Correlation between defect and measured parameters to find origin of defect

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CPC
G05B2219/32221

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/32221Correlation between defect and measured parameters to find origin of defect

Industries

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Correlation between defect and measured parameters to find origin of defect

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Computer-implemented method for part analytics of a workpiece machi...

Management system and non-transitory computer-readable recording me...

Production system that sets determination value of variable relatin...

Management system and non-transitory computer-readable recording me...

Substrate processing system and group managing apparatus

Method and system for defect detection in manufacturing integrated...

Method and system for managing semiconductor manufacturing device

Manufacturing system, manufacturing method, managing apparatus, man...

Combine-information processing apparatus, method for processing com...

Tool health information monitoring and tool performance analysis in...

Method and device for identifying the cause of failures in industri...

Defect detection system, defect detection method, and defect detect...

Diagnostic method for manufacturing processes

Tool health information monitoring and tool performance analysis in...

Method and apparatus for classifying faults based on wafer state da...

Controlling method for manufacturing process comprising determining...

Method for the automated determination of fault events

Semiconductor manufacturing fault detection and management system a...

Diagnostic method for manufacturing processes

In-situ randomization and recording of wafer processing order at pr...

Controlling method for manufacturing process

In-situ randomization and recording of wafer processing order at pr...

Diagnostic method for manufacturing processes

System and method for determining the effectiveness of production i...

Method and apparatus for fault detection of a processing tool and c...

In-situ randomization and recording of wafer processing order at pr...

Method and device for diagnosing machines

Defect reference system automatic pattern classification

Method and apparatus for analyzing correlation for semiconductor chips

Method for controlling a semiconductor manufacturing process by fai...

Patents Applicationslast 30 patents

DEFECT PROFILING AND TRACKING SYSTEM FOR PROCESS-MANUFACTURING ENTE...

COMPUTER-IMPLEMENTED METHOD FOR PART ANALYTICS OF A WORKPIECE MACHI...

CLOUD-BASED ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED...

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ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED...

SUBSTRATE PROCESSING SYSTEM AND GROUP MANAGING APPARATUS

Method and system for managing semiconductor manufacturing device

METHOD OF SEARCHING FOR KEY SEMICONDUCTOR OPERATION WITH RANDOMIZAT...

PALLET MONITORING SYSTEM AND MONITORING METHOD

METHOD OF SEARCHING FOR KEY SEMICONDUCTOR OPERATION WITH RANDOMIZAT...

METHOD AND SYSTEM FOR DEFECT DETECTION IN MANUFACTURING INTEGRATED...

DIAGNOSTIC METHOD FOR MANUFACTURING PROCESSES

MANUFACTURING SYSTEM, MANUFACTURING METHOD, MANAGING APPARATUS, MAN...

COMBINE-INFORMATION PROCESSING APPARATUS, METHOD FOR PROCESSING COM...

METHOD AND SYSTEM FOR MANAGING SEMICONDUCTOR MANUFACTURING DEVICE

Defect detection system, defect detection method, and defect detect...

Tool health information monitoring and tool performance analysis in...

Diagnostic method for manufacturing processes

System and method for process degradation problematic tool identifi...

Method and device for identifying the cause of failures in industri...

Diagnostic method for manufacturing processes

Semiconductor manufacturing fault detection and management system a...

Controlling method for manufacturing process

Diagnostic method for manufacturing processes

In-situ randomization and recording of wafer processing order at pr...

In-situ randomization and recording of wafer processing order at pr...

Diagnostic method for manufacturing processes

Method for the automated determination of fault events

System and method for determining the effectiveness of production i...

Controlling method for manufacturing process