Gaseous compositions

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C23F1/12

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CCHEMISTRY METALLURGY C23Surface treatment C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 C23F1/00Etching metallic material by chemical means

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C23F1/12Gaseous compositions

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a semiconductor using slurry
- Patent number 12,176,217
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Hung Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,170,206
- Issue date Dec 17, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 12,094,686
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,065,746
- Issue date Aug 20, 2024
- SCREEN Holdings Co., Ltd.
- Akihisa Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-terminating etching interfaces using iodine-based chemistries
- Patent number 12,017,276
- Issue date Jun 25, 2024
- Colorado School of Mines
- Owen Hildreth
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Dry etching method, method for manufacturing semiconductor element,...
- Patent number 11,972,955
- Issue date Apr 30, 2024
- Resonac Corporation
- Kazuma Matsui
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Amorphous layers for reducing copper diffusion and method forming same
- Patent number 11,967,522
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching of alkali metal compounds
- Patent number 11,926,903
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Nitin Deepak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor fabricating method
- Patent number 11,915,939
- Issue date Feb 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Yoshihide Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for selective metal compound removal
- Patent number 11,769,671
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Zhenjiang Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry non-plasma treatment system
- Patent number 11,745,202
- Issue date Sep 5, 2023
- Tokyo Electron Limited
- Martin Kent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,428
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,427
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas phase etch with controllable etch selectivity of metals
- Patent number 11,715,643
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Subhadeep Kal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry
- Patent number 11,688,607
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Hung Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for etching structures and smoothing sidewalls
- Patent number 11,658,042
- Issue date May 23, 2023
- Applied Materials, Inc.
- Nancy Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition and etching of transition metal dichalcogen...
- Patent number 11,643,728
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Jani Hämäläinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching processes
- Patent number 11,640,899
- Issue date May 2, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing metal wire and metal wire grid, wire grid p...
- Patent number 11,619,773
- Issue date Apr 4, 2023
- BOE Technology Group Co., Ltd.
- Shuilang Dong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method, method for manufacturing semiconductor device,...
- Patent number 11,618,954
- Issue date Apr 4, 2023
- Central Glass Company, Limited
- Yuuta Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and recording medium for recording cleaning program
- Patent number 11,530,486
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Daisuke Shirasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,380,523
- Issue date Jul 5, 2022
- HITACHI HIGH-TECH CORPORATION
- Yoshihide Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method and β-diketone-filled container
- Patent number 11,335,573
- Issue date May 17, 2022
- Cental Glass Company, Limited
- Kunihiro Yamauchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous layers for reducing copper diffusion and method forming same
- Patent number 11,315,829
- Issue date Apr 26, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method
- Patent number 11,289,340
- Issue date Mar 29, 2022
- Central Glass Company, Limited
- Shoi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preparing a conductive, transparent and flexible membrane
- Patent number 11,279,998
- Issue date Mar 22, 2022
- Centre National de la Recherche Scientifique
- Abdel-Aziz El Mel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,770
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,769
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 11,183,367
- Issue date Nov 23, 2021
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment of silicon or silicon germanium surfaces using or...
- Patent number 11,062,910
- Issue date Jul 13, 2021
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250062130
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Yusuke TAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20250037970
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS LAYERS FOR REDUCING COPPER DIFFUSION AND METHOD FORMING SAME
- Publication number 20240258160
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND PROCESSING DEVICE
- Publication number 20240191359
- Publication date Jun 13, 2024
- Tokyo Electron Limited
- Toshio HASEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL NICKEL FOAM HAVING HIERARCHICAL PORE STRUCTURE, METHOD OF PRO...
- Publication number 20240124992
- Publication date Apr 18, 2024
- DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY
- Jong-Sung YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20240026548
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230374671
- Publication date Nov 23, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ETCH PROCESS FOR OXIDE OF ALKALINE EARTH METAL
- Publication number 20230374670
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Du Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR USING SLURRY
- Publication number 20230290641
- Publication date Sep 14, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-HUNG LIAO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...
- Publication number 20230250534
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Jani Hämäläinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230253182
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PROCESSING A SILICON SURFACE USING MULTIPLE...
- Publication number 20230193475
- Publication date Jun 22, 2023
- ASM IP HOLDING, B.V.
- Gregory Deye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER ROUGHNESS REDUCING METHODS AND DEVICES
- Publication number 20230151495
- Publication date May 18, 2023
- NanoClear Technologies, Inc.
- Harold Frank Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT,...
- Publication number 20230154763
- Publication date May 18, 2023
- SHOWA DENKO K.K.
- Kazuma MATSUI
- B08 - CLEANING
Information Patent Application
METHOD OF METAL OXIDE INFILTRATION INTO PHOTORESIST
- Publication number 20230002878
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Nancy FUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FABRICATING METHOD
- Publication number 20230005749
- Publication date Jan 5, 2023
- Hitachi High-Tech Corporation
- Yoshihide Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220356584
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR CLEANING OF SUBSTRATE SURFACES
- Publication number 20220356585
- Publication date Nov 10, 2022
- LAM RESEARCH CORPORATION
- David MUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVE METAL COMPOUND REMOVAL
- Publication number 20220351979
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Zhenjiang Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...
- Publication number 20220325418
- Publication date Oct 13, 2022
- SHOWA DENKO K.K.
- Kazuma MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-TERMINATING ETCHING INTERFACES USING IODINE-BASED CHEMISTRIES
- Publication number 20220297190
- Publication date Sep 22, 2022
- Colorado School Of Mines
- Owen Hildreth
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220267909
- Publication date Aug 25, 2022
- SCREEN Holdings Co., Ltd.
- Akihisa IWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Amorphous Layers for Reducing Copper Diffusion and Method Forming Same
- Publication number 20220254679
- Publication date Aug 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220208557
- Publication date Jun 30, 2022
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCHING METHOD
- Publication number 20220172956
- Publication date Jun 2, 2022
- Central Glass Company, Limited
- Shoi SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREPARING A CONDUCTIVE, TRANSPARENT AND FLEXIBLE MEMBRANE
- Publication number 20220162736
- Publication date May 26, 2022
- Centre National de la Recherche Scientifique
- Abdel-Aziz EL MEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119961
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119962
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20220120708
- Publication date Apr 21, 2022
- Yurina Amamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVE METAL COMPOUND REMOVAL
- Publication number 20220084832
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS

Gaseous compositions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing a semiconductor using slurry

Method of processing substrate, method of manufacturing semiconduct...

Atomic layer etching processes

Substrate processing method and substrate processing apparatus

Self-terminating etching interfaces using iodine-based chemistries

Dry etching method, method for manufacturing semiconductor element,...

Amorphous layers for reducing copper diffusion and method forming same

Etching of alkali metal compounds

Semiconductor fabricating method

Systems and methods for selective metal compound removal

Dry non-plasma treatment system

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Gas phase etch with controllable etch selectivity of metals

Slurry

Methods for etching structures and smoothing sidewalls

Atomic layer deposition and etching of transition metal dichalcogen...

Atomic layer etching processes

Method of manufacturing metal wire and metal wire grid, wire grid p...

Dry etching method, method for manufacturing semiconductor device,...

Cleaning method and recording medium for recording cleaning program

Semiconductor manufacturing apparatus

Dry etching method and β-diketone-filled container

Amorphous layers for reducing copper diffusion and method forming same

Dry etching method

Method for preparing a conductive, transparent and flexible membrane

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Atomic layer etching processes

Surface treatment of silicon or silicon germanium surfaces using or...

Patents Applicationslast 30 patents

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

ATOMIC LAYER ETCHING PROCESSES

AMORPHOUS LAYERS FOR REDUCING COPPER DIFFUSION AND METHOD FORMING SAME

ETCHING METHOD AND PROCESSING DEVICE

NOVEL NICKEL FOAM HAVING HIERARCHICAL PORE STRUCTURE, METHOD OF PRO...

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

ETCH PROCESS FOR OXIDE OF ALKALINE EARTH METAL

METHOD FOR MANUFACTURING A SEMICONDUCTOR USING SLURRY

ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...

ATOMIC LAYER ETCHING PROCESSES

SYSTEMS AND METHODS FOR PROCESSING A SILICON SURFACE USING MULTIPLE...

ATOMIC LAYER ROUGHNESS REDUCING METHODS AND DEVICES

DRY ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT,...

METHOD OF METAL OXIDE INFILTRATION INTO PHOTORESIST

SEMICONDUCTOR FABRICATING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

VAPOR CLEANING OF SUBSTRATE SURFACES

SYSTEMS AND METHODS FOR SELECTIVE METAL COMPOUND REMOVAL

METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...

SELF-TERMINATING ETCHING INTERFACES USING IODINE-BASED CHEMISTRIES

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Amorphous Layers for Reducing Copper Diffusion and Method Forming Same

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DRY ETCHING METHOD

METHOD FOR PREPARING A CONDUCTIVE, TRANSPARENT AND FLEXIBLE MEMBRANE

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

SENSOR AND MANUFACTURING METHOD THEREOF

SYSTEMS AND METHODS FOR SELECTIVE METAL COMPOUND REMOVAL