Control of atmosphere

Industry

CPC
C23C18/1682

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating Contact plating

Current Industry

C23C18/1682Control of atmosphere

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for metal layer formation
- Patent number 11,746,421
- Issue date Sep 5, 2023
- ORELTECH LTD.
- Natalia Zamoshchik
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method for metallising a porous structure made of carbon material
- Patent number 11,427,915
- Issue date Aug 30, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Paul-Henri Haumesser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for performing immersion tin process or copper...
- Patent number 11,408,076
- Issue date Aug 9, 2022
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Heinrich Trischler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,584,420
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Kazuki Motomatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating of carbon nanomaterials
- Patent number 10,156,015
- Issue date Dec 18, 2018
- Shenzhen Shen Rui Graphene Technology Co., Ltd.
- Johan Jianying Liu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plating apparatus, plating method and storage medium
- Patent number 9,487,865
- Issue date Nov 8, 2016
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combinatorial methods for developing electrochromic materials and d...
- Patent number 9,466,499
- Issue date Oct 11, 2016
- Intermolecular, Inc.
- Jeroen Van Duren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High productivity combinatorial workflow to screen and design chalc...
- Patent number 9,305,791
- Issue date Apr 5, 2016
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless plating apparatus and electroless plating method
- Patent number 9,293,364
- Issue date Mar 22, 2016
- Ebara Corporation
- Hiroyuki Kanda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for plating process
- Patent number 9,255,331
- Issue date Feb 9, 2016
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a seed layer for the deposition of a metal on a...
- Patent number 9,093,381
- Issue date Jul 28, 2015
- STMicroelectronics (Tours) SAS
- Clément Barriere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cap metal forming method
- Patent number 8,999,432
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for electroless deposition of materials on sem...
- Patent number 8,906,446
- Issue date Dec 9, 2014
- Lam Research Corporation
- Igor C. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless plating system
- Patent number 8,622,017
- Issue date Jan 7, 2014
- Lam Research Corporation
- Igor Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods affecting profiles of solutions dispensed acros...
- Patent number 8,591,985
- Issue date Nov 26, 2013
- Lam Research Corporation
- Igor C. Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Barrier layer configurations and methods for processing microelectr...
- Patent number 8,502,381
- Issue date Aug 6, 2013
- Lam Research Corporation
- Igor C. Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electroless plating-liquid system
- Patent number 8,257,781
- Issue date Sep 4, 2012
- Novellus Systems, Inc.
- Eric G. Webb
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for passivating hardware of a microelectronic topography pro...
- Patent number 8,143,161
- Issue date Mar 27, 2012
- Lam Research Corporation
- Igor C. Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for electroless deposition of materials on sem...
- Patent number 8,128,987
- Issue date Mar 6, 2012
- LAM Research Corp.
- Igor C. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless plating system
- Patent number 7,972,652
- Issue date Jul 5, 2011
- Lam Research Corporation
- Igor Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless deposition system
- Patent number 7,913,644
- Issue date Mar 29, 2011
- Lam Research Corporation
- Ron Rulkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier layer configurations and methods for processing microelectr...
- Patent number 7,897,507
- Issue date Mar 1, 2011
- Lam Research Corporation
- Igor C. Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of depositing fluids within a microelectric topography proce...
- Patent number 7,884,033
- Issue date Feb 8, 2011
- Lam Research
- Igor C. Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems and methods affecting profiles of solutions dispensed acros...
- Patent number 7,779,782
- Issue date Aug 24, 2010
- Lam Research
- Igor C. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier layer configurations and methods for processing microelectr...
- Patent number 7,714,441
- Issue date May 11, 2010
- Lam Research
- Igor C. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus configurations for affecting movement of fluids within a...
- Patent number 7,636,234
- Issue date Dec 22, 2009
- Lam Research Corporation
- Igor C. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measurement techniques for controlling aspects of a electroless dep...
- Patent number 7,465,358
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Timothy W. Weidman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for electroless deposition
- Patent number 7,341,633
- Issue date Mar 11, 2008
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate plating method and apparatus
- Patent number 7,033,463
- Issue date Apr 25, 2006
- Ebara Corporation
- Akihisa Hongo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for electroless deposition of materials on sem...
- Patent number 6,913,651
- Issue date Jul 5, 2005
- Blue29, LLC
- Igor Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLATED SUBSTRATE
- Publication number 20220403524
- Publication date Dec 22, 2022
- SHIBAURA INSTITUTE OF TECHNOLOGY
- Tomoji OHISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLESS SEMICONDUCTOR BONDING STRUCTURE, ELECTROLESS PLATING SY...
- Publication number 20220056589
- Publication date Feb 24, 2022
- Advanced Semiconductor Engineering, Inc.
- Chun-Wei CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Performing Immersion Tin Process or Copper...
- Publication number 20210108315
- Publication date Apr 15, 2021
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Heinrich Trischler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR METALLIZING HOLES OF AN ELECTRONIC MODULE BY LIQUID-PHA...
- Publication number 20210040620
- Publication date Feb 11, 2021
- 3D PLUS
- Christian VAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR METAL LAYER FORMATION
- Publication number 20200017974
- Publication date Jan 16, 2020
- OrelTech Ltd.
- Natalia ZAMOSHCHIK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spin-On Metallization
- Publication number 20190309422
- Publication date Oct 10, 2019
- VERSUM MATERIALS US, LLC
- Alan C. Cooper
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ACTIVE COMPONENT FORMATION IN HYBRID MATERIALS
- Publication number 20190211455
- Publication date Jul 11, 2019
- OrelTech Ltd.
- Natalia ZAMOSHCHIK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20180002811
- Publication date Jan 4, 2018
- TOKYO ELECTRON LIMITED
- Kazuki Motomatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESIN ARTICLE HAVING PLATING LAYER AND METHOD OF MANUFACTURING THE...
- Publication number 20150361560
- Publication date Dec 17, 2015
- CANON COMPONENTS, INC.
- Taisuke IWASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM
- Publication number 20140356539
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wet Processing Systems and Methods with Replenishment
- Publication number 20140273497
- Publication date Sep 18, 2014
- INTERMOLECULAR INC.
- Makonnen Payne
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
High Productivity Combinatorial Workflow to Screen and Design Chalc...
- Publication number 20140273314
- Publication date Sep 18, 2014
- Intermolecular, Inc.
- Imran Hashim
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Non-Contact Wet-Process Cell Confining Liquid to a Region of a Soli...
- Publication number 20140262028
- Publication date Sep 18, 2014
- Intermolecular, Inc.
- Rajesh Kelekar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Controlling Radical Lifetimes in a Remote Plasma Chamber
- Publication number 20140273309
- Publication date Sep 18, 2014
- Intermolecular, Inc.
- Sandip Niyogi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Combinatorial Methods and Systems for Developing Electrochromic Mat...
- Publication number 20140272112
- Publication date Sep 18, 2014
- Intermolecular, Inc.
- Jeroen Van Duren
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM
- Publication number 20140120264
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ELECTROLESS PLATING PROCESS
- Publication number 20140017410
- Publication date Jan 16, 2014
- Council of Scientific and Industrial Research
- Ganesh Ravindra Kale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLESS PLATING APPARATUS AND ELECTROLESS PLATING METHOD
- Publication number 20130122704
- Publication date May 16, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki KANDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Forming a Barrier Layer with Periodic Concentrations of...
- Publication number 20120263869
- Publication date Oct 18, 2012
- LAM RESEARCH CORPORATION
- Igor C. Ivanov
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus and Method for Electroless Deposition of Materials on Sem...
- Publication number 20120213914
- Publication date Aug 23, 2012
- LAM RESEARCH CORPORATION
- Igor C. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle-Beam Induced Processing Using Liquid Reactants
- Publication number 20110293847
- Publication date Dec 1, 2011
- Jeffrey Todd Hastings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless Plating System
- Publication number 20110214608
- Publication date Sep 8, 2011
- Igor Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless Deposition System
- Publication number 20110135824
- Publication date Jun 9, 2011
- Ron Rulkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A SEED LAYER FOR THE DEPOSITION OF A METAL ON A...
- Publication number 20110117271
- Publication date May 19, 2011
- Centre National de la Recherche Scientifique
- Clément Barriere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier Layer Configurations and Methods for Processing Microelectr...
- Publication number 20110117328
- Publication date May 19, 2011
- LAM RESEARCH
- Igor C. Ivanov
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and Apparatus Configurations for Affecting Movement of Flui...
- Publication number 20110097477
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Igor C. Ivanov
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROCESS FOR PRODUCING COMPOSITE MATERIAL COMPRISING RESIN MOLDED PR...
- Publication number 20110020550
- Publication date Jan 27, 2011
- Hironori Ota
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR PRODUCING POLYMER MEMBER HAVING PLATED FILM
- Publication number 20100320635
- Publication date Dec 23, 2010
- Hitachi Maxell, Ltd.
- Hironori OTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods Affecting Profiles of Solutions Dispensed Acros...
- Publication number 20100279002
- Publication date Nov 4, 2010
- LAM RESEARCH CORPORATION
- Igor C. Ivanov
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Systems and Methods Affecting Profiles of Solutions Dispensed Acros...
- Publication number 20100279071
- Publication date Nov 4, 2010
- LAM RESEARCH CORPORATION
- Igor C. Ivanov
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Control of atmosphere

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for metal layer formation

Method for metallising a porous structure made of carbon material

Method and apparatus for performing immersion tin process or copper...

Substrate liquid processing apparatus, substrate liquid processing...

Method for coating of carbon nanomaterials

Plating apparatus, plating method and storage medium

Combinatorial methods for developing electrochromic materials and d...

High productivity combinatorial workflow to screen and design chalc...

Electroless plating apparatus and electroless plating method

Apparatus for plating process

Method for forming a seed layer for the deposition of a metal on a...

Cap metal forming method

Apparatus and method for electroless deposition of materials on sem...

Electroless plating system

Systems and methods affecting profiles of solutions dispensed acros...

Barrier layer configurations and methods for processing microelectr...

Electroless plating-liquid system

Method for passivating hardware of a microelectronic topography pro...

Apparatus and method for electroless deposition of materials on sem...

Electroless plating system

Electroless deposition system

Barrier layer configurations and methods for processing microelectr...

Method of depositing fluids within a microelectric topography proce...

Systems and methods affecting profiles of solutions dispensed acros...

Barrier layer configurations and methods for processing microelectr...

Apparatus configurations for affecting movement of fluids within a...

Measurement techniques for controlling aspects of a electroless dep...

Apparatus for electroless deposition

Substrate plating method and apparatus

Apparatus and method for electroless deposition of materials on sem...

Patents Applicationslast 30 patents

PLATED SUBSTRATE

ELECTROLESS SEMICONDUCTOR BONDING STRUCTURE, ELECTROLESS PLATING SY...

Method and Apparatus for Performing Immersion Tin Process or Copper...

PROCESS FOR METALLIZING HOLES OF AN ELECTRONIC MODULE BY LIQUID-PHA...

METHOD FOR METAL LAYER FORMATION

Spin-On Metallization

METAL ACTIVE COMPONENT FORMATION IN HYBRID MATERIALS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

RESIN ARTICLE HAVING PLATING LAYER AND METHOD OF MANUFACTURING THE...

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM

Wet Processing Systems and Methods with Replenishment

High Productivity Combinatorial Workflow to Screen and Design Chalc...

Non-Contact Wet-Process Cell Confining Liquid to a Region of a Soli...

Controlling Radical Lifetimes in a Remote Plasma Chamber

Combinatorial Methods and Systems for Developing Electrochromic Mat...

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM

ELECTROLESS PLATING PROCESS

ELECTROLESS PLATING APPARATUS AND ELECTROLESS PLATING METHOD

Methods for Forming a Barrier Layer with Periodic Concentrations of...

Apparatus and Method for Electroless Deposition of Materials on Sem...

Particle-Beam Induced Processing Using Liquid Reactants

Electroless Plating System

Electroless Deposition System

METHOD FOR FORMING A SEED LAYER FOR THE DEPOSITION OF A METAL ON A...

Barrier Layer Configurations and Methods for Processing Microelectr...

Methods and Apparatus Configurations for Affecting Movement of Flui...

PROCESS FOR PRODUCING COMPOSITE MATERIAL COMPRISING RESIN MOLDED PR...

METHOD FOR PRODUCING POLYMER MEMBER HAVING PLATED FILM

Systems and Methods Affecting Profiles of Solutions Dispensed Acros...

Systems and Methods Affecting Profiles of Solutions Dispensed Acros...