Four linear actuators to position x y table

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CPC
G05B2219/49274

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/49274Four linear actuators to position x y table

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Patents Grantslast 30 patents

Information Patent Grant
Stage driving exposure apparatus wherein the number of driving devi...
- Patent number 5,883,702
- Issue date Mar 16, 1999
- Nikon Corporation
- Masateru Tokunaga
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR DETERMINING AN INITIALLY UNKNOWN COMMUTAT...
- Publication number 20120074890
- Publication date Mar 29, 2012
- NIKON CORPORATION
- Scott Coakley
- G05 - CONTROLLING REGULATING