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CPC
C23C18/1813
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C18/00
Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating Contact plating
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C23C18/1813
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Patents Grants
last 30 patents
Information
Patent Grant
Process for low resistance metal cap
Patent number
7,582,557
Issue date
Sep 1, 2009
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Hsueh Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Process for low resistance metal cap
Publication number
20070082473
Publication date
Apr 12, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Hsueh Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...