Fuzzy feedback adapts parameters model

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G05B2219/42136

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/42136Fuzzy feedback adapts parameters model

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Patents Grantslast 30 patents

Information Patent Grant
Hybrid fuzzy closed-loop sub-micron critical dimension control in w...
- Patent number 6,556,876
- Issue date Apr 29, 2003
- National Semiconductor Corporation
- Hank Prosack
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Method and device for calculating process variables of an industria...
- Publication number 20030208287
- Publication date Nov 6, 2003
- Matthias Kurz
- G05 - CONTROLLING REGULATING