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Control relative speed between two spindles
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CPC
G05B2219/43142
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/43142
Control relative speed between two spindles
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for chemical mechanical polishing
Patent number
5,938,884
Issue date
Aug 17, 1999
Obsidian, Inc.
Jon A. Hoshizaki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus for chemical mechanical polishing
Patent number
5,908,530
Issue date
Jun 1, 1999
Obsidian, Inc.
Jon A. Hoshizaki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus for chemical mechanical polishing
Patent number
5,851,136
Issue date
Dec 22, 1998
Obsidian, Inc.
Lawrence L. Lee
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for chemical mechanical polishing
Patent number
5,759,918
Issue date
Jun 2, 1998
Obsidian, Inc.
Jon A. Hoshizaki
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
Machine tool system
Publication number
20020129683
Publication date
Sep 19, 2002
Martin Peter Ollis
G05 - CONTROLLING REGULATING