Gains for pid compensator as function of xy position

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G05B2219/41212

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/41212Gains for pid compensator as function of xy position

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Patents Grantslast 30 patents

Information Patent Grant
Alignment apparatus
- Patent number 6,025,688
- Issue date Feb 15, 2000
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G05 - CONTROLLING REGULATING