High gain in narrow band of frequencies centered around frequency of rotation

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G05B2219/41017

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/41017High gain in narrow band of frequencies centered around frequency of rotation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Controller, lithographic apparatus, method of controlling the posit...
- Patent number 8,854,607
- Issue date Oct 7, 2014
- ASML Netherlands B.V.
- Ramidin Izair Kamidi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Servo system with once per revolution rejection
- Patent number 5,610,487
- Issue date Mar 11, 1997
- Maxtor Corporation
- Larry G. Hutsell
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Controller, Lithographic Apparatus, Method of Controlling the Posit...
- Publication number 20120127449
- Publication date May 24, 2012
- ASML NETHERLANDS B.V.
- Ramidin Izair Kamidi
- G05 - CONTROLLING REGULATING