Fiber optic interferometer

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CPC
G05B2219/37287

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Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/37287Fiber optic interferometer

Industries

Patents Grantslast 30 patents

Information Patent Grant
Positioning apparatus, exposure apparatus and device manufacturing...
- Patent number 7,907,287
- Issue date Mar 15, 2011
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
POSITIONING APPARATUS
- Publication number 20080098813
- Publication date May 1, 2008
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING