Determination of the actual position of the moving member

Industry

CPC
F16C32/0446

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Parent Industries

FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F16Engineering elements F16CSHAFTS FLEXIBLE SHAFTS ELEMENTS OR CRANKSHAFT MECHANISMS ROTARY BODIES OTHER THAN GEARING ELEMENTS BEARINGS F16C32/00Bearings not otherwise provided for

Current Industry

F16C32/0446Determination of the actual position of the moving member

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vacuum pump and electromagnet unit used for vacuum pump comprising...
- Patent number 12,060,885
- Issue date Aug 13, 2024
- Edwards Japan Limited
- Yongwei Shi
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Stiffness gain mechanism for magnetic suspension bearing, magnetic...
- Patent number 12,044,271
- Issue date Jul 23, 2024
- Magassist, Inc.
- Chiahao Hsu
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Vacuum pump and magnetic bearing controller with multiple rigidity...
- Patent number 11,680,572
- Issue date Jun 20, 2023
- Edwards Japan Limited
- Yoshimasa Ezawa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Resonance vibration control method and system
- Patent number 11,674,547
- Issue date Jun 13, 2023
- Rolls-Royce PLC
- Lucia Ciciriello
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
Contaminant-free work piece processing system
- Patent number 11,649,855
- Issue date May 16, 2023
- SKF CANADA LIMITED
- Daren Paul Tremaine
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Vacuum pump, magnetic bearing device, and rotor
- Patent number 11,536,280
- Issue date Dec 27, 2022
- Edwards Japan Limited
- Toshiaki Kawashima
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Magnetic levitation bearing structure and magnetic levitation compr...
- Patent number 11,466,731
- Issue date Oct 11, 2022
- Gree Electric Appliances, Inc. of Zhuhai
- Penghui Liu
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
System for compensating for the stresses applied to a bearing suppo...
- Patent number 11,404,934
- Issue date Aug 2, 2022
- SKF MAGNETIC MECHATRONICS
- Joaquim Da Silva
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Magnetic bearing control apparatus, control method and high speed r...
- Patent number 11,306,777
- Issue date Apr 19, 2022
- LG Electronics Inc.
- Keun Woo Jung
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Magnetic bearing device and fluid machine system using same
- Patent number 11,162,503
- Issue date Nov 2, 2021
- Daikin Industries, Ltd.
- Atsushi Sakawaki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Control device for magnetic bearing and control method
- Patent number 11,137,026
- Issue date Oct 5, 2021
- Hitachi, Ltd.
- Toyomi Yoshida
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Electromagnetic unit, magnetic bearing device, and vacuum pump
- Patent number 11,028,853
- Issue date Jun 8, 2021
- Edwards Japan Limited
- Toshiaki Kawashima
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Magnetic levitation control device and vacuum pump
- Patent number 11,015,609
- Issue date May 25, 2021
- Shimadzu Corporation
- Junichiro Kozaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Vacuum pump, and rotor blade and reflection mechanism mounted in va...
- Patent number 11,009,029
- Issue date May 18, 2021
- Edwards Japan Limited
- Takashi Kabasawa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Magnetic bearing control device and vacuum pump
- Patent number 10,968,949
- Issue date Apr 6, 2021
- Shimadzu Corporation
- Junichiro Kozaki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method for monitoring a magnetic bearing apparatus
- Patent number 10,921,108
- Issue date Feb 16, 2021
- Siemens Aktiengesellschaft
- Joachim Denk
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electromagnetic rotary drive
- Patent number 10,873,241
- Issue date Dec 22, 2020
- Levitronix GmbH
- Reto Schöb
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Compensation windings for magnetic bearings
- Patent number 10,851,834
- Issue date Dec 1, 2020
- Ingersoll-Rand Industrial U.S., Inc.
- Petri Juhani Maki-Ontto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Balanced switching amplifier for a magnetic bearing assembly
- Patent number 10,704,599
- Issue date Jul 7, 2020
- Synchrony, Inc.
- Robert Jett Field
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Magnetic bearing device and vacuum pump
- Patent number 10,683,893
- Issue date Jun 16, 2020
- Shimadzu Corporation
- Junichiro Kozaki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Centrifugal compressor and magnetic bearing backup system for centr...
- Patent number 10,634,154
- Issue date Apr 28, 2020
- Daikin Applied Americas Inc.
- Jeffrey Allen Morgan
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Roller module with magnetic bearings and permanent magnets
- Patent number 10,632,739
- Issue date Apr 28, 2020
- Korea Institute of Machinery & Materials
- Cheol-Hoon Park
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Magnetic bearing control device and vacuum pump
- Patent number 10,619,669
- Issue date Apr 14, 2020
- Shimadzu Corporation
- Junichiro Kozaki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Vacuum pump and abnormality cause estimating method for vacuum pump
- Patent number 10,578,158
- Issue date Mar 3, 2020
- Edwards Japan Limited
- Yoshinobu Ohtachi
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Vibration control method and system
- Patent number 10,547,258
- Issue date Jan 28, 2020
- Rolls-Royce PLC
- Lucia Ciciriello
- F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information Patent Grant
Center error value of bearings measuring method
- Patent number 10,480,922
- Issue date Nov 19, 2019
- LG Electronics Inc.
- Namsoo Lee
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Active magnetic bearing control for downhole-type system
- Patent number 10,447,111
- Issue date Oct 15, 2019
- Upwing Energy, LLC
- Patrick McMullen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Balancing method for balancing at high speed a rotor of a rotary ma...
- Patent number 10,444,106
- Issue date Oct 15, 2019
- SKF MAGNETIC MECHATRONICS
- Ulrich Schroeder
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Discharge excitation gas laser apparatus
- Patent number 10,250,008
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Akihiko Kurosu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
System and method for a synchronized driver circuit
- Patent number 10,087,872
- Issue date Oct 2, 2018
- Infineon Technologies AG
- Christian Schweikert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Combined Axial/Radial Magnetic Bearing
- Publication number 20240200597
- Publication date Jun 20, 2024
- Linz Center of Mechatronics GmbH
- Gerald Jungmayr
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MAGNETIC BEARING MODULE HAVING A MAGNETIC BEARING
- Publication number 20240183393
- Publication date Jun 6, 2024
- SKF MAGNETIC MECHATRONICS
- Eduardo CARRASCO
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
DEVICE FOR CONTROLLING A MAGNETIC BEARING AND ASSOCIATED SYSTEM
- Publication number 20240093729
- Publication date Mar 21, 2024
- SKF MAGNETIC MECHATRONICS
- Andre DEANDRADE
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
A CAPACITIVE SENSOR DEVICE AND A MAGNETIC BEARING ASSEMBLY WITH SUC...
- Publication number 20240085165
- Publication date Mar 14, 2024
- VDL Enabling Technologies Group B.V.
- Ronald Jan ASJES
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
A CONTROL SYSTEM FOR CONTROLLING A MAGNETIC SUSPENSION SYSTEM
- Publication number 20230340992
- Publication date Oct 26, 2023
- SPINDRIVE OY
- Alexander SMIRNOV
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
STIFFNESS GAIN MECHANISM FOR MAGNETIC SUSPENSION BEARING, MAGNETIC...
- Publication number 20220106981
- Publication date Apr 7, 2022
- Magassist, Inc.
- Chiahao Hsu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MAGNETIC LEVITATION BEARING STRUCTURE AND MAGNETIC LEVITATION COMPR...
- Publication number 20210341016
- Publication date Nov 4, 2021
- GREE ELECTRIC APPLIANCES, INC. OF ZHUHAI
- Penghui LIU
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEM FOR COMPENSATING FOR THE STRESSES APPLIED TO A BEARING SUPPO...
- Publication number 20210305881
- Publication date Sep 30, 2021
- SKF MAGNETIC MECHATRONICS
- Joaquim Da Silva
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MAGNETICALLY COUPLED FLYWHEEL
- Publication number 20210143705
- Publication date May 13, 2021
- CHAKRATEC LTD.
- Ilan BEN DAVID
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VACUUM PUMP AND CONTROLLER
- Publication number 20210018005
- Publication date Jan 21, 2021
- Edwards Japan Limited
- Yoshimasa Ezawa
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Information Patent Application
VACUUM PUMP, MAGNETIC BEARING DEVICE, AND ROTOR
- Publication number 20200158118
- Publication date May 21, 2020
- EDWARDS JAPAN LIMITED
- Toshiaki Kawashima
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
VACUUM PUMP, AND MAGNETIC BEARING PORTION AND SHAFT PROVIDED IN VAC...
- Publication number 20200158117
- Publication date May 21, 2020
- Edwards Japan Limited
- Yongwei Shi
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Control Device for Magnetic Bearing and Control Method
- Publication number 20200080591
- Publication date Mar 12, 2020
- Hitachi, Ltd
- Toyomi YOSHIDA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
BALANCED SWITCHING AMPLIFIER FOR A MAGNETIC BEARING ASSEMBLY
- Publication number 20190353203
- Publication date Nov 21, 2019
- SYNCHRONY, INC.
- Robert Jett Field
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MAGNETICALLY COUPLED FLYWHEEL
- Publication number 20190252942
- Publication date Aug 15, 2019
- CHAKRATEC LTD.
- Ilan BEN DAVID
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MAGNETIC BEARING DEVICE AND FLUID MACHINE SYSTEM USING SAME
- Publication number 20190170151
- Publication date Jun 6, 2019
- DAIKIN INDUSTRIES, LTD.
- Atsushi SAKAWAKI
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
RESONANCE VIBRATION CONTROL METHOD AND SYSTEM
- Publication number 20190128324
- Publication date May 2, 2019
- Rolls-Royce plc
- Lucia CICIRIELLO
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
MAGNETIC BEARING CONTROL APPARATUS, CONTROL METHOD AND HIGH SPEED R...
- Publication number 20190120290
- Publication date Apr 25, 2019
- LG ELECTRONICS INC.
- Keun Woo JUNG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MAGNETIC BEARING CONTROL DEVICE AND VACUUM PUMP
- Publication number 20190072131
- Publication date Mar 7, 2019
- Shimadzu Corporation
- Junichiro KOZAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROMAGNETIC UNIT, MAGNETIC BEARING DEVICE, AND VACUUM PUMP
- Publication number 20190024667
- Publication date Jan 24, 2019
- EDWARDS JAPAN LIMITED
- Toshiaki Kawashima
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
VACUUM PUMP, AND ROTOR BLADE AND REFLECTION MECHANISM MOUNTED IN VA...
- Publication number 20180363662
- Publication date Dec 20, 2018
- Edwards Japan Limited
- Takashi Kabasawa
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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MAGNETICALLY STABILIZED PROPSHAFT BEARING SYSTEM
- Publication number 20180251027
- Publication date Sep 6, 2018
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Glenn Meinhardt
- B60 - VEHICLES IN GENERAL
Information Patent Application
MAGNETIC BEARING DEVICE AND VACUUM PUMP
- Publication number 20180238386
- Publication date Aug 23, 2018
- Shimadzu Corporation
- Junichiro KOZAKI
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ACTIVE RADIAL MAGNETIC BEARING PHASED ARRAY
- Publication number 20180128313
- Publication date May 10, 2018
- Cleveland State University
- Jerzy T. Sawicki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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TURBOMACHINE WITH ACTIVE MAGNETIC BEARINGS
- Publication number 20180087516
- Publication date Mar 29, 2018
- GENERAL ELECTRIC COMPANY
- Mohamed Osama
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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CENTER ERROR VALUE OF BEARINGS MEASURING METHOD
- Publication number 20180023938
- Publication date Jan 25, 2018
- LG ELECTRONICS INC.
- Namsoo LEE
- G01 - MEASURING TESTING
Information Patent Application
COMPENSATION WINDINGS FOR MAGNETIC BEARINGS
- Publication number 20170335889
- Publication date Nov 23, 2017
- Ingersoll-Rand Company
- Petri Juhani Maki-Ontto
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DISCHARGE EXCITATION GAS LASER APPARATUS
- Publication number 20170338616
- Publication date Nov 23, 2017
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
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NON-CANTILEVERED MAGNETIC BEARING FOR DRUM-SHAPED VERTICAL ROTORS
- Publication number 20170321749
- Publication date Nov 9, 2017
- SKF Canada Limited
- Daren P. Tremaine
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VACUUM PUMP AND ABNORMALITY CAUSE ESTIMATING METHOD FOR VACUUM PUMP
- Publication number 20170248166
- Publication date Aug 31, 2017
- Yoshinobu Ohtachi
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Determination of the actual position of the moving member

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum pump and electromagnet unit used for vacuum pump comprising...

Stiffness gain mechanism for magnetic suspension bearing, magnetic...

Vacuum pump and magnetic bearing controller with multiple rigidity...

Resonance vibration control method and system

Contaminant-free work piece processing system

Vacuum pump, magnetic bearing device, and rotor

Magnetic levitation bearing structure and magnetic levitation compr...

System for compensating for the stresses applied to a bearing suppo...

Magnetic bearing control apparatus, control method and high speed r...

Magnetic bearing device and fluid machine system using same

Control device for magnetic bearing and control method

Electromagnetic unit, magnetic bearing device, and vacuum pump

Magnetic levitation control device and vacuum pump

Vacuum pump, and rotor blade and reflection mechanism mounted in va...

Magnetic bearing control device and vacuum pump

Method for monitoring a magnetic bearing apparatus

Electromagnetic rotary drive

Compensation windings for magnetic bearings

Balanced switching amplifier for a magnetic bearing assembly

Magnetic bearing device and vacuum pump

Centrifugal compressor and magnetic bearing backup system for centr...

Roller module with magnetic bearings and permanent magnets

Magnetic bearing control device and vacuum pump

Vacuum pump and abnormality cause estimating method for vacuum pump

Vibration control method and system

Center error value of bearings measuring method

Active magnetic bearing control for downhole-type system

Balancing method for balancing at high speed a rotor of a rotary ma...

Discharge excitation gas laser apparatus

System and method for a synchronized driver circuit

Patents Applicationslast 30 patents

Combined Axial/Radial Magnetic Bearing

MAGNETIC BEARING MODULE HAVING A MAGNETIC BEARING

DEVICE FOR CONTROLLING A MAGNETIC BEARING AND ASSOCIATED SYSTEM

A CAPACITIVE SENSOR DEVICE AND A MAGNETIC BEARING ASSEMBLY WITH SUC...

A CONTROL SYSTEM FOR CONTROLLING A MAGNETIC SUSPENSION SYSTEM

STIFFNESS GAIN MECHANISM FOR MAGNETIC SUSPENSION BEARING, MAGNETIC...

MAGNETIC LEVITATION BEARING STRUCTURE AND MAGNETIC LEVITATION COMPR...

SYSTEM FOR COMPENSATING FOR THE STRESSES APPLIED TO A BEARING SUPPO...

MAGNETICALLY COUPLED FLYWHEEL

VACUUM PUMP AND CONTROLLER

VACUUM PUMP, MAGNETIC BEARING DEVICE, AND ROTOR

VACUUM PUMP, AND MAGNETIC BEARING PORTION AND SHAFT PROVIDED IN VAC...

Control Device for Magnetic Bearing and Control Method

BALANCED SWITCHING AMPLIFIER FOR A MAGNETIC BEARING ASSEMBLY

MAGNETICALLY COUPLED FLYWHEEL

MAGNETIC BEARING DEVICE AND FLUID MACHINE SYSTEM USING SAME

RESONANCE VIBRATION CONTROL METHOD AND SYSTEM

MAGNETIC BEARING CONTROL APPARATUS, CONTROL METHOD AND HIGH SPEED R...

MAGNETIC BEARING CONTROL DEVICE AND VACUUM PUMP

ELECTROMAGNETIC UNIT, MAGNETIC BEARING DEVICE, AND VACUUM PUMP

VACUUM PUMP, AND ROTOR BLADE AND REFLECTION MECHANISM MOUNTED IN VA...

MAGNETICALLY STABILIZED PROPSHAFT BEARING SYSTEM

MAGNETIC BEARING DEVICE AND VACUUM PUMP

ACTIVE RADIAL MAGNETIC BEARING PHASED ARRAY

TURBOMACHINE WITH ACTIVE MAGNETIC BEARINGS

CENTER ERROR VALUE OF BEARINGS MEASURING METHOD

COMPENSATION WINDINGS FOR MAGNETIC BEARINGS

DISCHARGE EXCITATION GAS LASER APPARATUS

NON-CANTILEVERED MAGNETIC BEARING FOR DRUM-SHAPED VERTICAL ROTORS

VACUUM PUMP AND ABNORMALITY CAUSE ESTIMATING METHOD FOR VACUUM PUMP