by evaporation

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CPC
C23F4/02

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 C23F4/00Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00

Current Industry

C23F4/02by evaporation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,068,170
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,033,866
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching of alkali metal compounds
- Patent number 11,926,903
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Nitin Deepak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective removal of ruthenium-containing materials
- Patent number 11,798,813
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Baiwei Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,428
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,427
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 11,621,172
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal contamination prevention method and apparatus, and substrate...
- Patent number 11,486,043
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method and β-diketone-filled container
- Patent number 11,335,573
- Issue date May 17, 2022
- Cental Glass Company, Limited
- Kunihiro Yamauchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,770
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,769
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method, semiconductor device manufacturing method, and...
- Patent number 11,049,729
- Issue date Jun 29, 2021
- Central Glass Company, Limited
- Shoi Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal member, composite of metal member and resin member, and produ...
- Patent number 10,755,998
- Issue date Aug 25, 2020
- Denso Corporation
- Takumi Nomura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,534
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,533
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective aluminide diffusion coating removal
- Patent number 10,590,800
- Issue date Mar 17, 2020
- General Electric Company
- Liming Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam-induced etching
- Patent number 10,304,658
- Issue date May 28, 2019
- FEI Company
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,280,519
- Issue date May 7, 2019
- ASM IP Holding B.V.
- Tom E. Blomberg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,273,584
- Issue date Apr 30, 2019
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam device and sample production method
- Patent number 10,233,548
- Issue date Mar 19, 2019
- Hitachi High-Technologies Corporation
- Terutaka Nanri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned thin films by thermally induced mass displacement
- Patent number 10,179,952
- Issue date Jan 15, 2019
- Rutgers, The State University of New Jersey
- Glenn G. Amatucci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam-induced etching
- Patent number 9,909,218
- Issue date Mar 6, 2018
- Ecole Polytechnique Federales de Lausanne
- Tristan Bret
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,449,844
- Issue date Sep 20, 2016
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam-induced etching
- Patent number 9,123,506
- Issue date Sep 1, 2015
- FEI Company
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle sources and methods for manufacturing the same
- Patent number 9,017,562
- Issue date Apr 28, 2015
- 38th Research Institute, China Electronics Technology Group Corporation
- Huarong Liu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Treatment of parts with metallized finish areas with a differentiat...
- Patent number 9,017,775
- Issue date Apr 28, 2015
- Zanini Auto Grup, S.A.
- Augusto Mayer Pujadas
- B44 - DECORATIVE ARTS
Information Patent Grant
Method for enhancing adhesion of thin film
- Patent number 8,728,585
- Issue date May 20, 2014
- Canon Machinery Inc.
- Hiroshi Sawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for perforating printed circuit board
- Patent number 8,278,594
- Issue date Oct 2, 2012
- Hitachi Via Mechanics, Ltd.
- Kunio Arai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam-induced etching
- Patent number 7,670,956
- Issue date Mar 2, 2010
- FEI Company
- Tristan Bret
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for laser perforating printed circuit board
- Patent number 7,531,767
- Issue date May 12, 2009
- Hitachi Via Mechanics, Ltd.
- Kunio Arai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20240026548
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230374671
- Publication date Nov 23, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR FORMING GROOVE ON METAL STRIP SURFACE AND METHOD FOR MAN...
- Publication number 20230366101
- Publication date Nov 16, 2023
- JFE STEEL CORPORATION
- Shigehiro TAKAJO
- C21 - METALLURGY OF IRON
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20230290646
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20230215736
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE REMOVAL OF RUTHENIUM-CONTAINING MATERIALS
- Publication number 20220344172
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Baiwei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119961
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119962
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20220002882
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20200308709
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20200308710
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal Contamination Prevention Method and Apparatus, and Substrate...
- Publication number 20200040463
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry Etching Method, Semiconductor Device Manufacturing Method, and...
- Publication number 20190355590
- Publication date Nov 21, 2019
- Central Glass Company, Limited
- Shoi SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry Etching Method and Beta-Diketone-Filled Container
- Publication number 20190348307
- Publication date Nov 14, 2019
- Central Glass Company, Limited
- Kunihiro YAMAUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20190249312
- Publication date Aug 15, 2019
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20190242019
- Publication date Aug 8, 2019
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20180163312
- Publication date Jun 14, 2018
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE AND METHOD FOR MAKING THE SAME
- Publication number 20150218710
- Publication date Aug 6, 2015
- FU TAI HUA INDUSTRY (SHENZHEN) CO., LTD.
- HUANN-WU CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE AREA DEPOSITION IN HIGH VACUUM WITH HIGH THICKNESS UNIFORMITY
- Publication number 20150114566
- Publication date Apr 30, 2015
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Giacomo Benvenuti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...
- Publication number 20150083581
- Publication date Mar 26, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE SPUTTERING FOR PATTERN TRANSFER
- Publication number 20150014152
- Publication date Jan 15, 2015
- International Business Machines Corporation
- Mark Hoinkis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electron Beam-Induced Etching
- Publication number 20140363978
- Publication date Dec 11, 2014
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCHING METHOD, DRY ETCHING APPARATUS, METAL FILM, AND DEVICE I...
- Publication number 20140352716
- Publication date Dec 4, 2014
- CENTRAL GLASS COMPANY, LIMITED
- Akiou KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE AND METHOD FOR MAKING THE SAME
- Publication number 20130157038
- Publication date Jun 20, 2013
- HON HAI Precision Industry CO., LTD.
- HUANN-WU CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE SOURCES AND METHODS FOR MANUFACTURING THE SAME
- Publication number 20130112138
- Publication date May 9, 2013
- 38th Research Institute, China Electronics Technology Group Corporation
- Huarong LIU
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND SAMPLE PRODUCTION METHOD
- Publication number 20130105302
- Publication date May 2, 2013
- Terutaka Nanri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20130075248
- Publication date Mar 28, 2013
- Hyogo Prefecture
- Kenichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT OF PARTS WITH METALLIZED FINISH AREAS WITH A DIFFERENTIAT...
- Publication number 20120164350
- Publication date Jun 28, 2012
- Augusto Mayer Pujadas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LARGE AREA DEPOSITION IN HIGH VACUUM WITH HIGH THICKNESS UNIFORMITY
- Publication number 20120037077
- Publication date Feb 16, 2012
- Giacomo Benvenuti
- C30 - CRYSTAL GROWTH
Information Patent Application
BEAM-INDUCED ETCHING
- Publication number 20100203431
- Publication date Aug 12, 2010
- Ecole Polytechnique Federales de Lausanne
- Tristan Bret
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by evaporation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vapor phase thermal etch solutions for metal oxo photoresists

Vapor phase thermal etch solutions for metal oxo photoresists

Etching of alkali metal compounds

Selective removal of ruthenium-containing materials

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Vapor phase thermal etch solutions for metal oxo photoresists

Metal contamination prevention method and apparatus, and substrate...

Dry etching method and β-diketone-filled container

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Dry etching method, semiconductor device manufacturing method, and...

Metal member, composite of metal member and resin member, and produ...

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Method for selective aluminide diffusion coating removal

Electron beam-induced etching

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Charged particle beam device and sample production method

Patterned thin films by thermally induced mass displacement

Beam-induced etching

Etching method, etching apparatus, and storage medium

Electron beam-induced etching

Particle sources and methods for manufacturing the same

Treatment of parts with metallized finish areas with a differentiat...

Method for enhancing adhesion of thin film

Method and apparatus for perforating printed circuit board

Beam-induced etching

Method and apparatus for laser perforating printed circuit board

Patents Applicationslast 30 patents

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

METHOD FOR FORMING GROOVE ON METAL STRIP SURFACE AND METHOD FOR MAN...

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

SELECTIVE REMOVAL OF RUTHENIUM-CONTAINING MATERIALS

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

Metal Contamination Prevention Method and Apparatus, and Substrate...

Dry Etching Method, Semiconductor Device Manufacturing Method, and...

Dry Etching Method and Beta-Diketone-Filled Container

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

COMPOSITE AND METHOD FOR MAKING THE SAME

LARGE AREA DEPOSITION IN HIGH VACUUM WITH HIGH THICKNESS UNIFORMITY

TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...

SELECTIVE SPUTTERING FOR PATTERN TRANSFER

Electron Beam-Induced Etching

DRY ETCHING METHOD, DRY ETCHING APPARATUS, METAL FILM, AND DEVICE I...

COMPOSITE AND METHOD FOR MAKING THE SAME

PARTICLE SOURCES AND METHODS FOR MANUFACTURING THE SAME

CHARGED PARTICLE BEAM DEVICE AND SAMPLE PRODUCTION METHOD

ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM

TREATMENT OF PARTS WITH METALLIZED FINISH AREAS WITH A DIFFERENTIAT...

LARGE AREA DEPOSITION IN HIGH VACUUM WITH HIGH THICKNESS UNIFORMITY

BEAM-INDUCED ETCHING