Cancel vibration by positioning two slides, opposite acceleration

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G05B2219/41191

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/41191Cancel vibration by positioning two slides, opposite acceleration

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Patents Grantslast 30 patents

Information Patent Grant
Multi-axis reaction system and method for vibration control of mech...
- Patent number 10,914,357
- Issue date Feb 9, 2021
- Amir Khajepour
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Active vibration isolation system
- Patent number 9,353,824
- Issue date May 31, 2016
- Technical Manufacturing Corporation
- Emil Kraner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Active vibration isolation system
- Patent number 8,899,393
- Issue date Dec 2, 2014
- Technical Manufacturing Corporation
- Emil Kraner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Driving apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,795,833
- Issue date Sep 14, 2010
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Driving apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,385,370
- Issue date Jun 10, 2008
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Driving apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,215,095
- Issue date May 8, 2007
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ACTIVE VIBRATION ISOLATION SYSTEM
- Publication number 20130328253
- Publication date Dec 12, 2013
- TECHNICAL MANUFACTURING CORPORATION
- Emil Kraner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Vibration Isolation System With Design For Offloading Payload Force...
- Publication number 20100030384
- Publication date Feb 4, 2010
- Technical Manufacturing Corporation
- Emil Kraner
- G05 - CONTROLLING REGULATING
Information Patent Application
DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20080122395
- Publication date May 29, 2008
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING
Information Patent Application
DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070194741
- Publication date Aug 23, 2007
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING
Information Patent Application
Driving apparatus, exposure apparatus, and device manufacturing method
- Publication number 20050156552
- Publication date Jul 21, 2005
- CANON KABUSHIKI KAISHA
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING