including wafer orienting means

Industry

CPC
Y10S414/136

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S414/00Material or article handling

Current Industry

Y10S414/136including wafer orienting means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Process apparatus with on-the-fly substrate centering
- Patent number 11,664,259
- Issue date May 30, 2023
- BROOKS AUTOMATION US, LLC
- Leigh F. Sharrock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment apparatus
- Patent number 10,790,179
- Issue date Sep 29, 2020
- Semigear, Inc.
- Seockhwi Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system, and methods for weighing and positioning wafers
- Patent number 9,791,309
- Issue date Oct 17, 2017
- Microtronic, Inc.
- Reiner G. Fenske
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process apparatus with on-the-fly substrate centering
- Patent number 9,514,974
- Issue date Dec 6, 2016
- Brooks Automation Inc.
- Leigh F. Sharrock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot with integrated aligner
- Patent number 9,299,598
- Issue date Mar 29, 2016
- LAM Research Corp.
- Richard M. Blank
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate position aligner
- Patent number 9,218,996
- Issue date Dec 22, 2015
- Applied Materials, Inc.
- Manoj A. Gajendra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Work conveying system
- Patent number 9,022,716
- Issue date May 5, 2015
- Canon Kabushiki Kaisha
- Kazunori Yabe
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Horizontal epitaxy furnace for channel SiGe formation
- Patent number 9,018,065
- Issue date Apr 28, 2015
- GLOBALFOUNDRIES Inc.
- Joanna Wasyluk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, system, and methods for weighing and positioning wafers
- Patent number 9,004,838
- Issue date Apr 14, 2015
- Microtronic, Inc.
- Reiner G. Fenske
- G01 - MEASURING TESTING
Information Patent Grant
Anodizing apparatus
- Patent number 8,992,746
- Issue date Mar 31, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Yasuyoshi Miyaji
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Robot system
- Patent number 8,983,659
- Issue date Mar 17, 2015
- Kabushiki Kaisha Yaskawa Denki
- Yoshiki Kimura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer handling system for a loadlock
- Patent number 8,920,097
- Issue date Dec 30, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Soon Chye Chan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Positioning jig and method of adjusting position
- Patent number 8,899,402
- Issue date Dec 2, 2014
- Senju Metal Industry Co., Ltd.
- Toshihiko Mutsuji
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Systems, methods and apparatuses for magnetic processing of solar m...
- Patent number 8,888,869
- Issue date Nov 18, 2014
- Hanergy Holding Group Ltd.
- Bruce Krein
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
- Patent number 8,703,400
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Kenji Tsutsumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Producing method of semiconductor device and substrate processing a...
- Patent number 8,636,882
- Issue date Jan 28, 2014
- Hitachi Kokusai Electric Inc.
- Kenichi Suzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,550,031
- Issue date Oct 8, 2013
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for introducing a substrate into a process chamber
- Patent number 8,462,008
- Issue date Jun 11, 2013
- ADP Engineering Co., Ltd.
- In Taek Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and method for introducing a substrate into a process chamber
- Patent number 8,462,009
- Issue date Jun 11, 2013
- ADP Engineering Co., Ltd.
- In Taek Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system, substrate placing position adjusting m...
- Patent number 8,433,436
- Issue date Apr 30, 2013
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
High speed substrate aligner apparatus
- Patent number 8,403,619
- Issue date Mar 26, 2013
- Brooks Automation, Inc.
- Jairo Terra Moura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for machining a workpiece on a workpiece support
- Patent number 8,357,588
- Issue date Jan 22, 2013
- Infineon Technologies AG
- Stephen Bradl
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Processing thin wafers
- Patent number 8,354,001
- Issue date Jan 15, 2013
- Intevac, Inc.
- Terry Bluck
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer center finding with a Kalman filter
- Patent number 8,270,702
- Issue date Sep 18, 2012
- Brooks Automation, Inc.
- Christopher C. Kiley
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus
- Patent number 8,231,731
- Issue date Jul 31, 2012
- Hitachi Kokusai Electric, Inc.
- Kenichi Suzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing apparatus and wafer loading/unlo...
- Patent number 8,221,045
- Issue date Jul 17, 2012
- Samsung Electronics Co., Ltd.
- Jun-Sig Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,215,262
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor wafer robot alignment system and method
- Patent number 8,215,890
- Issue date Jul 10, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Shu Tseng
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Processing thin wafers
- Patent number 8,206,551
- Issue date Jun 26, 2012
- Intevac, Inc.
- Terry Bluck
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,181,596
- Issue date May 22, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POSITION ALIGNER
- Publication number 20140271085
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Manoj A. GAJENDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positioning Jig and Method of Adjusting Position
- Publication number 20140116847
- Publication date May 1, 2014
- Senju Metal lndustry Co., Ltd.
- Toshihiko MUTSUJI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
ROBOT SYSTEM
- Publication number 20130190924
- Publication date Jul 25, 2013
- KABUSHIKI KAISHA YASKAWA DENKI
- Yoshiki KIMURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120320361
- Publication date Dec 20, 2012
- Tetsuya Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION
- Publication number 20120255795
- Publication date Oct 11, 2012
- MICROTRONIC, INC.
- Reiner G. FENSKE
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION
- Publication number 20120255794
- Publication date Oct 11, 2012
- MICROTRONIC, INC.
- Reiner G. FENSKE
- G01 - MEASURING TESTING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120180983
- Publication date Jul 19, 2012
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
ANODIZING APPARATUS
- Publication number 20120138455
- Publication date Jun 7, 2012
- Yasuyoshi MIYAJI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROCESSING THIN WAFERS
- Publication number 20120093616
- Publication date Apr 19, 2012
- Terry BLUCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...
- Publication number 20120072005
- Publication date Mar 22, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SPEED SUBSTRATE ALIGNER APPARATUS
- Publication number 20120045300
- Publication date Feb 23, 2012
- Brooks Automation, Inc.
- Jairo Terra Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, METHODS AND APPARATUSES FOR MAGNETIC PROCESSING OF SOLAR M...
- Publication number 20120005884
- Publication date Jan 12, 2012
- MIASOLE
- Bruce Krein
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SYSTEMS, METHODS AND APPARATUSES FOR MAGNETIC PROCESSING OF SOLAR M...
- Publication number 20120003777
- Publication date Jan 5, 2012
- MIASOLE
- Bruce Krein
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
WORK CONVEYING SYSTEM
- Publication number 20110280691
- Publication date Nov 17, 2011
- Canon Kabushiki Kaisha
- Kazunori Yabe
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20110239936
- Publication date Oct 6, 2011
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MACHINING A WORKPIECE ON A WORKPIECE SUPPORT
- Publication number 20110232074
- Publication date Sep 29, 2011
- Stephen Bradl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
- Publication number 20110155693
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES
- Publication number 20110093237
- Publication date Apr 21, 2011
- Brooks Automation, Inc.
- Christopher C. Kiley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CENTER FINDING WITH A KALMAN FILTER
- Publication number 20100324732
- Publication date Dec 23, 2010
- Brooks Automation, Inc.
- Christopher C. Kiley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, METHODS AND APPARATUSES FOR MAGNETIC PROCESSING OF SOLAR M...
- Publication number 20100317141
- Publication date Dec 16, 2010
- MIASOLE
- Bruce Krein
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SEMICONDUCTOR WAFER ROBOT ALIGNMENT SYSTEM AND METHOD
- Publication number 20100234992
- Publication date Sep 16, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuo-Shu TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Position correcting apparatus, vacuum processing equipment and posi...
- Publication number 20100211210
- Publication date Aug 19, 2010
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INTRODUCING A SUBSTRATE INTO A PROCESS CHAMBER
- Publication number 20100148978
- Publication date Jun 17, 2010
- ADP Engineering Co., Ltd.
- In Taek LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INTRODUCING A SUBSTRATE INTO A PROCESS CHAMBER
- Publication number 20100148979
- Publication date Jun 17, 2010
- ADP Engineering Co., Ltd.
- In Taek LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIX-BAR LINKAGE POSITIONING MECHANISM
- Publication number 20100019117
- Publication date Jan 28, 2010
- Industrial Technology Research Institute
- Kuan-Chou CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TRANSPORTING SUBSTRATES
- Publication number 20090317226
- Publication date Dec 24, 2009
- ULVAC, Inc.
- Kenji AGOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING THIN WAFERS
- Publication number 20090252582
- Publication date Oct 8, 2009
- INTEVAC,INC.
- Terry BLUCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS WITH WAFER ALIGNMENT DEVICE
- Publication number 20090252580
- Publication date Oct 8, 2009
- ASM JAPAN K.K.
- Masahiro Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20090239386
- Publication date Sep 24, 2009
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND WAFER LOADING/UNLO...
- Publication number 20090191042
- Publication date Jul 30, 2009
- Jun-Sig Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

including wafer orienting means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process apparatus with on-the-fly substrate centering

Alignment apparatus

Apparatus, system, and methods for weighing and positioning wafers

Process apparatus with on-the-fly substrate centering

Robot with integrated aligner

Substrate position aligner

Work conveying system

Horizontal epitaxy furnace for channel SiGe formation

Apparatus, system, and methods for weighing and positioning wafers

Anodizing apparatus

Robot system

Wafer handling system for a loadlock

Positioning jig and method of adjusting position

Systems, methods and apparatuses for magnetic processing of solar m...

Substrate treatment method, coating treatment apparatus, and substr...

Producing method of semiconductor device and substrate processing a...

Cluster tool architecture for processing a substrate

System and method for introducing a substrate into a process chamber

System and method for introducing a substrate into a process chamber

Substrate processing system, substrate placing position adjusting m...

High speed substrate aligner apparatus

Method for machining a workpiece on a workpiece support

Processing thin wafers

Wafer center finding with a Kalman filter

Substrate processing apparatus

Semiconductor device manufacturing apparatus and wafer loading/unlo...

Cluster tool architecture for processing a substrate

Semiconductor wafer robot alignment system and method

Processing thin wafers

Cluster tool architecture for processing a substrate

Patents Applicationslast 30 patents

SUBSTRATE POSITION ALIGNER

Positioning Jig and Method of Adjusting Position

ROBOT SYSTEM

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION

APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

ANODIZING APPARATUS

PROCESSING THIN WAFERS

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...

HIGH SPEED SUBSTRATE ALIGNER APPARATUS

SYSTEMS, METHODS AND APPARATUSES FOR MAGNETIC PROCESSING OF SOLAR M...

SYSTEMS, METHODS AND APPARATUSES FOR MAGNETIC PROCESSING OF SOLAR M...

WORK CONVEYING SYSTEM

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

METHOD FOR MACHINING A WORKPIECE ON A WORKPIECE SUPPORT

SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...

WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES

WAFER CENTER FINDING WITH A KALMAN FILTER

SYSTEMS, METHODS AND APPARATUSES FOR MAGNETIC PROCESSING OF SOLAR M...

SEMICONDUCTOR WAFER ROBOT ALIGNMENT SYSTEM AND METHOD

Position correcting apparatus, vacuum processing equipment and posi...

SYSTEM AND METHOD FOR INTRODUCING A SUBSTRATE INTO A PROCESS CHAMBER

SYSTEM AND METHOD FOR INTRODUCING A SUBSTRATE INTO A PROCESS CHAMBER

SIX-BAR LINKAGE POSITIONING MECHANISM

METHOD FOR TRANSPORTING SUBSTRATES

PROCESSING THIN WAFERS

WAFER PROCESSING APPARATUS WITH WAFER ALIGNMENT DEVICE

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND WAFER LOADING/UNLO...