TREA

including details of precursor replenishment

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Industry

  • CPC
  • Y10T117/1056
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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes non-coating apparatus therefor

Current Industry

Y10T117/1056including details of precursor replenishment
Industries