 
                 CPC
 CPC
                     H01J2201/30484
 H01J2201/30484
                     ASML Netherlands B.V.
                                    ASML Netherlands B.V.
                                 Juying  Dou
                                    Juying  Dou
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 National Institute for Materials Science
                                    National Institute for Materials Science
                                 Jie  Tang
                                    Jie  Tang
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 ASML Netherlands B.V.
                                    ASML Netherlands B.V.
                                 Juying  Dou
                                    Juying  Dou
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 ASML Netherlands B.V.
                                    ASML Netherlands B.V.
                                 Juying  Dou
                                    Juying  Dou
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Physics Technologies, Inc.
                                    Applied Physics Technologies, Inc.
                                 William A. Mackie
                                    William A. Mackie
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 The United States of America as represented by the Secretary of Commerce, The...
                                    The United States of America as represented by the Secretary of Commerce, The...
                                 Fred  Sharifi
                                    Fred  Sharifi
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Applied Physics Technologies, Inc.
                                    Applied Physics Technologies, Inc.
                                 William A. Mackie
                                    William A. Mackie
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 The United States of America, as represented by the Secretary of Commerce, th...
                                    The United States of America, as represented by the Secretary of Commerce, th...
                                 Fred  Sharifi
                                    Fred  Sharifi
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Applied Physics Technologies, Inc.
                                    Applied Physics Technologies, Inc.
                                 William A. Mackie
                                    William A. Mackie
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 LIGHTLAB SWEDEN AB
                                    LIGHTLAB SWEDEN AB
                                 Qiu-Hong  Hu
                                    Qiu-Hong  Hu
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 Tsinghua University
                                    Tsinghua University
                                 Li  Qian
                                    Li  Qian
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Hitachi, Ltd.
                                    Hitachi, Ltd.
                                 Tadashi  Fujieda
                                    Tadashi  Fujieda
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 The Regents of the University of California
                                    The Regents of the University of California
                                 Dong-Wook  Kim
                                    Dong-Wook  Kim
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 ASML NETHERLANDS B.V.
                                    ASML NETHERLANDS B.V.
                                 Juying  DOU
                                    Juying  DOU
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 ASML NETHERLANDS B.V.
                                    ASML NETHERLANDS B.V.
                                 Juying  Dou
                                    Juying  Dou
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 National Institute for Materials Science
                                    National Institute for Materials Science
                                 Jie  TANG
                                    Jie  TANG
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 LIGHTLAB SWEDEN AB
                                    LIGHTLAB SWEDEN AB
                                 Qiu-Hong  Hu
                                    Qiu-Hong  Hu
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
                                    THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
                                 Fred  Sharifi
                                    Fred  Sharifi
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 College of William & Mary
                                    College of William & Mary
                                 Kun  Hou
                                    Kun  Hou
                                 C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
                                    C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
                                 Samsung SDI Co., Ltd
                                    Samsung SDI Co., Ltd
                                 Yoon-Jin  KIM
                                    Yoon-Jin  KIM
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 TSINGHUA UNIVERSITY
                                    TSINGHUA UNIVERSITY
                                 LI  QIAN
                                    LI  QIAN
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Dong-Wook  Kim
                                    Dong-Wook  Kim
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Samsung SDI Co., Ltd
                                    Samsung SDI Co., Ltd
                                 Hee-Sung  Moon
                                    Hee-Sung  Moon
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 TADASHI  FUJIEDA
                                    TADASHI  FUJIEDA
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY