Etching a substrate: processes

Industry

US Classification
216

US Patent Classification (USPC) is no longer used by USPTO since June 2015. Please refer to similar CPC classifications / industries.

Current Industry

216Etching a substrate: processes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for producing an antireflection coating
- Patent number 9,039,906
- Issue date May 26, 2015
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Ulrike Schulz
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods for improving integrated photonic device uniformity
- Patent number 9,039,907
- Issue date May 26, 2015
- IMEC
- Philippe Absil
- G01 - MEASURING TESTING
Information Patent Grant
Plasma-enhanced etching in an augmented plasma processing system
- Patent number 9,039,911
- Issue date May 26, 2015
- Lam Research Corporation
- Eric A. Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing composition for nickel-phosphorous-coated memory disks
- Patent number 9,039,914
- Issue date May 26, 2015
- Cabot Microelectronics Corporation
- Selvaraj Palanisamy Chinnathambi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
In situ oxide removal, dispersal and drying for copper copper-oxide
- Patent number 9,039,916
- Issue date May 26, 2015
- SDCmaterials, Inc.
- Stephen Edward Lehman
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Capacitive transparent conductive film and preparation method thereof
- Patent number 9,040,833
- Issue date May 26, 2015
- Nanchang O-Film Tech Co., Ltd.
- Yulong Gao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Axiocentric scrubbing land grid array contacts and methods for fabr...
- Patent number 9,040,841
- Issue date May 26, 2015
- International Business Machines Corporation
- Gareth Hougham
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Photonic monitoring for optical signals
- Patent number 9,042,685
- Issue date May 26, 2015
- The University of Sydney
- Trung Duc Vo
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 9,039,863
- Issue date May 26, 2015
- Tokyo Electron Limited
- Shuhei Matsumoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of forming a lighting system
- Patent number 9,039,905
- Issue date May 26, 2015
- 3M Innovative Properties Company
- Andrew J. Ouderkirk
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Post etch reactive plasma milling to smooth through substrate via s...
- Patent number 9,039,908
- Issue date May 26, 2015
- Applied Materials, Inc.
- Jon Farr
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Formation of metal nanospheres and microspheres
- Patent number 9,040,428
- Issue date May 26, 2015
- International Business Machines Corporation
- Augustin J. Hong
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of plasma etching
- Patent number 9,040,427
- Issue date May 26, 2015
- SPTS Technologies Limited
- Huma Ashraf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing silicon wafer
- Patent number 9,040,431
- Issue date May 26, 2015
- Canon Kabushiki Kaisha
- Hirohisa Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling photoresist line width roughness
- Patent number 9,039,910
- Issue date May 26, 2015
- Applied Materials, Inc.
- Banqiu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for texturing DLC coatings, and textured DLC coatings thus o...
- Patent number 9,040,141
- Issue date May 26, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Caroline Chouquet
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Batch-type remote plasma processing apparatus
- Patent number 9,039,912
- Issue date May 26, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching solution compositions for metal laminate films
- Patent number 9,039,915
- Issue date May 26, 2015
- Kanto Kagaku Kabushiki Kaisha
- Kenji Kuroiwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Legend highlighting
- Patent number 9,041,563
- Issue date May 26, 2015
- Apple Inc.
- Peter H. Mahowald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method, semiconductor device manufacturing method an...
- Patent number 9,039,909
- Issue date May 26, 2015
- Tokyo Electron Limited
- Akira Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,039,913
- Issue date May 26, 2015
- Tokyo Electron Limited
- Kazuto Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for manufacturing components from articles formed by additi...
- Patent number 9,039,917
- Issue date May 26, 2015
- Honeywell International Inc.
- Andy Szuromi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing slurry composition
- Patent number 9,039,925
- Issue date May 26, 2015
- Uwiz Technology Co., Ltd.
- Wei-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method
- Patent number 9,034,772
- Issue date May 19, 2015
- Tokyo Electron Limited
- Koji Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for separately processing regions on a patterned medium
- Patent number 9,034,197
- Issue date May 19, 2015
- HGST Netherlands B.V.
- Jeffrey S. Lille
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reader fabrication method employing developable bottom anti-reflect...
- Patent number 9,034,564
- Issue date May 19, 2015
- Western Digital (Fremont), LLC
- Wei Gao
- G11 - INFORMATION STORAGE
Information Patent Grant
Differential silicon oxide etch
- Patent number 9,034,770
- Issue date May 19, 2015
- Applied Materials, Inc.
- Seung H. Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film forming apparatus and thin film forming method using the...
- Patent number 9,034,141
- Issue date May 19, 2015
- Samsung Display Co., Ltd.
- Sung-Joong Joo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching of diamond surfaces
- Patent number 9,034,200
- Issue date May 19, 2015
- Element Six Limited Technologies Limited
- Chee-Leong Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wet-chemical systems and methods for producing black silicon substr...
- Patent number 9,034,216
- Issue date May 19, 2015
- Alliance for Sustainable Energy, LLC
- Vernon Yost
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
ANODE ACTIVE MATERIAL AND A LITHIUM SECONDARY BATTERY INCLUDING THE...
- Publication number 20150147649
- Publication date May 28, 2015
- Samsung Electronics Co., Ltd.
- Hee-chul JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOUCH PANEL AND MANUFACTURING METHOD OF THE SAME
- Publication number 20150145807
- Publication date May 28, 2015
- Eturbotouch Technology Inc.
- KUEI-CHING WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FADE-RESISTANT HIGH CAPACITY ELECTRODES FOR A LITHIUM-ION BATTERY
- Publication number 20150144494
- Publication date May 28, 2015
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Mark W. Verbrugge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING COMPOSITION AND METHOD FOR PRODUCING PRINTED-WIRING BOARD U...
- Publication number 20150144591
- Publication date May 28, 2015
- Mitsubishi Gas Chemical Company, Inc.
- Kenichi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING MAGNETIC HEAD
- Publication number 20150144592
- Publication date May 28, 2015
- Kabushiki Kaisha Toshiba
- Hitoshi IWASAKI
- G11 - INFORMATION STORAGE
Information Patent Application
HYDROPHOBIC AND OLEOPHOBIC COATINGS
- Publication number 20150147523
- Publication date May 28, 2015
- BAKER HUGHES INCORPORATED
- Deepak Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ENHANCING GROWTH OF CARBON NANOTUBES ON SUBSTRATES
- Publication number 20150147525
- Publication date May 28, 2015
- Government of the United States as Represented by the Secretary of the Air Force
- Benji Maruyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF LIGHT BARRIER GLASS SHEET
- Publication number 20150144589
- Publication date May 28, 2015
- BOE TECHNOLOGY GROUP CO., LTD.
- Zheng Liu
- G02 - OPTICS
Information Patent Application
Process For Improving The Electrical And Optical Performance Of A T...
- Publication number 20150144590
- Publication date May 28, 2015
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jean-Pierre Simonato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING ION ENERGY DISTRIBUTION
- Publication number 20150144596
- Publication date May 28, 2015
- Advanced Energy Industries, Inc.
- Victor Brouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to Fabricate Functionalized Conical Nanopores
- Publication number 20150148436
- Publication date May 28, 2015
- SANDIA CORPORATION
- Leo J. Small
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CAPACITIVE TOUCH PANEL, DISPLAY DEVICE AND METHOD FOR MANUFACTURING...
- Publication number 20150145811
- Publication date May 28, 2015
- BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jiaxiang Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING ADHESIVES BETWEEN SUBSTRATES AND CARRIERS
- Publication number 20150145908
- Publication date May 28, 2015
- Hewlett-Packard Development Company, L.P.
- Rio Rivas
- B32 - LAYERED PRODUCTS
Information Patent Application
Voltage Tunability of Thermal Conductivity in Ferroelectric Materials
- Publication number 20150144588
- Publication date May 28, 2015
- SANDIA CORPORATION
- Jon Ihlefeld
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20150144594
- Publication date May 28, 2015
- Hitachi High-Technologies Corporation
- Shunsuke Kanazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER IRRADIATION MECHANISM, SUBSTRATE PROCESSING APPARATUS U...
- Publication number 20150144595
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Kensuke Inai
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR POLISHING AND STRENGTHENING SUBSTRATE
- Publication number 20150144593
- Publication date May 28, 2015
- SAMSUNG DISPLAY CO., LTD.
- Joo Woan Cho
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
METHOD OF PATTERNING A BIORESORBABLE MATERIAL
- Publication number 20150140289
- Publication date May 21, 2015
- Bioflex Devices
- Marc FERRO
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
FINE WIRING PATTERN, MANUFACTURING METHOD THEREOF, AND THERMAL PRIN...
- Publication number 20150138298
- Publication date May 21, 2015
- Rohm Co., Ltd.
- Shinobu Obata
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
TOUCH PANEL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20150136450
- Publication date May 21, 2015
- Samsung Electro-Mechanics Co., Ltd.
- Sung HAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VAPOR PHASE CHEMICAL MECHANICAL POLISHING OF MAGNETIC RECORDING DISKS
- Publication number 20150136730
- Publication date May 21, 2015
- HGST NETHERLANDS B.V.
- Thomas E. Karis
- G11 - INFORMATION STORAGE
Information Patent Application
SOLID BODY JOINING OF A CARRIER BODY AND A COVER LAYER, PARTICULARL...
- Publication number 20150140276
- Publication date May 21, 2015
- Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Carsten PAMPUCH
- B32 - LAYERED PRODUCTS
Information Patent Application
PRINTED CIRCUIT BOARD AND METHOD OF MANUFACTURING THE SAME
- Publication number 20150136458
- Publication date May 21, 2015
- Samsung Electro-Mechanics Co., Ltd.
- Eun Ju Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FIBER CONNECTOR, METHOD FOR MANUFACTURING OPTICAL FIBER CON...
- Publication number 20150139589
- Publication date May 21, 2015
- Hitachi Chemical Company, Ltd.
- Daichi Sakai
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING A MAGNETIC TAPE HEAD USING AN INK MASK FOR...
- Publication number 20150138673
- Publication date May 21, 2015
- HGST NETHERLANDS B.V.
- Que Adrong
- G11 - INFORMATION STORAGE
Information Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
- Publication number 20150136735
- Publication date May 21, 2015
- PANASONIC CORPORATION
- TOMOHIRO OKUMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLURRY, POLISHING-SOLUTION SET, POLISHING SOLUTION, SUBSTRATE POLIS...
- Publication number 20150139885
- Publication date May 21, 2015
- Hitachi Chemical Company, Ltd.
- Tomohiro Iwano
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ACTIVE-SOURCE-PIXEL, INTEGRATED DEVICE FOR RAPID ANALYSIS OF BIOLOG...
- Publication number 20150141268
- Publication date May 21, 2015
- Quantum-Si Incorporated
- Jonathan M. Rothberg
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
MAGNETIC FIELD SENSING MODULE, MEASUREMENT METHOD, AND MANUFACTURIN...
- Publication number 20150137804
- Publication date May 21, 2015
- iSentek, Inc.
- Fu-Te Yuan
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCIN...
- Publication number 20150136729
- Publication date May 21, 2015
- BROTHER KOGYO KABUSHIKI KAISHA
- Hiroto Sugahara
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Etching a substrate: processes

Industry

Current Industry

Patents Grantslast 30 patents

Method for producing an antireflection coating

Methods for improving integrated photonic device uniformity

Plasma-enhanced etching in an augmented plasma processing system

Polishing composition for nickel-phosphorous-coated memory disks

In situ oxide removal, dispersal and drying for copper copper-oxide

Capacitive transparent conductive film and preparation method thereof

Axiocentric scrubbing land grid array contacts and methods for fabr...

Photonic monitoring for optical signals

Substrate processing apparatus, substrate processing method, and co...

Method of forming a lighting system

Post etch reactive plasma milling to smooth through substrate via s...

Formation of metal nanospheres and microspheres

Method of plasma etching

Method for processing silicon wafer

Methods and apparatus for controlling photoresist line width roughness

Method for texturing DLC coatings, and textured DLC coatings thus o...

Batch-type remote plasma processing apparatus

Etching solution compositions for metal laminate films

Legend highlighting

Plasma etching method, semiconductor device manufacturing method an...

Semiconductor device manufacturing method

Methods for manufacturing components from articles formed by additi...

Polishing slurry composition

Etching method

Method for separately processing regions on a patterned medium

Reader fabrication method employing developable bottom anti-reflect...

Differential silicon oxide etch

Thin film forming apparatus and thin film forming method using the...

Plasma etching of diamond surfaces

Wet-chemical systems and methods for producing black silicon substr...

Patents Applicationslast 30 patents

ANODE ACTIVE MATERIAL AND A LITHIUM SECONDARY BATTERY INCLUDING THE...

TOUCH PANEL AND MANUFACTURING METHOD OF THE SAME

FADE-RESISTANT HIGH CAPACITY ELECTRODES FOR A LITHIUM-ION BATTERY

ETCHING COMPOSITION AND METHOD FOR PRODUCING PRINTED-WIRING BOARD U...

METHOD FOR MANUFACTURING MAGNETIC HEAD

HYDROPHOBIC AND OLEOPHOBIC COATINGS

METHOD FOR ENHANCING GROWTH OF CARBON NANOTUBES ON SUBSTRATES

MANUFACTURING METHOD OF LIGHT BARRIER GLASS SHEET

Process For Improving The Electrical And Optical Performance Of A T...

METHOD FOR CONTROLLING ION ENERGY DISTRIBUTION

Method to Fabricate Functionalized Conical Nanopores

CAPACITIVE TOUCH PANEL, DISPLAY DEVICE AND METHOD FOR MANUFACTURING...

CONTROLLING ADHESIVES BETWEEN SUBSTRATES AND CARRIERS

Voltage Tunability of Thermal Conductivity in Ferroelectric Materials

Plasma Processing Apparatus and Plasma Processing Method

GAS CLUSTER IRRADIATION MECHANISM, SUBSTRATE PROCESSING APPARATUS U...

APPARATUS AND METHOD FOR POLISHING AND STRENGTHENING SUBSTRATE

METHOD OF PATTERNING A BIORESORBABLE MATERIAL

FINE WIRING PATTERN, MANUFACTURING METHOD THEREOF, AND THERMAL PRIN...

TOUCH PANEL AND METHOD OF MANUFACTURING THE SAME

VAPOR PHASE CHEMICAL MECHANICAL POLISHING OF MAGNETIC RECORDING DISKS

SOLID BODY JOINING OF A CARRIER BODY AND A COVER LAYER, PARTICULARL...

PRINTED CIRCUIT BOARD AND METHOD OF MANUFACTURING THE SAME

OPTICAL FIBER CONNECTOR, METHOD FOR MANUFACTURING OPTICAL FIBER CON...

METHOD FOR MANUFACTURING A MAGNETIC TAPE HEAD USING AN INK MASK FOR...

PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD

SLURRY, POLISHING-SOLUTION SET, POLISHING SOLUTION, SUBSTRATE POLIS...

ACTIVE-SOURCE-PIXEL, INTEGRATED DEVICE FOR RAPID ANALYSIS OF BIOLOG...

MAGNETIC FIELD SENSING MODULE, MEASUREMENT METHOD, AND MANUFACTURIN...

METHOD FOR PRODUCING PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCIN...