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Patents Grantslast 30 patents

Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,764,751
- Issue date Sep 19, 2023
- SiTime Corporation
- Paul M. Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Film bulk acoustic resonator with spurious resonance suppression
- Patent number 11,736,088
- Issue date Aug 22, 2023
- GLOBAL COMMUNICATION SEMICONDUCTORS, LLC
- Robert B. Stokes
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,469,734
- Issue date Oct 11, 2022
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Frequency compensated oscillator design for process tolerances
- Patent number 11,146,228
- Issue date Oct 12, 2021
- Robert Bosch GmbH
- Markus Lutz
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Temperature stable mems resonator
- Patent number 11,082,024
- Issue date Aug 3, 2021
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-piezoresistive oscillator-based aerosol sensor and aerosol...
- Patent number 10,705,053
- Issue date Jul 7, 2020
- National Tsing Hua University
- Sheng-Shian Li
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 10,541,666
- Issue date Jan 21, 2020
- SiTime Corporation
- Paul M. Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Frequency compensated oscillator design for process tolerances
- Patent number 10,439,579
- Issue date Oct 8, 2019
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Filter chip and method for producing a filter chip
- Patent number 10,193,523
- Issue date Jan 29, 2019
- Snaptrack, Inc.
- Philipp Michael Jäger
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Frequency compensated oscillator design for process tolerances
- Patent number 9,985,598
- Issue date May 29, 2018
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 9,948,273
- Issue date Apr 17, 2018
- SiTime Corporation
- Paul M. Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Compound spring MEMS resonators for frequency and timing generation
- Patent number 9,923,545
- Issue date Mar 20, 2018
- Microchip Technology Incorporated
- John Ryan Clark
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Multiple coil spring MEMS resonator
- Patent number 9,866,200
- Issue date Jan 9, 2018
- Microchip Technology Incorporated
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Frequency compensated oscillator design for process tolerances
- Patent number 9,800,222
- Issue date Oct 24, 2017
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of forming a resonator
- Patent number 9,641,153
- Issue date May 2, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical resonators
- Patent number 9,571,013
- Issue date Feb 14, 2017
- Colorado Seminary
- Amir Rahafrooz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Microelectromechanical resonators
- Patent number 9,209,778
- Issue date Dec 8, 2015
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectronic machine-based ariable
- Patent number 8,902,010
- Issue date Dec 2, 2014
- Motorola Mobility LLC
- William P. Alberth
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Out-of plane MEMS resonator with static out-of-plane deflection
- Patent number 8,629,739
- Issue date Jan 14, 2014
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Micro-electromechanical resonator geometry
- Patent number 8,432,233
- Issue date Apr 30, 2013
- NXP B.V.
- Casper Van Der Avoort
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator array structure and method of operating and using same
- Patent number 8,324,986
- Issue date Dec 4, 2012
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator, elastic wave transmission element and fabrication method...
- Patent number 8,314,666
- Issue date Nov 20, 2012
- Industrial Technology Research Institute
- Tsun-Che Huang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Out-of-plane MEMS resonator with static out-of-plane deflection
- Patent number 8,258,893
- Issue date Sep 4, 2012
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Oscillator having micro-electromechanical resonators and driver cir...
- Patent number 8,242,663
- Issue date Aug 14, 2012
- Georgia Tech Research Corporation
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator structure including regions with different densities...
- Patent number 8,222,974
- Issue date Jul 17, 2012
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Out-of plane MEMS resonator with static out-of-plane deflection
- Patent number 7,999,635
- Issue date Aug 16, 2011
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Thin-film bulk acoustic resonators having perforated bodies that pr...
- Patent number 7,939,990
- Issue date May 10, 2011
- Integrated Device Technology, Inc.
- Ye Wang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator array structure and method of operating and using same
- Patent number 7,907,035
- Issue date Mar 15, 2011
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Thin-film piezoelectric-on-insulator resonators having perforated r...
- Patent number 7,888,843
- Issue date Feb 15, 2011
- Georgia Tech Research Corporation
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator structure and method
- Patent number 7,777,596
- Issue date Aug 17, 2010
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Film Bulk Acoustic Resonator with Spurious Resonance Suppression
- Publication number 20200220520
- Publication date Jul 9, 2020
- Global Communication Semiconductors, LLC
- Robert B. Stokes
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FREQUENCY COMPENSATED OSCILLATOR DESIGN FOR PROCESS TOLERANCES
- Publication number 20180248532
- Publication date Aug 30, 2018
- ROBERT BOSCH GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FREQUENCY COMPENSATED OSCILLATOR DESIGN FOR PROCESS TOLERANCES
- Publication number 20180248533
- Publication date Aug 30, 2018
- ROBERT BOSCH GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL RESONATORS
- Publication number 20140266484
- Publication date Sep 18, 2014
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR
- Publication number 20140184347
- Publication date Jul 3, 2014
- Motorola Mobility LLC
- William P. Alberth
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROMECHANICAL RESONATORS
- Publication number 20130285676
- Publication date Oct 31, 2013
- Colorado Seminary
- Amir Rahafrooz
- G01 - MEASURING TESTING
Information Patent Application
OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION
- Publication number 20120329255
- Publication date Dec 27, 2012
- Emmanuel P. Quevy
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Bulk acoustic wave resonator and method of manufacturing thereof
- Publication number 20120280758
- Publication date Nov 8, 2012
- TEKNOLOGIAN TUTKIMUSKESKUS VTT
- Antti Jaakkola
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICRO-ELECTROMECHANICAL RESONATOR GEOMETRY
- Publication number 20110309891
- Publication date Dec 22, 2011
- NXP B.V.
- CASPER VAN DER AVOORT
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION
- Publication number 20110260810
- Publication date Oct 27, 2011
- Emmanuel P. Quevy
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME
- Publication number 20110199167
- Publication date Aug 18, 2011
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR, ELASTIC WAVE TRANSMISSION ELEMENT AND FABRICATION METHOD...
- Publication number 20110133855
- Publication date Jun 9, 2011
- Industrial Technology Research Institute
- Tsun-Che Huang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Thin-Film Piezoelectric-on-Insulator Resonators Having Perforated R...
- Publication number 20110133848
- Publication date Jun 9, 2011
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR STRUCTURE AND METHOD
- Publication number 20110018655
- Publication date Jan 27, 2011
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN-FILM BULK ACOUSTIC RESONATORS HAVING PERFORATED BODIES THAT PR...
- Publication number 20100194241
- Publication date Aug 5, 2010
- Integrated Device Technology, Inc.
- Ye Wang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Thin-Film Piezoelectric-on-Insulator Resonators Having Perforated R...
- Publication number 20100060111
- Publication date Mar 11, 2010
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS resonator array structure and method of operating and using same
- Publication number 20090153258
- Publication date Jun 18, 2009
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS resonator structure and method
- Publication number 20090153267
- Publication date Jun 18, 2009
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Frequency Tuning of a Micro-Mechanical Res...
- Publication number 20070096850
- Publication date May 3, 2007
- DISCERA, INC.
- Xiangxiang Huang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method for frequency tuning of a micro-mechanical resonator
- Publication number 20060006964
- Publication date Jan 12, 2006
- Discera
- Xiangxiang Huang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method and apparatus for frequency tuning of a micro-mechanical res...
- Publication number 20050195049
- Publication date Sep 8, 2005
- Xiangxiang Huang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Frequency compensated oscillator design for process tolerances
- Publication number 20050073078
- Publication date Apr 7, 2005
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Micro-electromechanical structure resonator, method of making, and...
- Publication number 20020096967
- Publication date Jul 25, 2002
- Qing Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY

comprising perforations

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Temperature stable MEMS resonator

Film bulk acoustic resonator with spurious resonance suppression

Temperature stable MEMS resonator

Frequency compensated oscillator design for process tolerances

Temperature stable mems resonator

Thermal-piezoresistive oscillator-based aerosol sensor and aerosol...

Temperature stable MEMS resonator

Frequency compensated oscillator design for process tolerances

Filter chip and method for producing a filter chip

Frequency compensated oscillator design for process tolerances

Temperature stable MEMS resonator

Compound spring MEMS resonators for frequency and timing generation

Multiple coil spring MEMS resonator

Frequency compensated oscillator design for process tolerances

Method of forming a resonator

Micromechanical resonators

Microelectromechanical resonators

Microelectronic machine-based ariable

Out-of plane MEMS resonator with static out-of-plane deflection

Micro-electromechanical resonator geometry

MEMS resonator array structure and method of operating and using same

Resonator, elastic wave transmission element and fabrication method...

Out-of-plane MEMS resonator with static out-of-plane deflection

Oscillator having micro-electromechanical resonators and driver cir...

MEMS resonator structure including regions with different densities...

Out-of plane MEMS resonator with static out-of-plane deflection

Thin-film bulk acoustic resonators having perforated bodies that pr...

MEMS resonator array structure and method of operating and using same

Thin-film piezoelectric-on-insulator resonators having perforated r...

MEMS resonator structure and method

Patents Applicationslast 30 patents

Film Bulk Acoustic Resonator with Spurious Resonance Suppression

FREQUENCY COMPENSATED OSCILLATOR DESIGN FOR PROCESS TOLERANCES

FREQUENCY COMPENSATED OSCILLATOR DESIGN FOR PROCESS TOLERANCES

MICROELECTROMECHANICAL RESONATORS

MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR

MICROMECHANICAL RESONATORS

OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION

Bulk acoustic wave resonator and method of manufacturing thereof

MICRO-ELECTROMECHANICAL RESONATOR GEOMETRY

OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION

MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME

RESONATOR, ELASTIC WAVE TRANSMISSION ELEMENT AND FABRICATION METHOD...

Thin-Film Piezoelectric-on-Insulator Resonators Having Perforated R...

MEMS RESONATOR STRUCTURE AND METHOD

THIN-FILM BULK ACOUSTIC RESONATORS HAVING PERFORATED BODIES THAT PR...

Thin-Film Piezoelectric-on-Insulator Resonators Having Perforated R...

MEMS resonator array structure and method of operating and using same

MEMS resonator structure and method

Method and Apparatus for Frequency Tuning of a Micro-Mechanical Res...

Method for frequency tuning of a micro-mechanical resonator

Method and apparatus for frequency tuning of a micro-mechanical res...

Frequency compensated oscillator design for process tolerances

Micro-electromechanical structure resonator, method of making, and...