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Handshake between machine and agv readiness to load, unload workpiece
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CPC
G05B2219/31216
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/31216
Handshake between machine and agv readiness to load, unload workpiece
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Patents Grants
last 30 patents
Information
Patent Grant
Cross-storage transportation control method, apparatus and system
Patent number
11,226,628
Issue date
Jan 18, 2022
HANGZHOU HIKROBOT TECHNOLOGY CO., LTD
Huapeng Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Modularity of Tec-Cell, FOUP and substrate containers and carriers
Patent number
10,734,268
Issue date
Aug 4, 2020
Murata Machinery, Ltd.
Fachri Atamny
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate treating system
Patent number
9,176,496
Issue date
Nov 3, 2015
SCREEN Holdings Co., Ltd.
Hideki Shibata
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for an efficient handshake between material h...
Patent number
8,356,968
Issue date
Jan 22, 2013
Applied Materials, Inc.
Vinay K. Shah
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for enhanced operation of substrate carrier h...
Patent number
8,204,617
Issue date
Jun 19, 2012
Applied Materials, Inc.
Michael Teferra
G05 - CONTROLLING REGULATING
Information
Patent Grant
Transfer system and transfer method of object to be processed
Patent number
7,826,918
Issue date
Nov 2, 2010
Tokyo Electron Limited
Toshihiko Iijima
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for enhanced operation of substrate carrier h...
Patent number
7,720,557
Issue date
May 18, 2010
Applied Materials, Inc.
Michael Teferra
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATING SYSTEM
Publication number
20130079914
Publication date
Mar 28, 2013
Hideki SHIBATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR AN EFFICIENT HANDSHAKE BETWEEN MATERIAL H...
Publication number
20090202336
Publication date
Aug 13, 2009
Applied Materials, Inc.
Vinay K. Shah
G05 - CONTROLLING REGULATING
Information
Patent Application
METHODS AND APPARATUS FOR ENHANCED OPERATION OF SUBSTRATE CARRIER H...
Publication number
20070276532
Publication date
Nov 29, 2007
APPLIED MATERIALS, INC.
Michael Teferra
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods and apparatus for enhanced operation of substrate carrier h...
Publication number
20060190118
Publication date
Aug 24, 2006
Michael Teferra
G05 - CONTROLLING REGULATING
Information
Patent Application
Transfer system and transfer method of object to be processed
Publication number
20060152211
Publication date
Jul 13, 2006
TOKYO ELECTRON LIMITED
Toshihiko Iijima
G05 - CONTROLLING REGULATING