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H05H1/0068
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Parent Industries
H
ELECTRICITY
H05
Electric techniques
H05H
PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H1/00
Generating plasma Handling plasma
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H05H1/0068
by thermal means
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last 30 patents
Information
Patent Grant
Pneumatic energy fluxmeter
Patent number
5,159,267
Issue date
Oct 27, 1992
Sematech, Inc.
Richard L. Anderson
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR