Differential etching apparatus having a vertical tube reactor

Industry

CPC
Y10S156/912

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S156/00Adhesive bonding and miscellaneous chemical manufacture

Current Industry

Y10S156/912Differential etching apparatus having a vertical tube reactor

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vacuum plate having a symmetrical air-load block
- Patent number 6,887,315
- Issue date May 3, 2005
- Jusung Engineering Co., Ltd
- Yu-Dong Lim
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Method for plasma hardening photoresist in etching of semiconductor...
- Patent number 6,660,646
- Issue date Dec 9, 2003
- Northrop Grumman Corporation
- Raffi N. Elmadjian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive plasma reactor
- Patent number 6,551,447
- Issue date Apr 22, 2003
- Mattson Technology, Inc.
- Stephen E. Savas
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Substrate processing apparatus and substrate processing method
- Patent number 6,251,189
- Issue date Jun 26, 2001
- Kokusai Electric Co., Ltd.
- Shigeru Odake
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment system using ring-shaped radiation heater elements
- Patent number 6,228,174
- Issue date May 8, 2001
- Ichiro Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductive plasma reactor
- Patent number 6,143,129
- Issue date Nov 7, 2000
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of stripping a wafer of its film with gas injected into a CV...
- Patent number 6,015,758
- Issue date Jan 18, 2000
- Samsung Electronics Co., Ltd.
- Joong-il An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive plasma reactor
- Patent number 5,811,022
- Issue date Sep 22, 1998
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus etching tunnel-type
- Patent number 5,383,984
- Issue date Jan 24, 1995
- Tokyo Electron Limited
- Yutaka Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coaxial plasma processing apparatus
- Patent number 5,364,488
- Issue date Nov 15, 1994
- Tokyo Ohka Kogyo Co., Ltd.
- Mitsuaki Minato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer process tube apparatus and method for vertical furnaces
- Patent number 5,318,632
- Issue date Jun 7, 1994
- Kawasaki Steel Corporation
- Kiyoshi Onodera
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Information Patent Grant
Plasma-process system with batch scheme
- Patent number 5,284,547
- Issue date Feb 8, 1994
- Tokyo Electron Limited
- Masahide Watanabe
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Vertical heat-treating apparatus
- Patent number 5,234,528
- Issue date Aug 10, 1993
- Tokyo Electron Sagami Limited
- Hironobu Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 5,224,999
- Issue date Jul 6, 1993
- Tokyo Electron Kabushiki Kaisha
- Hirotsugu Shiraiwa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical type processing apparatus
- Patent number 5,217,560
- Issue date Jun 8, 1993
- Tokyo Electron Limited
- Yoichi Kurono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing semiconductor devices
- Patent number 5,169,478
- Issue date Dec 8, 1992
- Friendtech Laboratory, Ltd.
- Hidekazu Miyamoto
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Information Patent Grant
Tube and injector for preheating gases in a chemical vapor depositi...
- Patent number 5,146,869
- Issue date Sep 15, 1992
- National Semiconductor Corporation
- Kenneth W. Bohannon
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Information Patent Grant
Apparatus for treatment using gas
- Patent number 5,016,567
- Issue date May 21, 1991
- Tel Sagami Limited
- Katsuhiko Iwabuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for reaction treatment
- Patent number 4,989,540
- Issue date Feb 5, 1991
- Tel Sagami Limited
- Noboru Fuse
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Information Patent Grant
Automatic plasma processing device and heat treatment device
- Patent number 4,550,239
- Issue date Oct 29, 1985
- Tokyo Denshi Kagaku Kabushiki Kaisha
- Akira Uehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic plasma processing device and heat treatment device for ba...
- Patent number 4,550,242
- Issue date Oct 29, 1985
- Tokyo Denshi Kagaku Kabushiki Kaisha
- Akira Uehara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Vacuum plate having a symmetrical air-load block
- Publication number 20030000472
- Publication date Jan 2, 2003
- Yu-Dong Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Differential etching apparatus having a vertical tube reactor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum plate having a symmetrical air-load block

Method for plasma hardening photoresist in etching of semiconductor...

Inductive plasma reactor

Substrate processing apparatus and substrate processing method

Heat treatment system using ring-shaped radiation heater elements

Inductive plasma reactor

Method of stripping a wafer of its film with gas injected into a CV...

Inductive plasma reactor

Plasma processing apparatus etching tunnel-type

Coaxial plasma processing apparatus

Wafer process tube apparatus and method for vertical furnaces

Plasma-process system with batch scheme

Vertical heat-treating apparatus

Heat treatment apparatus

Vertical type processing apparatus

Apparatus for manufacturing semiconductor devices

Tube and injector for preheating gases in a chemical vapor depositi...

Apparatus for treatment using gas

Apparatus for reaction treatment

Automatic plasma processing device and heat treatment device

Automatic plasma processing device and heat treatment device for ba...

Patents Applicationslast 30 patents

Vacuum plate having a symmetrical air-load block