for etching refractory metals

Industry

CPC
C23F1/38

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 C23F1/00Etching metallic material by chemical means

Current Industry

C23F1/38for etching refractory metals

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Superhydrophilic thick-film pH sensor based on chemical etching, an...
- Patent number 12,099,029
- Issue date Sep 24, 2024
- Jiangsu University
- Xiliang Zhang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Composition and method for creating nanoscale surface geometry on a...
- Patent number 11,952,523
- Issue date Apr 9, 2024
- Tech Met, Inc.
- Michael Vidra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing liquid for etching a metal layer, substrate pr...
- Patent number 11,908,938
- Issue date Feb 20, 2024
- SCREEN Holdings Co., Ltd.
- Dai Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for surface treatment of a bio-compatible metal material and...
- Patent number 11,883,556
- Issue date Jan 30, 2024
- SELENIUM MEDICAL
- Olivier Richart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical liquid and method for treating object to be treated
- Patent number 11,859,119
- Issue date Jan 2, 2024
- FUJIFILM Corporation
- Tomonori Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing ruthenium wiring
- Patent number 11,686,002
- Issue date Jun 27, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and composition for etching molybdenum
- Patent number 11,492,709
- Issue date Nov 8, 2022
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium etching composition and method
- Patent number 11,346,008
- Issue date May 31, 2022
- Entegris, Inc.
- Steven Lippy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for surface treatment of a biocompatible metal material and...
- Patent number 11,058,794
- Issue date Jul 13, 2021
- SELENIUM MEDICAL
- Olivier Richart
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Etching solution for tungsten and GST films
- Patent number 11,035,044
- Issue date Jun 15, 2021
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 10,916,430
- Issue date Feb 9, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution and method for etching titanium based materials
- Patent number 10,865,484
- Issue date Dec 15, 2020
- TECHNIC FRANCE
- Christian Pizzetti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nano-scale etching on an implant surface
- Patent number 10,765,494
- Issue date Sep 8, 2020
- Biomet 3i, LLC
- Robert L. Mayfield
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Selectively removing titanium nitride hard mask and etch residue re...
- Patent number 10,332,784
- Issue date Jun 25, 2019
- VERSUM MATERIALS US, LLC
- William Jack Casteel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective metal/metal oxide etch process
- Patent number 10,297,465
- Issue date May 21, 2019
- Sachem, Inc.
- Paul Vermeulen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nano-scale etching on an implant surface
- Patent number 10,182,887
- Issue date Jan 22, 2019
- Biomet 3i, LLC
- Robert L. Mayfield
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Removal composition for selectively removing hard mask and methods...
- Patent number 10,155,921
- Issue date Dec 18, 2018
- E I DUPONT NE NEMOURS AND COMPANY
- Hua Cui
- B08 - CLEANING
Information Patent Grant
Temperature sensor and method for producing same
- Patent number 10,113,919
- Issue date Oct 30, 2018
- Mitsubishi Materials Corporation
- Noriaki Nagatomo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Removal composition for selectively removing hard mask and methods...
- Patent number 10,005,991
- Issue date Jun 26, 2018
- EKC TECHNOLOGY INC
- Hua Cui
- B08 - CLEANING
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 9,881,818
- Issue date Jan 30, 2018
- Mitsubishi Electric Corporation
- Nobuaki Yamanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching agent, etching method and etching agent preparation liquid
- Patent number 9,845,538
- Issue date Dec 19, 2017
- Wako Pure Chemical Industries, Ltd.
- Takahiro Yokomizo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nano-scale etching on an implant surface
- Patent number 9,757,212
- Issue date Sep 12, 2017
- Biomet 3i, LLC
- Robert L. Mayfield
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Etching liquid for film of multilayer structure containing copper l...
- Patent number 9,580,818
- Issue date Feb 28, 2017
- Mitsubishi Gas Chemical Company, Inc.
- Satoshi Tamai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching technique for microfabrication substrates
- Patent number 9,493,877
- Issue date Nov 15, 2016
- Innovative Micro Technology
- John Harley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Titanium nano-scale etching on an implant surface
- Patent number 9,283,056
- Issue date Mar 15, 2016
- Biomet 3i, LLC
- Robert L. Mayfield
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Selective etching method
- Patent number 9,169,437
- Issue date Oct 27, 2015
- JCU CORPORATION
- Christopher Cordonier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment for an implant surface
- Patent number 9,131,995
- Issue date Sep 15, 2015
- Biomet 3i, LLC
- Robert L. Mayfield
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching composition and method of manufacturing a display substrate...
- Patent number 9,062,244
- Issue date Jun 23, 2015
- Samsung Display Co., Ltd.
- Hong-Sick Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the stripping of workpieces and stripping solution
- Patent number 9,057,134
- Issue date Jun 16, 2015
- Oerlikon Surface Solutions AG, Trubbach
- Tamara Andreoli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nano-scale etching on an implant surface
- Patent number 9,034,201
- Issue date May 19, 2015
- Biomet 3i, LLC
- Robert L. Mayfield
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITION AND METHOD FOR CREATING NANOSCALE SURFACE GEOMETRY ON A...
- Publication number 20240254390
- Publication date Aug 1, 2024
- Tech Met, Inc.
- Michael Vidra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING PLASMONIC-NANOSTRUCTURE SPECTRALLY SELECTIVE S...
- Publication number 20230168006
- Publication date Jun 1, 2023
- Northeastern University
- Yanpei Tian
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING TITANIUM-RESIN ASSEMBLY AND TITANIUM TREATMENT...
- Publication number 20230108887
- Publication date Apr 6, 2023
- PLASTAL CO., LTD.
- Mu Chang Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20230030323
- Publication date Feb 2, 2023
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OSTEOINDUCTIVE AND OSTEOCONDUCTIVE IMPLANT OR BIOACTIVE SCAFFOLD SU...
- Publication number 20230036561
- Publication date Feb 2, 2023
- Diego Pedreira DE OLIVEIRA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD FOR INHIBITING GENERATION OF RUTHENIUM-CONTAINING GAS FROM R...
- Publication number 20220033976
- Publication date Feb 3, 2022
- Tokuyama Corporation
- Tomoaki SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR CREATING NANOSCALE SURFACE GEOMETRY ON A...
- Publication number 20220017822
- Publication date Jan 20, 2022
- Tech Met, Inc.
- Michael Vidra
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CHEMICAL LIQUID AND METHOD FOR TREATING OBJECT TO BE TREATED
- Publication number 20220002622
- Publication date Jan 6, 2022
- FUJIFILM CORPORATION
- Tomonori TAKAHASHI
- B08 - CLEANING
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20210324525
- Publication date Oct 21, 2021
- Entegris, Inc.
- Atanu K. DAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACTANTS FOR ELECTRONICS PRODUCTS
- Publication number 20210292647
- Publication date Sep 23, 2021
- AdvanSix Resins & Chemicals LLC
- Edward Asirvatham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for surface treatment of a bio-compatible metal material and...
- Publication number 20210252187
- Publication date Aug 19, 2021
- SELENIUM MEDICAL
- Olivier RICHART
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE
- Publication number 20190274791
- Publication date Sep 12, 2019
- Biomet 3i, LLC
- Robert L. Mayfield
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS OF ETCHING A TUNGSTEN LAYER
- Publication number 20190198392
- Publication date Jun 27, 2019
- AMRITA B. MULLICK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLUTION AND METHOD FOR ETCHING TITANIUM BASED MATERIALS
- Publication number 20190127858
- Publication date May 2, 2019
- TECHNIC FRANCE
- Christian PIZZETTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching Solution For Tungsten And GST Films
- Publication number 20180209049
- Publication date Jul 26, 2018
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE PREPARATION OF A TOPOGRAPHY FOR IMPROVED PROTEIN AD...
- Publication number 20180153660
- Publication date Jun 7, 2018
- Straumann Holding AG
- Simon BERNER
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180025913
- Publication date Jan 25, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE
- Publication number 20170360532
- Publication date Dec 21, 2017
- Biomet 3i, LLC
- Robert L. Mayfield
- B82 - NANO-TECHNOLOGY
Information Patent Application
METAL-RESIN COMPOSITE AND METHOD OF PREPARING THE SAME AND SHELL OF...
- Publication number 20170282424
- Publication date Oct 5, 2017
- BYD COMPANY LIMITED
- XIAO ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170154798
- Publication date Jun 1, 2017
- Mitsubishi Electric Corporation
- Nobuaki YAMANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVAL COMPOSITION FOR SELECTIVELY REMOVING HARD MASK AND METHODS...
- Publication number 20160312162
- Publication date Oct 27, 2016
- E.I. du Pont de Nemours and Company
- Hua Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING AGENT, ETCHING METHOD AND ETCHING AGENT PREPARATION LIQUID
- Publication number 20160177457
- Publication date Jun 23, 2016
- WAKO PURE CHEMICAL INDUSTRIES, LTD.
- Takahiro YOKOMIZO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE SENSOR AND METHOD FOR PRODUCING SAME
- Publication number 20150071326
- Publication date Mar 12, 2015
- MITSUBISHI MATERIALS CORPORATION
- Noriaki Nagatomo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ETCHING METHOD
- Publication number 20150048053
- Publication date Feb 19, 2015
- JCU CORPORATION
- Christopher Cordonier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD INCLUDING A REMOVAL OF A HARDMASK FROM A SEMICONDUCTOR STRUC...
- Publication number 20140349479
- Publication date Nov 27, 2014
- Oliver Mieth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE
- Publication number 20140034606
- Publication date Feb 6, 2014
- Biomet 3i, LLC
- Robert L. Mayfield
- B82 - NANO-TECHNOLOGY
Information Patent Application
ETCHING AGENT, ETCHING METHOD AND LIQUID FOR PREPARING ETCHING AGENT
- Publication number 20130280916
- Publication date Oct 24, 2013
- Osamu Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT FOR AN IMPLANT SURFACE
- Publication number 20130248487
- Publication date Sep 26, 2013
- Biomet 3i, LLC
- Robert L. Mayfield
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING COMPOSITION AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE...
- Publication number 20130115727
- Publication date May 9, 2013
- DONGWOO FINE-CHEM CO., LTD.
- Hong-Sick Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING LIQUID FOR FILM OF MULTILAYER STRUCTURE CONTAINING COPPER L...
- Publication number 20130105729
- Publication date May 2, 2013
- Mitsubishi Gas Chemical Company, Inc.
- Satoshi Tamai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

for etching refractory metals

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Superhydrophilic thick-film pH sensor based on chemical etching, an...

Composition and method for creating nanoscale surface geometry on a...

Substrate processing liquid for etching a metal layer, substrate pr...

Method for surface treatment of a bio-compatible metal material and...

Chemical liquid and method for treating object to be treated

Method for manufacturing ruthenium wiring

Method and composition for etching molybdenum

Ruthenium etching composition and method

Method for surface treatment of a biocompatible metal material and...

Etching solution for tungsten and GST films

Semiconductor device and method for manufacturing the same

Solution and method for etching titanium based materials

Titanium nano-scale etching on an implant surface

Selectively removing titanium nitride hard mask and etch residue re...

Selective metal/metal oxide etch process

Titanium nano-scale etching on an implant surface

Removal composition for selectively removing hard mask and methods...

Temperature sensor and method for producing same

Removal composition for selectively removing hard mask and methods...

Method for manufacturing semiconductor device

Etching agent, etching method and etching agent preparation liquid

Titanium nano-scale etching on an implant surface

Etching liquid for film of multilayer structure containing copper l...

Etching technique for microfabrication substrates

Titanium nano-scale etching on an implant surface

Selective etching method

Surface treatment for an implant surface

Etching composition and method of manufacturing a display substrate...

Process for the stripping of workpieces and stripping solution

Titanium nano-scale etching on an implant surface

Patents Applicationslast 30 patents

COMPOSITION AND METHOD FOR CREATING NANOSCALE SURFACE GEOMETRY ON A...

METHOD FOR PRODUCING PLASMONIC-NANOSTRUCTURE SPECTRALLY SELECTIVE S...

METHOD FOR PREPARING TITANIUM-RESIN ASSEMBLY AND TITANIUM TREATMENT...

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

OSTEOINDUCTIVE AND OSTEOCONDUCTIVE IMPLANT OR BIOACTIVE SCAFFOLD SU...

METHOD FOR INHIBITING GENERATION OF RUTHENIUM-CONTAINING GAS FROM R...

COMPOSITION AND METHOD FOR CREATING NANOSCALE SURFACE GEOMETRY ON A...

CHEMICAL LIQUID AND METHOD FOR TREATING OBJECT TO BE TREATED

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

SURFACTANTS FOR ELECTRONICS PRODUCTS

Method for surface treatment of a bio-compatible metal material and...

TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE

METHODS OF ETCHING A TUNGSTEN LAYER

SOLUTION AND METHOD FOR ETCHING TITANIUM BASED MATERIALS

Etching Solution For Tungsten And GST Films

PROCESS FOR THE PREPARATION OF A TOPOGRAPHY FOR IMPROVED PROTEIN AD...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE

METAL-RESIN COMPOSITE AND METHOD OF PREPARING THE SAME AND SHELL OF...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

REMOVAL COMPOSITION FOR SELECTIVELY REMOVING HARD MASK AND METHODS...

ETCHING AGENT, ETCHING METHOD AND ETCHING AGENT PREPARATION LIQUID

TEMPERATURE SENSOR AND METHOD FOR PRODUCING SAME

SELECTIVE ETCHING METHOD

METHOD INCLUDING A REMOVAL OF A HARDMASK FROM A SEMICONDUCTOR STRUC...

TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE

ETCHING AGENT, ETCHING METHOD AND LIQUID FOR PREPARING ETCHING AGENT

SURFACE TREATMENT FOR AN IMPLANT SURFACE

ETCHING COMPOSITION AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE...

ETCHING LIQUID FOR FILM OF MULTILAYER STRUCTURE CONTAINING COPPER L...