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CPC
G05B2219/41331
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/41331
Galvano driver
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Patents Grants
last 30 patents
Information
Patent Grant
Driving apparatus and article processing apparatus
Patent number
9,557,730
Issue date
Jan 31, 2017
Canon Kabushiki Kaisha
Shinji Ueda
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for positioning a movable element using a galv...
Patent number
6,782,296
Issue date
Aug 24, 2004
Randolf Hoche
G05 - CONTROLLING REGULATING
Information
Patent Grant
Multi-tool positioning system
Patent number
5,847,960
Issue date
Dec 8, 1998
Electro Scientific Industries, Inc.
Donald R. Cutler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for coordinating the movements of stages in a...
Patent number
5,798,927
Issue date
Aug 25, 1998
Electro Scientific Industries, Inc.
Donald R. Cutler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High speed, high accuracy multi-stage tool positioning system
Patent number
5,751,585
Issue date
May 12, 1998
Electro Scientific Industries, Inc.
Donald R. Cutler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
POSITIONING CONTROL APPARATUS AND MACHINE TOOL
Publication number
20110137449
Publication date
Jun 9, 2011
Canon Kabushiki Kaisha
Shinji Ueda
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and device for adjusting an element
Publication number
20030011788
Publication date
Jan 16, 2003
Randolf Hoche
G05 - CONTROLLING REGULATING