Fluid-cooled mirrors

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CPC
G02B7/195

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Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

Current Industry

G02B7/195Fluid-cooled mirrors

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Patents Grantslast 30 patents

Information Patent Grant
Lightweight adaptive metal cooled mirrors
- Patent number 10,359,603
- Issue date Jul 23, 2019
- The Board of Trustees of the University of Alabama, for and on behalf of the...
- Patrick Reardon
- G02 - OPTICS
Information Patent Grant
Mirror with a mirror carrier and projection exposure apparatus
- Patent number 8,831,170
- Issue date Sep 9, 2014
- Carl Zeiss SMT GmbH
- Rutger Wevers
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20220299733
- Publication date Sep 22, 2022
- Carl Zeiss SMT GMBH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR WITH A MIRROR CARRIER AND PROJECTION EXPOSURE APPARATUS
- Publication number 20080144202
- Publication date Jun 19, 2008
- Carl Zeiss SMT AG
- Rutger Wevers
- G02 - OPTICS