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CPC
G05B2219/36068
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/36068
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Patents Grants
last 30 patents
Information
Patent Grant
System for supplying semiconductor manufacturing system control pro...
Patent number
7,472,387
Issue date
Dec 30, 2008
Hitachi Kokusai Electric Inc.
Minoru Nakano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
System for supplying semiconductor manufacturing system control pro...
Publication number
20020111708
Publication date
Aug 15, 2002
Minoru Nakano
G05 - CONTROLLING REGULATING