For cancelling magnetic field leakage generated by

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CPC
G05B2219/41297

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/41297For cancelling magnetic field leakage generated by

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Patents Grantslast 30 patents

Information Patent Grant
Stage apparatus and its driving method, exposure apparatus and devi...
- Patent number 6,903,807
- Issue date Jun 7, 2005
- Canon Kabushiki Kaisha
- Shinji Uchida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Stage apparatus and its driving method, exposure apparatus and devi...
- Publication number 20040201834
- Publication date Oct 14, 2004
- Canon Kabushiki Kaisha
- Shinji Uchida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR