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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, management device, and display method...
- Patent number 9,823,652
- Issue date Nov 21, 2017
- Hitachi Kokusai Electric Inc.
- Kazuyoshi Yamamoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Industrial equipment operating status scanner
- Patent number 5,586,057
- Issue date Dec 17, 1996
- Baldev Patel
- G07 - CHECKING-DEVICES

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, MANAGEMENT DEVICE, AND DISPLAY METHOD
- Publication number 20150039116
- Publication date Feb 5, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyoshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS