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Coarse encoder combined with fine grid ccd detector

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Industry

  • CPC
  • G05B2219/37179
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Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/37179Coarse encoder combined with fine grid ccd detector
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