by using interferometric methods

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G01M11/0271

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GPHYSICS G01Measuring instruments G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR G01M11/00Testing of optical apparatus Testing structures by optical methods not otherwise provided for

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G01M11/0271by using interferometric methods

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Wave front sensor for wave aberration compensation in an optical sy...
- Patent number 12,140,493
- Issue date Nov 12, 2024
- University of Notre Dame Du Lac
- Justin Crepp
- G02 - OPTICS
Information Patent Grant
Surface metrology systems and methods thereof
- Patent number 12,123,701
- Issue date Oct 22, 2024
- Optipro Systems, LLC
- James Fredric Munro
- G01 - MEASURING TESTING
Information Patent Grant
Pre-conditioning interferometer
- Patent number 12,092,456
- Issue date Sep 17, 2024
- Arizona Board of Regents on behalf of the University of Arizona
- Dae Wook Kim
- G01 - MEASURING TESTING
Information Patent Grant
Two-dimensional diffraction grating
- Patent number 12,007,590
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Pieter Cristiaan De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Measuring apparatus for interferometrically determining a surface s...
- Patent number 11,892,283
- Issue date Feb 6, 2024
- Carl Zeiss SMT GmbH
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for measuring interfaces of an optical element
- Patent number 11,808,656
- Issue date Nov 7, 2023
- FOGALE NANOTECH
- Alain Courteville
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for detecting wavefront error by modal-based opti...
- Patent number 11,709,111
- Issue date Jul 25, 2023
- Zhejiang University
- Jian Bai
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining geometrical parameters of a soft contact lens
- Patent number 11,692,906
- Issue date Jul 4, 2023
- Alcon Inc.
- Thomas Tonn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for detecting wavefront aberration of objectiv...
- Patent number 11,668,625
- Issue date Jun 6, 2023
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Peng Li
- G02 - OPTICS
Information Patent Grant
Systems and methods for non-destructive evaluation of optical mater...
- Patent number 11,592,286
- Issue date Feb 28, 2023
- Vanderbilt University
- Yuankai Tao
- G01 - MEASURING TESTING
Information Patent Grant
Measurement apparatus for measuring a wavefront aberration of an im...
- Patent number 11,441,970
- Issue date Sep 13, 2022
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G02 - OPTICS
Information Patent Grant
Method and device for calibrating a diffractive measuring structure
- Patent number 11,391,643
- Issue date Jul 19, 2022
- Carl Zeiss SMT GmbH
- Michael Samaniego
- G01 - MEASURING TESTING
Information Patent Grant
QTIP—quantitative test interferometric plate
- Patent number 11,346,747
- Issue date May 31, 2022
- Harris Corporation
- Cormic Merle
- G01 - MEASURING TESTING
Information Patent Grant
Common path mode fiber tip diffraction interferometer for wavefront...
- Patent number 11,333,487
- Issue date May 17, 2022
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Grant
Detection device for detecting lens surface in stitching interferom...
- Patent number 11,268,808
- Issue date Mar 8, 2022
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Dachun Gan
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for non-destructive evaluation of optical mater...
- Patent number 11,221,211
- Issue date Jan 11, 2022
- Vanderbilt University
- Yuankai Tao
- G01 - MEASURING TESTING
Information Patent Grant
Light intensity fluctuation-insensitive projection objective wave a...
- Patent number 11,215,512
- Issue date Jan 4, 2022
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Feng Tang
- G01 - MEASURING TESTING
Information Patent Grant
Single-shot, adaptive metrology of rotationally variant optical sur...
- Patent number 11,168,979
- Issue date Nov 9, 2021
- University of Rochester
- Romita Chaudhuri
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for characterizing the surface shape of an optica...
- Patent number 11,118,900
- Issue date Sep 14, 2021
- Carl Zeiss SMT GmbH
- Frank Riepenhausen
- G01 - MEASURING TESTING
Information Patent Grant
Test of operational status of a digital scanner during lithographic...
- Patent number 11,099,007
- Issue date Aug 24, 2021
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for measuring lens contour based on laser wave nu...
- Patent number 11,092,511
- Issue date Aug 17, 2021
- GUANGDONG UNIVERSITY OF TECHNOLOGY
- Shengli Xie
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for characterizing the surface shape of an optica...
- Patent number 11,092,431
- Issue date Aug 17, 2021
- Carl Zeiss SMT GmbH
- Frank Riepenhausen
- G01 - MEASURING TESTING
Information Patent Grant
Method for wavefront measurement of optical imaging system based on...
- Patent number 11,009,336
- Issue date May 18, 2021
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Yunjun Lu
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for removing contamination from lithographic...
- Patent number 10,852,649
- Issue date Dec 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zi-Wen Chen
- G01 - MEASURING TESTING
Information Patent Grant
Measurement apparatus for measuring height or shape of a surface of...
- Patent number 10,845,190
- Issue date Nov 24, 2020
- TOSHIBA MEMORY CORPORATION
- Kiminori Yoshino
- G01 - MEASURING TESTING
Information Patent Grant
Contact lens inspection method and system
- Patent number 10,830,666
- Issue date Nov 10, 2020
- Alcon Inc.
- Sarah Unterkofler
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for the determination of the index of refracti...
- Patent number 10,823,636
- Issue date Nov 3, 2020
- Alcon Inc.
- Susanne Fechner
- G01 - MEASURING TESTING
Information Patent Grant
Determination of operability of a digital scanner with shearing int...
- Patent number 10,753,732
- Issue date Aug 25, 2020
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Radius-of-curvature measurement by spectrally-controlled interferom...
- Patent number 10,746,537
- Issue date Aug 18, 2020
- APRE INSTRUMENTS, INC.
- Artur Olszak
- G01 - MEASURING TESTING
Information Patent Grant
Measuring method and measuring system for interferometrically measu...
- Patent number 10,697,852
- Issue date Jun 30, 2020
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR THE GEOMETRIC CHARACTERISATION OF OPTICAL LENSES
- Publication number 20240418600
- Publication date Dec 19, 2024
- FOGALE NANOTECH
- Eric LEGROS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT
- Publication number 20240402039
- Publication date Dec 5, 2024
- FOGALE NANOTECH
- Eric LEGROS
- G01 - MEASURING TESTING
Information Patent Application
SURFACE METROLOGY SYSTEMS AND METHODS THEREOF
- Publication number 20240401938
- Publication date Dec 5, 2024
- OptiPro Systems, LLC
- James Fredric Munro
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR THE FUNCTIONAL CHARACTERISATION OF OPTICAL LENSES
- Publication number 20240402040
- Publication date Dec 5, 2024
- FOGALE NANOTECH
- Eric LEGROS
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT SYSTEM AND METHOD OF USE
- Publication number 20230417628
- Publication date Dec 28, 2023
- ASML NETHERLANDS B.V.
- Achim WOESSNER
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL FIBER CHARACTERISTIC MEASUREMENT DEVICE, OPTICAL FIBER CHAR...
- Publication number 20230324202
- Publication date Oct 12, 2023
- YOKOGAWA ELECTRIC CORPORATION
- Satoshi MATSUURA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR RECOGNIZING MISALIGNMENTS AND/OR CONTAMINATIONS OF OPTIC...
- Publication number 20230288286
- Publication date Sep 14, 2023
- ROBERT BOSCH GmbH
- Johannes Fischer
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING THE OPTICAL QUALITY OF A GIVEN REGION OF A GLA...
- Publication number 20220412897
- Publication date Dec 29, 2022
- SAINT-GOBAIN GLASS FRANCE
- Daouda Keita DIOP
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT
- Publication number 20220357236
- Publication date Nov 10, 2022
- FOGALE NANOTECH
- Alain COURTEVILLE
- G01 - MEASURING TESTING
Information Patent Application
PRE-CONDITIONING INTERFEROMETER
- Publication number 20220299310
- Publication date Sep 22, 2022
- Arizona Board of Regents on behalf of The University of Arizona
- Dae Wook Kim
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR DETECTING WAVEFRONT ABERRATION OF OBJECTIV...
- Publication number 20220299402
- Publication date Sep 22, 2022
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Peng Li
- G01 - MEASURING TESTING
Information Patent Application
WAVE FRONT SENSOR FOR WAVE ABERRATION COMPENSATION IN AN OPTICAL SY...
- Publication number 20220260453
- Publication date Aug 18, 2022
- UNIVERSITY OF NOTRE DAME DU LAC
- Justin CREPP
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR NON-DESTRUCTIVE EVALUATION OF OPTICAL MATER...
- Publication number 20220090913
- Publication date Mar 24, 2022
- Vanderbilt University
- Yuankai Tao
- G01 - MEASURING TESTING
Information Patent Application
SURFACE METROLOGY SYSTEMS AND METHODS THEREOF
- Publication number 20220049951
- Publication date Feb 17, 2022
- OptiPro Systems, LLC
- James Fredric Munro
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINING GEOMETRICAL PARAMETERS OF A SOFT CONTACT LENS
- Publication number 20220034752
- Publication date Feb 3, 2022
- Alcon Inc.
- Thomas Tonn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR DETECTING WAVEFRONT ERROR BY MODAL-BASED OPTI...
- Publication number 20220003633
- Publication date Jan 6, 2022
- Zhejiang University
- Jian BAI
- G01 - MEASURING TESTING
Information Patent Application
LIGHT INTENSITY FLUCTUATION-INSENSITIVE PROJECTION OBJECTIVE WAVE A...
- Publication number 20210208005
- Publication date Jul 8, 2021
- Shanghai Instittute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Feng TANG
- G01 - MEASURING TESTING
Information Patent Application
COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT...
- Publication number 20210123716
- Publication date Apr 29, 2021
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR NON-DESTRUCTIVE EVALUATION OF OPTICAL MATER...
- Publication number 20210088327
- Publication date Mar 25, 2021
- Vanderbilt University
- Yuankai Tao
- G01 - MEASURING TESTING
Information Patent Application
Two-Dimensional Diffraction Grating
- Publication number 20200363573
- Publication date Nov 19, 2020
- ASML NETHERLANDS B.V.
- Pieter Cristiaan DE GROOT
- G01 - MEASURING TESTING
Information Patent Application
SINGLE-SHOT, ADAPTIVE METROLOGY OF ROTATIONALLY VARIANT OPTICAL SUR...
- Publication number 20200326182
- Publication date Oct 15, 2020
- University of Rochester
- Romita Chaudhuri
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR WAVEFRONT MEASUREMENT OF OPTICAL IMAGING SYSTEM BASED ON...
- Publication number 20200292296
- Publication date Sep 17, 2020
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Yunjun LU
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR CALIBRATING A DIFFRACTIVE MEASURING STRUCTURE
- Publication number 20200284689
- Publication date Sep 10, 2020
- Carl Zeiss SMT GMBH
- Michael SAMANIEGO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
- Publication number 20200225029
- Publication date Jul 16, 2020
- Carl Zeiss SMT GMBH
- Frank RIEPENHAUSEN
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR MEASURING LENS CONTOUR BASED ON LASER WAVE NU...
- Publication number 20200225115
- Publication date Jul 16, 2020
- Guangdong University of Technology
- Shengli XIE
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR MEASURING THE PARAMETERS OF PHASE ELEMENTS AND OPTICAL F...
- Publication number 20200191551
- Publication date Jun 18, 2020
- POLSKIE CENTRUM FOTONIKI I SWIATLOWODÓW
- Karol STEPIEÑ
- G01 - MEASURING TESTING
Information Patent Application
Optical Analysis System For HOE Quality Appraisal
- Publication number 20200158597
- Publication date May 21, 2020
- Luminit LLC
- MATTHEW STEVENSON
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR REMOVING CONTAMINATION FROM LITHOGRAPHIC...
- Publication number 20200150550
- Publication date May 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zi-Wen CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEST OF OPERATIONAL STATUS OF A DIGITAL SCANNER DURING LITHOGRAPHIC...
- Publication number 20200096326
- Publication date Mar 26, 2020
- Nikon Corporation
- Eric Peter Goodwin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus, Method and System for Measuring the Influence of Ophthal...
- Publication number 20200081269
- Publication date Mar 12, 2020
- Queensland University of Technology
- Michael John Collins
- G02 - OPTICS

by using interferometric methods

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wave front sensor for wave aberration compensation in an optical sy...

Surface metrology systems and methods thereof

Pre-conditioning interferometer

Two-dimensional diffraction grating

Measuring apparatus for interferometrically determining a surface s...

Device and method for measuring interfaces of an optical element

Device and method for detecting wavefront error by modal-based opti...

Method for determining geometrical parameters of a soft contact lens

Apparatus and method for detecting wavefront aberration of objectiv...

Systems and methods for non-destructive evaluation of optical mater...

Measurement apparatus for measuring a wavefront aberration of an im...

Method and device for calibrating a diffractive measuring structure

QTIP—quantitative test interferometric plate

Common path mode fiber tip diffraction interferometer for wavefront...

Detection device for detecting lens surface in stitching interferom...

Systems and methods for non-destructive evaluation of optical mater...

Light intensity fluctuation-insensitive projection objective wave a...

Single-shot, adaptive metrology of rotationally variant optical sur...

Method and device for characterizing the surface shape of an optica...

Test of operational status of a digital scanner during lithographic...

Device and method for measuring lens contour based on laser wave nu...

Method and device for characterizing the surface shape of an optica...

Method for wavefront measurement of optical imaging system based on...

Methods and apparatus for removing contamination from lithographic...

Measurement apparatus for measuring height or shape of a surface of...

Contact lens inspection method and system

Method and apparatus for the determination of the index of refracti...

Determination of operability of a digital scanner with shearing int...

Radius-of-curvature measurement by spectrally-controlled interferom...

Measuring method and measuring system for interferometrically measu...

Patents Applicationslast 30 patents

METHOD FOR THE GEOMETRIC CHARACTERISATION OF OPTICAL LENSES

METHOD AND DEVICE FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT

SURFACE METROLOGY SYSTEMS AND METHODS THEREOF

METHOD FOR THE FUNCTIONAL CHARACTERISATION OF OPTICAL LENSES

MEASUREMENT SYSTEM AND METHOD OF USE

OPTICAL FIBER CHARACTERISTIC MEASUREMENT DEVICE, OPTICAL FIBER CHAR...

METHOD FOR RECOGNIZING MISALIGNMENTS AND/OR CONTAMINATIONS OF OPTIC...

METHOD FOR MEASURING THE OPTICAL QUALITY OF A GIVEN REGION OF A GLA...

DEVICE AND METHOD FOR MEASURING INTERFACES OF AN OPTICAL ELEMENT

PRE-CONDITIONING INTERFEROMETER

APPARATUS AND METHOD FOR DETECTING WAVEFRONT ABERRATION OF OBJECTIV...

WAVE FRONT SENSOR FOR WAVE ABERRATION COMPENSATION IN AN OPTICAL SY...

SYSTEMS AND METHODS FOR NON-DESTRUCTIVE EVALUATION OF OPTICAL MATER...

SURFACE METROLOGY SYSTEMS AND METHODS THEREOF

METHOD FOR DETERMINING GEOMETRICAL PARAMETERS OF A SOFT CONTACT LENS

DEVICE AND METHOD FOR DETECTING WAVEFRONT ERROR BY MODAL-BASED OPTI...

LIGHT INTENSITY FLUCTUATION-INSENSITIVE PROJECTION OBJECTIVE WAVE A...

COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT...

SYSTEMS AND METHODS FOR NON-DESTRUCTIVE EVALUATION OF OPTICAL MATER...

Two-Dimensional Diffraction Grating

SINGLE-SHOT, ADAPTIVE METROLOGY OF ROTATIONALLY VARIANT OPTICAL SUR...

METHOD FOR WAVEFRONT MEASUREMENT OF OPTICAL IMAGING SYSTEM BASED ON...

METHOD AND DEVICE FOR CALIBRATING A DIFFRACTIVE MEASURING STRUCTURE

METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...

DEVICE AND METHOD FOR MEASURING LENS CONTOUR BASED ON LASER WAVE NU...

DEVICE FOR MEASURING THE PARAMETERS OF PHASE ELEMENTS AND OPTICAL F...

Optical Analysis System For HOE Quality Appraisal

METHODS AND APPARATUS FOR REMOVING CONTAMINATION FROM LITHOGRAPHIC...

TEST OF OPERATIONAL STATUS OF A DIGITAL SCANNER DURING LITHOGRAPHIC...

Apparatus, Method and System for Measuring the Influence of Ophthal...