electronics Plc
- James Cusey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DISPLACEMENT SENSING SYSTEM
- Publication number 20200116472
- Publication date Apr 16, 2020
- NATIONAL CHIAO-TUNG UNIVERSITY
- Cheng-Sheng HUANG
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ANGLE SENSOR
- Publication number 20200011661
- Publication date Jan 9, 2020
- Mitutoyo Corporation
- Akihide Kimura
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND E...
- Publication number 20190285995
- Publication date Sep 19, 2019
- Nikon Corporation
- Akihiro UEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTAMINATION AND DEFECT RESISTANT ROTARY OPTICAL ENCODER CONFIGURA...
- Publication number 20190265077
- Publication date Aug 29, 2019
- MITUTOYO CORPORATION
- Joseph Daniel Tobiason
- G01 - MEASURING TESTING
Information Patent Application
SCALE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20190204119
- Publication date Jul 4, 2019
- Mitutoyo Corporation
- Toshihiko Aoki
- G01 - MEASURING TESTING
Information Patent Application
SCALE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20190186957
- Publication date Jun 20, 2019
- Mitutoyo Corporation
- Toshihiko Aoki
- G02 - OPTICS
Information Patent Application
DISPLACEMENT SENSOR DEVICE AND SYSTEM
- Publication number 20190154726
- Publication date May 23, 2019
- PGS GEOPHYSICAL AS
- Ib-Rune Johansen
- G02 - OPTICS
Information Patent Application
OPTICAL ROTATION ANGLE MEASURING SYSTEM
- Publication number 20190145799
- Publication date May 16, 2019
- Arges GmbH
- Markus Guggenmos
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND ENCODER DEVICE, AND EXPOSURE METHOD AND DEVICE
- Publication number 20190063959
- Publication date Feb 28, 2019
- Nikon Corporation
- Zhigiang Liu
- G02 - OPTICS
Information Patent Application
MEASURING APPARATUS AND METHOD, PROCESSING APPARATUS AND METHOD, PA...
- Publication number 20190041244
- Publication date Feb 7, 2019
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING

by diffraction gratings

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Displacement measuring apparatus, displacement measuring method and...

Measurement device and measurement method, exposure apparatus and e...

Optical encoder and control apparatus for receiving light that form...

Scale and method of manufacturing the same

Self-correcting assemblable optical fiber sensing system for displa...

Position encoder

Smooth surface diffraction grating lens and method for manufacturin...

Optical position measuring device

Displacement detection device

Optical displacement sensing system

Two-dimensional position encoder

Optical rotary encoder

Exposure apparatus, flat panel display manufacturing method, and de...

Optical position-measurement device with varying focal length along...

Optical position-measuring device

Scale and manufacturing method of the same

Optical encoder system and method

Cantilever linear motion reference device employing two-layer air s...

Detection device

Optical displacement sensing system

Two-dimensional position encoder

Measurement system and grating pattern array

Indexed optical encoder

Scanning reticle including a grating formed in a substrate for an o...

Optical angle sensor

Optical encoder

Measurement encoder

Optical element

Optical encoder system and method

Encoder, position measurement system and lithographic apparatus inv...

Patents Applicationslast 30 patents

SELF-CORRECTING ASSEMBLABLE OPTICAL FIBER SENSING SYSTEM FOR DISPLA...

OPTICAL ENCODER

Performance Monitoring System For Disc Cutter Of Tunnel Boring Machine

MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND E...

DISPLACEMENT MEASURING APPARATUS, DISPLACEMENT MEASURING METHOD AND...

SCALE AND METHOD OF MANUFACTURING THE SAME

OPTICAL POSITION MEASURING DEVICE

OPTICAL DISPLACEMENT SENSING SYSTEM

Cantilever Linear Motion Reference Device Employing Two-Layer Air S...

SMOOTH SURFACE DIFFRACTION GRATING LENS AND METHOD FOR MANUFACTURIN...

TWO-DIMENSIONAL POSITION ENCODER

OPTICAL ROTARY ENCODER

OPTICAL POSITION-MEASUREMENT DEVICE

POSITION ENCODER

OBJECT DETECTION DEVICE AND PHOTODETECTOR

GRATING DISC AND FEEDBACK SYSTEM

OPTICAL ENCODER SYSTEM AND METHOD

MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND E...

EXPOSURE APPARATUS, FLAT PANEL DISPLAY MANUFACTURING METHOD, AND DE...

Method and Apparatus For Configurable Photodetector Array Patternin...

OPTICAL DISPLACEMENT SENSING SYSTEM

OPTICAL ANGLE SENSOR

MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND E...

CONTAMINATION AND DEFECT RESISTANT ROTARY OPTICAL ENCODER CONFIGURA...

SCALE AND MANUFACTURING METHOD OF THE SAME

SCALE AND MANUFACTURING METHOD OF THE SAME

DISPLACEMENT SENSOR DEVICE AND SYSTEM

OPTICAL ROTATION ANGLE MEASURING SYSTEM

MEASUREMENT METHOD AND ENCODER DEVICE, AND EXPOSURE METHOD AND DEVICE

MEASURING APPARATUS AND METHOD, PROCESSING APPARATUS AND METHOD, PA...