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In-process and post-process measurement combined
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CPC
G05B2219/37577
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/37577
In-process and post-process measurement combined
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Patents Grants
last 30 patents
Information
Patent Grant
Automatic analysis device and specimen inspection automation system
Patent number
10,768,187
Issue date
Sep 8, 2020
HITACHI HIGH-TECH CORPORATION
Kenichi Yasuzawa
G01 - MEASURING TESTING
Information
Patent Grant
Shape measuring apparatus, structure manufacturing system, stage ap...
Patent number
9,733,070
Issue date
Aug 15, 2017
Nikon Corporation
Toru Aramaki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Monitoring system and method for the in-process monitoring of machi...
Patent number
7,328,081
Issue date
Feb 5, 2008
Werner Kluft
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for feedback-adjusting working condition for i...
Patent number
6,999,846
Issue date
Feb 14, 2006
Toyota Jidosha Kabushiki Kaisha
Chisato Kato
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for feedback-adjusting working condition for i...
Patent number
6,415,200
Issue date
Jul 2, 2002
Toyota Jidosha Kabushiki Kaisha
Chisato Kato
G05 - CONTROLLING REGULATING
Information
Patent Grant
Machine tools
Patent number
6,038,489
Issue date
Mar 14, 2000
Unova U.K. Limited
John David Pickles
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for control of polishing pad conditioning for...
Patent number
5,664,987
Issue date
Sep 9, 1997
National Semiconductor Corporation
Peter Henry Renteln
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
SHAPE MEASURING APPARATUS, STRUCTURE MANUFACTURING SYSTEM, STAGE AP...
Publication number
20150260507
Publication date
Sep 17, 2015
Nikon Corporation
TORU ARAMAKI
G01 - MEASURING TESTING
Information
Patent Application
Monitoring system and method for the in-process monitoring of machi...
Publication number
20060178771
Publication date
Aug 10, 2006
Werner Kluft
G05 - CONTROLLING REGULATING
Information
Patent Application
Apparatus and method for feedback-adjusting working condition for i...
Publication number
20020133268
Publication date
Sep 19, 2002
Toyota Jidosha Kabushiki Kaisha
Chisato Kato
G05 - CONTROLLING REGULATING