flowing to or from the sealing gap

Patents Grantslast 30 patents

  • Information Patent Grant

    Air bearing for use as seal

    • Patent number 12,044,272
    • Issue date Jul 23, 2024
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic dissipative externally pressurized porous bearings

    • Patent number 11,781,593
    • Issue date Oct 10, 2023
    • New Way Machine Components, Inc.
    • Joshua A. Schaffstall
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Externally pressurized oil-free freon bearing

    • Patent number 11,619,263
    • Issue date Apr 4, 2023
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Journal Device and rotary machine

    • Patent number 11,143,242
    • Issue date Oct 12, 2021
    • MITSUBISHI POWER, LTD.
    • Tanehiro Shinohara
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Air bearing for use as seal

    • Patent number 10,598,222
    • Issue date Mar 24, 2020
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Centrifugal compressor with seal bearing

    • Patent number 10,533,568
    • Issue date Jan 14, 2020
    • Daikin Applied Americas Inc.
    • Vladislav Goldenberg
    • F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
  • Information Patent Grant

    Centrifugal compressor

    • Patent number 10,514,041
    • Issue date Dec 24, 2019
    • Kabushiki Kaisha Toyota Jidoshokki
    • Toshiro Fujii
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Apparatus and method for controlling a pressure differential across...

    • Patent number 10,502,141
    • Issue date Dec 10, 2019
    • Pratt & Whitney Canada Corp.
    • Adam Logan
    • F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
  • Information Patent Grant

    Method and a device for depositing a film of material or otherwise...

    • Patent number 10,501,850
    • Issue date Dec 10, 2019
    • New Way Machine Components, Inc.
    • Andrew J. Devitt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Membrane restrictor and hydrostatic bearing module

    • Patent number 10,054,161
    • Issue date Aug 21, 2018
    • National Tsing Hua University
    • Ta-Hua Lai
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Air bearing for use as seal

    • Patent number 9,441,668
    • Issue date Sep 13, 2016
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Gas bearing assembly for an EUV light source

    • Patent number 9,422,978
    • Issue date Aug 23, 2016
    • KLA-Tencor Corporation
    • Francis C. Chilese
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Sliding parts

    • Patent number 9,322,436
    • Issue date Apr 26, 2016
    • Eagle Industry Co., Ltd.
    • Yuichiro Tokunaga
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Air bearing for use as a seal

    • Patent number 8,753,014
    • Issue date Jun 17, 2014
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Method and apparatus for in-line processing and immediately sequent...

    • Patent number 8,123,868
    • Issue date Feb 28, 2012
    • New Way Machine Components, Inc.
    • Andrew J. Devitt
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Positioning apparatus

    • Patent number 8,021,485
    • Issue date Sep 20, 2011
    • NSK Ltd.
    • Tsuyoshi Nakamura
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Hydrostatic bearing and stage apparatus

    • Patent number 7,946,767
    • Issue date May 24, 2011
    • Sumitomo Heavy Industries, Ltd.
    • Ryuta Nakajima
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Moving vacuum chamber stage with air bearing and differentially pum...

    • Patent number 7,394,076
    • Issue date Jul 1, 2008
    • New Way Machine Components, Inc.
    • Andrew J. Devitt
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Exhaust apparatus and control method for same, and vacuum-use hydro...

    • Patent number 7,284,906
    • Issue date Oct 23, 2007
    • Canon Kabushiki Kaisha
    • Keiji Emoto
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Static gas bearing system, stage mechanism, exposure apparatus, and...

    • Patent number 7,207,720
    • Issue date Apr 24, 2007
    • Canon Kabushiki Kaisha
    • Choshoku Sai
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Hydrostatic gas bearing, hydrostatic gas bearing device for use in...

    • Patent number 7,189,002
    • Issue date Mar 13, 2007
    • Toto Ltd.
    • Shinji Shinohara
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Alignment apparatus and exposure apparatus

    • Patent number 7,154,588
    • Issue date Dec 26, 2006
    • Canon Kabushiki Kaisha
    • Keiji Emoto
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Differential pumping seal apparatus

    • Patent number 7,134,668
    • Issue date Nov 14, 2006
    • Ebara Corporation
    • Hiroyuki Shinozaki
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Chamber, exposure apparatus, and device manufacturing method

    • Patent number 7,078,706
    • Issue date Jul 18, 2006
    • Canon Kabushiki Kaisha
    • Eiji Sakamoto
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Positioning apparatus

    • Patent number 7,059,607
    • Issue date Jun 13, 2006
    • NSK Ltd.
    • Tsuyoshi Nakamura
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Alignment apparatus and exposure apparatus

    • Patent number 7,053,982
    • Issue date May 30, 2006
    • Canon Kabushiki Kaisha
    • Keiji Emoto
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Hydrostatic gas bearing, hydrostatic gas bearing device for use in...

    • Patent number 7,052,182
    • Issue date May 30, 2006
    • Toto Ltd.
    • Shinji Shinohara
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Positioning apparatus

    • Patent number 6,954,009
    • Issue date Oct 11, 2005
    • NSK Ltd.
    • Tsuyoshi Nakamura
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Positioning device

    • Patent number 6,888,619
    • Issue date May 3, 2005
    • David Trost
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Gas bearings for use with vacuum chambers and their application in...

    • Patent number 6,844,922
    • Issue date Jan 18, 2005
    • ASML Netherlands B.V.
    • Theodorus H. J. Bisschops
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

  • Information Patent Application

    DUSTPROOF SEAL STRUCTURE

    • Publication number 20240063680
    • Publication date Feb 22, 2024
    • Mitutoyo Corporation
    • Hisayoshi Sakai
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    BEARING ARRANGEMENT FOR A SHAFT IN A TURBOCOMPRESSOR

    • Publication number 20230113619
    • Publication date Apr 13, 2023
    • ROBERT BOSCH GmbH
    • Jochen Wessner
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    ELECTROSTATIC DISSIPATIVE EXTERNALLY PRESSURIZED POROUS BEARINGS

    • Publication number 20230069184
    • Publication date Mar 2, 2023
    • New Way Machine Components, Inc.
    • Joshua A. SCHAFFSTALL
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    AIR BEARING FOR USE AS SEAL

    • Publication number 20210254663
    • Publication date Aug 19, 2021
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    AIR BEARING FOR USE AS SEAL

    • Publication number 20200347881
    • Publication date Nov 5, 2020
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    JOURNAL DEVICE AND ROTARY MACHINE

    • Publication number 20190032718
    • Publication date Jan 31, 2019
    • MITSUBISHI HITACHI POWER SYSTEMS, LTD.
    • Tanehiro SHINOHARA
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    APPARATUS AND METHOD FOR CONTROLLING A PRESSURE DIFFERENTIAL ACROSS...

    • Publication number 20180252163
    • Publication date Sep 6, 2018
    • Pratt & Whitney Canada Corp.
    • Adam LOGAN
    • F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
  • Information Patent Application

    CENTRIFUGAL COMPRESSOR

    • Publication number 20180209435
    • Publication date Jul 26, 2018
    • Kabushiki Kaisha Toyota Jidoshokki
    • Toshiro Fujii
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM DOUBLE STRUCTURE AND HEAT TREAT FURNACE

    • Publication number 20180135757
    • Publication date May 17, 2018
    • Toyota Jidosha Kabushiki Kaisha
    • Osamu YAMASHITA
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Application

    SLIDING PARTS

    • Publication number 20150377297
    • Publication date Dec 31, 2015
    • EAGLE INDUSTRY CO., LTD.
    • Yuichiro TOKUNAGA
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    GAS BEARING ASSEMBLY FOR AN EUV LIGHT SOURCE

    • Publication number 20140376842
    • Publication date Dec 25, 2014
    • Francis C. Chilese
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    AIR BEARING FOR USE AS SEAL

    • Publication number 20140294329
    • Publication date Oct 2, 2014
    • New Way Machine Components, Inc.
    • Andrew DEVITT
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    AIR BEARING FOR USE AS SEAL

    • Publication number 20140286599
    • Publication date Sep 25, 2014
    • New Way Machine Components, Inc.
    • Andrew Devitt
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    AIR BEARING FOR USE AS SEAL

    • Publication number 20130188895
    • Publication date Jul 25, 2013
    • New Way Machine Components, Inc.
    • Andrew DEVITT
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    METHOD AND APPARATUS FOR IN-LINE PROCESSING AND IMMEDIATELY SEQUENT...

    • Publication number 20100282271
    • Publication date Nov 11, 2010
    • New Way Machine Components, Inc.
    • Andrew J. DEVITT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVIC...

    • Publication number 20100092113
    • Publication date Apr 15, 2010
    • KYOCERA CORPORATION
    • Takeshi Muneishi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    Hydrostatic Slider

    • Publication number 20090297075
    • Publication date Dec 3, 2009
    • KYOCERA CORPORATION
    • Takeshi Muneishi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    HYDROSTATIC BEARING AND STAGE APPARATUS

    • Publication number 20090016651
    • Publication date Jan 15, 2009
    • RYUTA NAKAJIMA
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    Method and apparatus for in-line processing and immediately sequent...

    • Publication number 20070034228
    • Publication date Feb 15, 2007
    • Andrew J. Devitt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and a device for depositing a film of material or otherwise...

    • Publication number 20070031600
    • Publication date Feb 8, 2007
    • Andrew J. Devitt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Alignment apparatus and exposure apparatus

    • Publication number 20060187437
    • Publication date Aug 24, 2006
    • Canon Kabushiki Kaisha
    • Keiji Emoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Dust-proof linear bearing structure

    • Publication number 20060182373
    • Publication date Aug 17, 2006
    • FANUC LTD.
    • Tomohiko Kawai
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    Hydrostatic gas bearing, hydrostatic gas bearing device for use in...

    • Publication number 20060093244
    • Publication date May 4, 2006
    • Shinji Shinohara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Positioning apparatus

    • Publication number 20060061042
    • Publication date Mar 23, 2006
    • NSK Ltd
    • Tsuyoshi Nakamura
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Moving vacuum chamber stage with air bearing and differentially pum...

    • Publication number 20060060259
    • Publication date Mar 23, 2006
    • Andrew J. Devitt
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    Static gas bearing system, stage mechanism, exposure apparatus, and...

    • Publication number 20050129339
    • Publication date Jun 16, 2005
    • Canon Kabushiki Kaisha
    • Choshoku Sai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Chamber, exposure apparatus, and device manufacturing method

    • Publication number 20050011581
    • Publication date Jan 20, 2005
    • Eiji Sakamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Stage apparatus, static pressure bearing apparatus, positioning met...

    • Publication number 20050002012
    • Publication date Jan 6, 2005
    • Canon Kabushiki Kaisha
    • Shigeo Sakino
    • G11 - INFORMATION STORAGE
  • Information Patent Application

    Alignment apparatus and exposure apparatus

    • Publication number 20040246455
    • Publication date Dec 9, 2004
    • Canon Kabushiki Kaisha
    • Keiji Emoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Positioning device

    • Publication number 20040234361
    • Publication date Nov 25, 2004
    • NSK Ltd
    • Tsuyoshi Nakamura
    • H01 - BASIC ELECTRIC ELEMENTS